| Optical wafer defect inspection at the 10 nm technology node and beyond J Zhu, J Liu, T Xu, S Yuan, Z Zhang, H Jiang, H Gu, R Zhou, S Liu International Journal of Extreme Manufacturing 4 (3), 032001, 2022 | 54 | 2022 |
| Superhydrophilic Cu (OH) 2 nanowire-based QCM transducer with self-healing ability for humidity detection J Lin, N Gao, J Liu, Z Hu, H Fang, X Tan, H Li, H Jiang, H Liu, T Shi, ... Journal of Materials Chemistry A 7 (15), 9068-9077, 2019 | 45 | 2019 |
| Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications XG Chen, HG Gu, JM Liu, C Chen, SY Liu Science China Technological Sciences 65 (9), 2007-2030, 2022 | 24 | 2022 |
| Characterization of beam splitters in the calibration of a six-channel Stokes polarimeter S Zhang, H Gu, J Liu, H Jiang, X Chen, C Zhang, S Liu Journal of Optics 20 (12), 125606, 2018 | 15 | 2018 |
| Characterization of dielectric function for metallic thin films based on ellipsometric parameters and reflectivity J Liu, J Lin, H Jiang, H Gu, X Chen, C Zhang, G Liao, S Liu Physica Scripta 94 (8), 085802, 2019 | 11 | 2019 |
| Temperature and thickness dependent dielectric functions of MoTe2 thin films investigated by spectroscopic ellipsometry M Fang, H Gu, Z Guo, J Liu, L Huang, S Liu Applied Surface Science 605, 154813, 2022 | 10 | 2022 |
| Measurement configuration optimization for dynamic metrology using Stokes polarimetry J Liu, C Zhang, Z Zhong, H Gu, X Chen, H Jiang, S Liu Measurement Science and Technology 29 (5), 054010, 2018 | 10 | 2018 |
| Thickness dependent native oxidation kinetics observation and prediction for Cu films using spectroscopic ellipsometry J Liu, H Jiang, L Zhang, H Gu, X Chen, S Liu Applied Surface Science 518, 146236, 2020 | 9 | 2020 |
| Diffraction based single pulse measurement of air ionization dynamics induced by femtosecond laser L Zhang, J Liu, W Gong, H Jiang, S Liu Optics Express 29 (12), 18601-18610, 2021 | 7 | 2021 |
| 集成电路制造在线光学测量检测技术: 现状, 挑战与发展趋势 陈修国， 王才， 杨天娟， 刘佳敏， 罗成峰， 刘世元 Laser & Optoelectronics Progress 59 (9), 0922025, 2022 | 5 | 2022 |
| Layer-dependent photoexcited carrier dynamics of WS2 observed using single pulse pump probe method L Zhang, J Liu, H Jiang, H Gu, S Liu Chinese Optics Letters 20 (10), 100002, 2022 | 4 | 2022 |
| Femtosecond laser induced damaging inside fused silica detected by a single-pulse ultrafast measurement system L Zhang, J Liu, J Zhu, H Jiang, S Liu Optics Express 30 (15), 26111-26119, 2022 | 4 | 2022 |
| Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer J Liu, Z Jiang, S Zhang, T Huang, H Jiang, S Liu Thin Solid Films 766, 139656, 2023 | 3 | 2023 |
| Beam collapse and refractive index changes inside fused silica induced by loosely focused femtosecond laser L Zhang, J Liu, Z Zhong, H Jiang, H Gu, X Chen, S Liu Journal of Optics 23 (7), 075402, 2021 | 3 | 2021 |
| Annealing temperature dependence of optical and structural properties of Cu films J Liu, M Wang, H Jiang, J Lin, H Gu, X Chen, T Shi, S Liu Physical Review B 101 (1), 014107, 2020 | 3 | 2020 |
| Resolution-enhanced reflection ptychography with axial distance calibration C Chen, J Liu, J Zhu, H Gu, S Liu Optics and Lasers in Engineering 169, 107684, 2023 | 2 | 2023 |
| EUV mask model based on modified Born series P He, J Liu, H Gu, J Zhu, H Jiang, S Liu Optics Express 31 (17), 27797-27809, 2023 | 2 | 2023 |
| Concentric ring structure on the front surface of fused silica induced by a focused femtosecond pulse laser L Zhang, J Liu, H Jiang, S Liu Precision Engineering 74, 242-246, 2022 | 2 | 2022 |
| In-situ calibration of the objective lens of an angle-resolved scatterometer for nanostructure metrology J Zhang, J Liu, J Zhu, H Jiang, S Liu Applied Optics 62 (15), 3829-3838, 2023 | 1 | 2023 |
