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Thomas V Pistor
Thomas V Pistor
Panoramic Technology Inc.
在 panoramictech.com 的电子邮件经过验证
标题
引用次数
引用次数
年份
Role of light intensification by cracks in optical breakdown on surfaces
FY Genin, A Salleo, TV Pistor, LL Chase
JOSA A 18 (10), 2607-2616, 2001
2812001
Laser intensification by spherical inclusions embedded within multilayer coatings
CJ Stolz, MD Feit, TV Pistor
Applied optics 45 (7), 1594-1601, 2006
1112006
Electromagnetic simulation and modeling with applications in lithography
TV Pistor
University of California, Berkeley, 2001
1062001
Rigorous 3D simulation of phase defects in alternating phase-shifting masks
TV Pistor
21st Annual BACUS Symposium on Photomask Technology 4562, 1038-1050, 2002
892002
Modeling oblique incidence effects in photomasks
TV Pistor, AR Neureuther, RJ Socha
Optical Microlithography XIII 4000, 228-237, 2000
882000
Light intensification modeling of coating inclusions irradiated at 351 and 1053 nm
CJ Stolz, S Hafeman, TV Pistor
Applied optics 47 (13), C162-C166, 2008
602008
Electric-field enhancement by nodular defects in multilayer coatings irradiated at normal and 45 incidence
CJ Stolz, FY Genin, TV Pistor
Laser-Induced Damage in Optical Materials: 2003 5273, 41-49, 2004
482004
Rigorous simulation of mask corner effects in extreme ultraviolet lithography
TV Pistor, K Adam, A Neureuther
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1998
481998
Calculating aerial images from EUV masks
TV Pistor, AR Neureuther
Emerging Lithographic Technologies III 3676, 679-696, 1999
371999
Searching for optimal mitigation geometries for laser-resistant multilayer high-reflector coatings
SR Qiu, JE Wolfe, AM Monterrosa, MD Feit, TV Pistor, CJ Stolz
Applied Optics 50 (9), C373-C381, 2011
362011
Impact of substrate surface scratches on the laser damage resistance of multilayer coatings
SR Qiu, JE Wolfe, AM Monterrosa, WA Steele, NE Teslich, MD Feit, ...
Laser-Induced Damage in Optical Materials: 2010 7842, 490-499, 2010
192010
Effects of shifter edge topography on through focus performance
S Hotta, TV Pistor, K Adam, AR Neureuther
20th Annual BACUS Symposium on Photomask Technology 4186, 827-837, 2001
172001
Modeling of light intensification by conical pits within multilayer high reflector coatings
SR Qiu, JE Wolfe, AM Monterrosa, MD Feit, TV Pistor, CJ Stolz
Laser-Induced Damage in Optical Materials: 2009 7504, 211-219, 2009
162009
Photoresist shrinkage effects at EUV
TV Pistor, TI Wallow, CN Anderson, PP Naulleau
Extreme Ultraviolet (EUV) Lithography II 7969, 407-419, 2011
132011
Models for characterizing the printability of buried EUV defects
Y Deng, TV Pistor, AR Neureuther
Emerging Lithographic Technologies V 4343, 551-558, 2001
132001
Evaluating printability of buried native EUV mask phase defects through a modeling and simulation approach
M Upadhyaya, V Jindal, A Basavalingappa, H Herbol, J Harris-Jones, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 204-217, 2015
102015
Rigorous electromagnetic simulation of stepper alignment
TV Pistor, RJ Socha
Metrology, Inspection, and Process Control for Microlithography XVI 4689 …, 2002
102002
LAVA web-based remote simulation: enhancements for education and technology innovation
SI Lee, KC Ng, T Orimoto, J Pittenger, T Horie, K Adam, M Cheng, ...
Optical Microlithography XIV 4346, 1500-1506, 2001
102001
Atomic force metrology and 3D modeling of microtrenching in etched photomask features
B Todd, EK Miller, TV Pistor
Metrology, Inspection, and Process Control for Microlithography XV 4344, 208-221, 2001
102001
Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects
M Upadhyaya, A Basavalingappa, H Herbol, G Denbeaux, V Jindal, ...
Journal of Vacuum Science & Technology B 33 (2), 2015
92015
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