Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films M Akiyama, K Umeda, A Honda, T Nagase Applied Physics Letters 102 (2), 2013 | 189 | 2013 |
Piezoelectric resonator including an acoustic reflector portion K Umeda US Patent 7,868,519, 2011 | 152 | 2011 |
Piezoelectric properties of ScAlN thin films for piezo-MEMS devices K Umeda, H Kawai, A Honda, M Akiyama, T Kato, T Fukura 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 106 | 2013 |
The tribological characteristics of diamond-like carbon films at elevated temperatures H Liu, A Tanaka, K Umeda Thin Solid Films 346 (1-2), 162-168, 1999 | 79 | 1999 |
Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb M Uehara, H Shigemoto, Y Fujio, T Nagase, Y Aida, K Umeda, M Akiyama Applied Physics Letters 111 (11), 2017 | 66 | 2017 |
Piezoelectric thin-film resonator and method for producing piezoelectric thin film K Umeda, T Miyake US Patent 9,246,079, 2016 | 60 | 2016 |
Local structures and electrical properties of organic molecular films investigated by non-contact atomic force microscopy H Yamada, T Fukuma, K Umeda, K Kobayashi, K Matsushige Applied surface science 188 (3-4), 391-398, 2002 | 53 | 2002 |
Piezoelectric thin-film resonator K Umeda, H Kawamura US Patent 7,535,154, 2009 | 45 | 2009 |
Duplexer K Umeda, K Uesaka, T Miyake US Patent 9,231,557, 2016 | 43 | 2016 |
Modification of a commercial atomic force microscopy for low-noise, high-resolution frequency-modulation imaging in liquid environment S Rode, R Stark, J Lübbe, L Tröger, J Schütte, K Umeda, K Kobayashi, ... Review of Scientific Instruments 82 (7), 2011 | 42 | 2011 |
Piezoelectric thin-film filter K Umeda US Patent 8,610,516, 2013 | 33 | 2013 |
Piezoelectric resonator and piezoelectric filter K Umeda, T Miyake US Patent 7,649,304, 2010 | 33 | 2010 |
Increase in the piezoelectric response of scandium-doped gallium nitride thin films sputtered using a metal interlayer for piezo MEMS M Uehara, T Mizuno, Y Aida, H Yamada, K Umeda, M Akiyama Applied Physics Letters 114 (1), 2019 | 29 | 2019 |
Characteristics of an AlN-based bulk acoustic wave resonator in the super high frequency range K Umeda, H Kawamura, M Takeuchi, Y Yoshino Vacuum 83 (3), 672-674, 2008 | 27 | 2008 |
Surface acoustic wave device K Umeda, R Nakagawa, A Tanaka US Patent 9,948,274, 2018 | 26 | 2018 |
Piezoelectric thin-film resonator and process for producing same K Umeda, O Nakagawara US Patent 7,276,836, 2007 | 26 | 2007 |
Piezoelectric Resonator and Piezoelectric Filter Device K Umeda US Patent App. 12/683,092, 2010 | 24 | 2010 |
Experimental study on energy dissipation induced by displacement current in non-contact aomic force microscopy imaging of molecular thin films T Fukuma, K Umeda, K Kobayashi, H Yamada, K Matsushige Japanese journal of applied physics 41 (7S), 4903, 2002 | 24 | 2002 |
Vibration device and manufacturing method of the same H Yamada, K Umeda, T Kishi, T Nishimura US Patent 10,291,202, 2019 | 21 | 2019 |
Surface potential measurement of oligothiophene ultrathin films by Kelvin probe force microscopy KUK Umeda, KKK Kobayashi, KIK Ishida, SHS Hotta, HYH Yamada, ... Japanese Journal of Applied Physics 40 (6S), 4381, 2001 | 21 | 2001 |