| (Invited review) Development of a broadband Mueller matrix ellipsometer as a powerful tool for nanostructure metrology S Liu, X Chen, C Zhang Thin Solid Films 584, 176-185, 2015 | 155 | 2015 |
| An insight into optical metrology in manufacturing Y Shimizu, LC Chen, DW Kim, X Chen, X Li, H Matsukuma Measurement Science and Technology 32 (4), 042003, 2021 | 89 | 2021 |
| Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry B Song, H Gu, S Zhu, H Jiang, X Chen, C Zhang, S Liu Applied Surface Science 439, 1079-1087, 2018 | 89 | 2018 |
| Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe 2: evolution from a single layer to few layers H Gu, B Song, M Fang, Y Hong, X Chen, H Jiang, W Ren, S Liu Nanoscale 11 (47), 22762-22771, 2019 | 87 | 2019 |
| Layer‐Dependent Dielectric Function of Wafer‐Scale 2D MoS2 B Song, H Gu, M Fang, X Chen, H Jiang, R Wang, T Zhai, YT Ho, S Liu Advanced Optical Materials 7 (2), 1801250, 2019 | 79 | 2019 |
| Mueller matrix imaging ellipsometry for nanostructure metrology S Liu, W Du, X Chen, H Jiang, C Zhang Optics Express 23 (13), 17316-17329, 2015 | 67 | 2015 |
| Optimal broadband Mueller matrix ellipsometer using multi-waveplates with flexibly oriented axes H Gu, X Chen, H Jiang, C Zhang, S Liu Journal of Optics 18 (2), 025702, 2016 | 66 | 2016 |
| Accurate characterization of nanoimprinted resist patterns using Mueller matrix ellipsometry X Chen, S Liu, C Zhang, H Jiang, Z Ma, T Sun, Z Xu Optics Express 22 (12), 15165-15177, 2014 | 47 | 2014 |
| Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology S Liu, Y Ma, X Chen, C Zhang Optical Engineering 51 (8), 081504-081504, 2012 | 46 | 2012 |
| Ultrathin polymer nanofibrils for solar-blind deep ultraviolet light photodetectors application LZ Qiu, SY Wei, HS Xu, ZX Zhang, ZY Guo, XG Chen, SY Liu, D Wu, ... Nano Letters 20 (1), 644-651, 2019 | 45 | 2019 |
| Layer-dependent dielectric permittivity of topological insulator Bi2Se3 thin films M Fang, Z Wang, H Gu, M Tong, B Song, X Xie, T Zhou, X Chen, H Jiang, ... Applied Surface Science 509, 144822, 2020 | 41 | 2020 |
| Complex Optical Conductivity of Two-Dimensional MoS2: A Striking Layer Dependency B Song, H Gu, M Fang, YT Ho, X Chen, H Jiang, S Liu The Journal of Physical Chemistry Letters 10 (20), 6246-6252, 2019 | 40 | 2019 |
| Depolarization artifacts in dual rotating-compensator Mueller matrix ellipsometry W Li, C Zhang, H Jiang, X Chen, S Liu Journal of Optics 18 (5), 055701, 2016 | 39 | 2016 |
| Laser autocollimation based on an optical frequency comb for absolute angular position measurement YL Chen, Y Shimizu, J Tamada, K Nakamura, H Matsukuma, X Chen, ... Precision Engineering 54, 284-293, 2018 | 38 | 2018 |
| Measurement configuration optimization for accurate grating reconstruction by Mueller matrix polarimetry X Chen, S Liu, C Zhang, H Jiang Journal of Micro/Nanolithography, MEMS, and MOEMS 12 (3), 033013-033013, 2013 | 38 | 2013 |
| Study of the retardance of a birefringent waveplate at tilt incidence by Mueller matrix ellipsometer H Gu, X Chen, C Zhang, H Jiang, S Liu Journal of Optics 20 (1), 015401, 2017 | 37 | 2017 |
| Improved measurement accuracy in optical scatterometry using correction-based library search X Chen, S Liu, C Zhang, H Jiang Applied optics 52 (27), 6726-6734, 2013 | 36 | 2013 |
| Depolarization effects from nanoimprinted grating structures as measured by Mueller matrix polarimetry X Chen, C Zhang, S Liu Applied Physics Letters 103 (15), 2013 | 35 | 2013 |
| Complete Dielectric Tensor and Giant Optical Anisotropy in Quasi-One-Dimensional ZrTe5 Z Guo, H Gu, M Fang, B Song, W Wang, X Chen, C Zhang, H Jiang, ... ACS Materials Letters 3 (5), 525-534, 2021 | 34 | 2021 |
| Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry H Gu, S Liu, X Chen, C Zhang Applied Optics 54 (4), 684-693, 2015 | 33 | 2015 |
Shiyuan Liu (刘世元)Huazhong University of Science and Technology在 hust.edu.cn 的电子邮件经过验证
