A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement M Baranski, S Perrin, N Passilly, L Froehly, J Albero, S Bargiel, C Gorecki Optics express 22 (11), 13202-13212, 2014 | 34 | 2014 |
Dense arrays of millimeter-sized glass lenses fabricated at wafer-level J Albero, S Perrin, S Bargiel, N Passilly, M Baranski, L Gauthier-Manuel, ... Optics express 23 (9), 11702-11712, 2015 | 30 | 2015 |
Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate M Baranski, S Bargiel, N Passilly, B Guichardaz, E Herth, C Gorecki, C Jia, ... IEEE Photonics Technology Letters 26 (1), 100-103, 2014 | 17 | 2014 |
A numerical model of wet isotropic etching of silicon molds for microlenses fabrication M Baranski, J Albero, R Kasztelanic, C Gorecki Journal of The Electrochemical Society 158 (11), D681-D688, 2011 | 16 | 2011 |
MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications SS Muttikulangara, M Baranski, S Rehman, L Hu, J Miao Sensors 17 (10), 2372, 2017 | 15 | 2017 |
Swept source optical coherence tomography endomicroscope based on vertically integrated Mirau micro interferometer: concept and technology P Struk, S Bargiel, L Froehly, M Baranski, N Passilly, J Albero, C Gorecki IEEE, 2015 | 15 | 2015 |
Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems M Baranski, S Bargiel, N Passilly, C Gorecki, C Jia, J Frömel, M Wiemer Applied Optics 54 (22), 6924-6934, 2015 | 14 | 2015 |
Microfabrication of axicons by glass blowing at a wafer-level JV Carrión, J Albero, M Baranski, C Gorecki, N Passilly Optics letters 44 (13), 3282-3285, 2019 | 13 | 2019 |
3D micro-optical lens scanner made by multi-wafer bonding technology S Bargiel, C Gorecki, M Barański, N Passilly, M Wiemer, C Jia, J Froemel MOEMS and Miniaturized Systems XII 8616, 861605, 2013 | 13 | 2013 |
Impact of mirror spider legs on imaging quality in Mirau micro-interferometry J Lullin, S Perrin, M Baranski, S Bargiel, L Froehly, N Passilly, J Albero, ... Optics Letters 40 (10), 2209-2212, 2015 | 9 | 2015 |
Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses S Bargiel, C Jia, M Barański, J Frömel, N Passilly, C Gorecki, M Wiemer Procedia Engineering 47, 1133-1136, 2012 | 9 | 2012 |
Deep Wet-Etched Silicon Cavities for Micro-Optical Sensors: Influence of Masking on Sidewalls Surface Quality R Chutani, N Passilly, J Albero, M Baranski, C Gorecki Microelectromechanical Systems, Journal of 23 (3), 585-591, 2014 | 8 | 2014 |
Computational integral field spectroscopy with diverse imaging M Baranski, S Rehman, SS Muttikulangara, G Barbastathis, J Miao JOSA A 34 (9), 1711-1719, 2017 | 7 | 2017 |
Fabrication of 100% fill factor arrays of microlenses from silicon molds M Baranski, N Passilly, J Albero, C Gorecki SPIE Photonics Europe, 84281G-84281G-7, 2012 | 7 | 2012 |
Miniature Schwarzschild objective as a micro-optical component free of main aberrations: concept, design, and first realization with silicon-glass micromachining M Baranski, N Passilly, S Bargiel, L Froehly, C Gorecki Applied Optics 55 (10), 2771-2779, 2016 | 5 | 2016 |
Simple method based on intensity measurements for characterization of aberrations from micro-optical components S Perrin, M Baranski, L Froehly, J Albero, N Passilly, C Gorecki Applied optics 54 (31), 9060-9064, 2015 | 5 | 2015 |
Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry J Lullin, S Bargiel, E Courjon, S Perrin, M Baranski, N Passilly, C Gorecki Optical MEMS and Nanophotonics (OMN), 2014 International Conference on, 87-88, 2014 | 5 | 2014 |
Multi-wafer bonding, stacking and interconnecting of integrated 3-D MEMS micro scanners M Wiemer, D Wünsch, J Frömel, T Gessner, S Bargiel, M Barański, ... International Journal of Microwave & Optical Technology 9 (1), 128-133, 2014 | 5 | 2014 |
Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy SS Muttikulangara, M Baranski, S Rehman, L Hu, J Miao Micro Electro Mechanical Systems (MEMS), 2018 IEEE, 696-699, 2018 | 4 | 2018 |
Arrays of millimeter-sized glass lenses for miniature inspection systems J Albero, S Perrin, S Bargiel, M Baranski, N Passilly, L Gauthier-Manuel, ... Micro-Optics 2014 9130, 91300U, 2014 | 4 | 2014 |