| Thin film piezoelectrics for MEMS S Trolier-McKinstry, P Muralt Journal of Electroceramics 12, 7-17, 2004 | 1243 | 2004 |
| Ferroelectric thin films for micro-sensors and actuators: a review P Muralt Journal of micromechanics and microengineering 10 (2), 136, 2000 | 1102 | 2000 |
| Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications MA Dubois, P Muralt Applied Physics Letters 74 (20), 3032-3034, 1999 | 571 | 1999 |
| PZT thin films for microsensors and actuators: Where do we stand? P Muralt IEEE transactions on ultrasonics, ferroelectrics, and frequency control 47 …, 2000 | 451 | 2000 |
| {1 0 0}-Textured, piezoelectric Pb (Zrx, Ti1− x) O3 thin films for MEMS: integration, deposition and properties N Ledermann, P Muralt, J Baborowski, S Gentil, K Mukati, M Cantoni, ... Sensors and Actuators A: Physical 105 (2), 162-170, 2003 | 438 | 2003 |
| Recent progress in materials issues for piezoelectric MEMS P Muralt Journal of the American Ceramic Society 91 (5), 1385-1396, 2008 | 406 | 2008 |
| Micromachined infrared detectors based on pyroelectric thin films P Muralt Reports on progress in physics 64 (10), 1339, 2001 | 399 | 2001 |
| Piezoelectric thin films for sensors, actuators, and energy harvesting P Muralt, RG Polcawich, S Trolier-McKinstry MRS bulletin 34 (9), 658-664, 2009 | 375 | 2009 |
| Piezoelectric micromachined ultrasonic transducers based on PZT thin films P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005 | 369 | 2005 |
| Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering MA Dubois, P Muralt Journal of Applied Physics 89 (11), 6389-6395, 2001 | 366 | 2001 |
| Thickness dependence of the properties of highly c-axis textured AlN thin films F Martin, P Muralt, MA Dubois, A Pezous Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (2 …, 2004 | 362 | 2004 |
| Measurement of the effective transverse piezoelectric coefficient e31, f of AlN and Pb (Zrx, Ti1− x) O3 thin films MA Dubois, P Muralt Sensors and Actuators A: Physical 77 (2), 106-112, 1999 | 336 | 1999 |
| Texture control of and thin films with seeding P Muralt, T Maeder, L Sagalowicz, S Hiboux, S Scalese, D Naumovic, ... Journal of Applied Physics 83 (7), 3835-3841, 1998 | 328 | 1998 |
| Scanning tunneling potentiometry P Muralt, DW Pohl Applied Physics Letters 48 (8), 514-516, 1986 | 305 | 1986 |
| Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size S Bühlmann, B Dwir, J Baborowski, P Muralt Integrated Ferroelectrics 50 (1), 261-267, 2002 | 290 | 2002 |
| A micro-solid oxide fuel cell system as battery replacement A Bieberle-Hütter, D Beckel, A Infortuna, UP Muecke, JLM Rupp, ... Journal of Power Sources 177 (1), 123-130, 2008 | 264 | 2008 |
| Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions P Muralt, A Kholkin, M Kohli, T Maeder Sensors and Actuators A: Physical 53 (1-3), 398-404, 1996 | 245 | 1996 |
| Fabrication and characterization of PZT thin-film vibrators for micromotors P Muralt, M Kohli, T Maeder, A Kholkin, K Brooks, N Setter, R Luthier Sensors and Actuators A: Physical 48 (2), 157-165, 1995 | 243 | 1995 |
| Piezoelectric aluminum nitride thin films for microelectromechanical systems G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby MRS bulletin 37 (11), 1051-1061, 2012 | 233 | 2012 |
| Piezoelectric thin films for MEMS P Muralt Integrated Ferroelectrics 17 (1-4), 297-307, 1997 | 229 | 1997 |
Andrei KholkinUniversity of Aveiro在 ua.pt 的电子邮件经过验证
