Thermo-magnetic metal flexure actuators H Guckel, J Klein, T Christenson, K Skrobis, M Laudon, EG Lovell Technical Digest IEEE Solid-State Sensor and Actuator Workshop, 73-75, 1992 | 329 | 1992 |
Fabrication of micromechanical devices from polysilicon films with smooth surfaces H Guckel, JJ Sniegowski, TR Christenson, S Mohney, TF Kelly Sensors and Actuators 20 (1-2), 117-122, 1989 | 261 | 1989 |
The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers H Guckel, JJ Sniegowski, TR Christenson, F Raissi Sensors and Actuators A: Physical 21 (1-3), 346-351, 1990 | 208 | 1990 |
Formation of microstructures using a preformed photoresist sheet H Guckel, TR Christenson, K Skrobis US Patent 5,378,583, 1995 | 194 | 1995 |
A first functional current excited planar rotational magnetic micromotor H Guckel, TR Christenson, KJ Skrobis, TS Jung, J Klein, KV Hartojo, ... [1993] Proceedings IEEE Micro Electro Mechanical Systems, 7-11, 1993 | 158 | 1993 |
Fabrication of assembled micromechanical components via deep X-ray lithography K Guckel, KJ Skrobis, TR Christenson, J Klein, S Han, B Choi, EG Lovell [1991] Proceedings. IEEE Micro Electro Mechanical Systems, 74-79, 1991 | 148 | 1991 |
Deep X-ray and UV lithographies for micromechanics H Guckel, TR Christenson, KJ Skrobis, DD Denton, B Choi, EG Lovell, ... IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, 118-122, 1990 | 144* | 1990 |
Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures TE Buchheit, JR Michael, TR Christenson, DA LaVan, SD Leith Metallurgical and Materials Transactions A 33, 539-554, 2002 | 143 | 2002 |
Method of manufacturing micromechanical devices H Guckel, TR Christenson, KJ Skrobis US Patent 5,206,983, 1993 | 132 | 1993 |
Fabrication and testing of the planar magnetic micromotor H Guckel, KJ Skrobis, TR Christenson, J Klein, S Han, B Choi, EG Lovell, ... Journal of Micromechanics and Microengineering 1 (3), 135, 1991 | 131 | 1991 |
Formation of microstructures using a preformed photoresist sheet H Guckel, TR Christenson, K Skrobis US Patent 5,576,147, 1996 | 95 | 1996 |
EBSD studies on wear-induced subsurface regions in LIGA nickel SV Prasad, JR Michael, TR Christenson Scripta Materialia 48 (3), 255-260, 2003 | 92 | 2003 |
Apparatus and method for fabricating a microbattery RJ Shul, SH Kravitz, TR Christenson, TE Zipperian, D Ingersoll US Patent 6,432,577, 2002 | 79 | 2002 |
Method of producing micromachined differential pressure transducers H Guckel, TR Christenson US Patent 5,189,777, 1993 | 71 | 1993 |
Micromechanics via x‐ray assisted processing H Guckel, KJ Skrobis, J Klein, TR Christenson Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 12 (4 …, 1994 | 63 | 1994 |
Performance characteristics of second generation polysilicon resonating beam force transducers JJ Sniegowski, H Guckel, TR Christenson IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, 9-12, 1990 | 61 | 1990 |
Mechanical and metallographic characterization of LIGA fabricated nickel and 80% Ni-20% Fe permalloy TR Christenson, TE Buchheit, DT Schmale, RJ Bourcier MRS Online Proceedings Library (OPL) 518, 185, 1998 | 60 | 1998 |
Metal micromechanisms via deep X-ray lithography, electroplating and assembly H Guckel, T Christenson, K Skrobis Journal of Micromechanics and Microengineering 2 (4), 225, 1992 | 59 | 1992 |
Liquid-lens variable-control optics in array microscope TR Christenson, MR Descour, C Liang, AG Olszak US Patent 7,755,841, 2010 | 58 | 2010 |
Formation of microstructures using a preformed photoresist sheet H Guckel, TR Christenson, K Skrobis US Patent 5,496,668, 1996 | 57 | 1996 |