High-performance FBAR humidity sensor based on the PI film as the multifunctional layer J Liu, Z Zhao, Z Fang, Z Liu, Y Zhu, L Du Sensors and Actuators B: Chemical 308, 127694, 2020 | 44 | 2020 |
Silicon-on-nothing ScAlN pMUTs DSW Choong, DSH Chen, DJ Goh, J Liu, S Ghosh, Y Koh, J Sharma, ... 2021 IEEE International Ultrasonics Symposium (IUS), 1-4, 2021 | 20 | 2021 |
Sputtered PZT pmut with bias-tunable electromechanical coupling coefficient for air-coupled ranging applications J Liu, DSW Choong, DJ Goh, S Merugu, QX Zhang, P Chang, A Leotti, ... 2022 IEEE International Ultrasonics Symposium (IUS), 1-4, 2022 | 12 | 2022 |
A chip-level oven-controlled system used to improve accuracy of silicon piezoresistive pressure sensor Z Liu, L Du, Z Zhao, J Liu, P Wu, Z Fang Measurement 143, 1-10, 2019 | 10 | 2019 |
High-precision humidity sensor response time measurement based on the switchable chamber with the hydrophobic interface J Liu, Z Zhao, J Jin, Z Fang, L Du IEEE Sensors Journal 20 (10), 5566-5574, 2020 | 7 | 2020 |
Polyimide-based high-performance film bulk acoustic resonator humidity sensor and its application in real-time human respiration monitoring Y Zhu, P Xia, J Liu, Z Fang, L Du, Z Zhao Micromachines 13 (5), 758, 2022 | 5 | 2022 |
Reducing the effect of parasitic capacitance on the micro-capacitive humidity sensor J Liu, L Du, Y Pan, Y Zhu, Z Fang 2019 IEEE 14th International Conference on Nano/Micro Engineered and …, 2019 | 5 | 2019 |
Correlation of Wafer-scale Film Stress Effects on ScAlN pMUT Parameters DSW Choong, DJ Goh, J Liu, S Merugu, QX Zhang, HK Lee, P Chang, ... 2022 IEEE International Ultrasonics Symposium (IUS), 1-4, 2022 | 4 | 2022 |
Analyzing the effect of the Front-end circuit for the FBAR sensor J Liu, Z Zhao, M Zhang, J Jin, Y Zhu, Z Fang, T Gao, L Du Measurement 151, 107237, 2020 | 4 | 2020 |
DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters DSW Cheong, DJ Goh, J Liu, M Sarafianou, S Merugu, QX Zhang, ... 2023 IEEE SENSORS, 1-4, 2023 | 3 | 2023 |
In-Air Long-Range Environmental Temperature Sensing with A Single Scandium-Doped Aluminum Nitride pMUT Array M Sarafianou, DSH Chen, DSW Choong, DJ Goh, J Liu, S Merugu, ... 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | 3 | 2023 |
PI-Based Dual-Mode FBAR Humidity Sensor Toward Ultra-High Sensitivity and Self-Temperature-Compensation Capability Y Zhu, P Xia, J Liu, L Du, Z Fang, Z Zhao IEEE Sensors Journal 21 (23), 26574-26585, 2021 | 3 | 2021 |
Towards unparallelled CMOS-compatible air-coupled pMUT performance with 30% Sc-doped AlN through an analysis of residual stress effects J Liu, GD Jian, DSH Chen, DCS Wai, T Shyam, PC Ramegowda, ... 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium …, 2024 | 2 | 2024 |
Residual stress analysis in ScAlN micro-diaphragm for high sensitivity and wide range pressure sensing J Liu, DSH Chen, GD Jian, DCS Wai, M Srinivas, L Huamao, ZQ Xin, ... 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium …, 2024 | 2 | 2024 |
A Feasibility Study on Underwater 2D Localization Using PZT pMUTs M Sarafianou, DSH Chen, DSW Choong, DJ Goh, J Liu, JEY Lee, ... 2023 IEEE International Ultrasonics Symposium (IUS), 1-4, 2023 | 2 | 2023 |
Hybrid AIR-Coupled Rangefinder with Sputtered PVD PZT and SC0.2AL0.8N PMUTs for Pulse-Echo Applications DSW Choong, DSH Chen, M Sarafianou, DJ Goh, J Liu, S Ghosh, ... 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium …, 2024 | 1 | 2024 |
DC-Bias Effects on Sputtered PZT pMUTs with High Transmit and Receive Sensitivities in Immersion for Imaging applications M Sarafianou, DSW Choong, DJ Goh, J Liu, S Merugu, QX Zhang, ... 2023 IEEE International Ultrasonics Symposium (IUS), 1-4, 2023 | 1 | 2023 |
Improvement of the microcapacitive humidity sensor by the package optimisation J Liu, L Du, J Jin, Z Fang, Z Zhao Micro & Nano Letters 15 (3), 145-148, 2020 | 1 | 2020 |
Optimization of the drive circuit for the sensitivity-enhanced film bulk acoustic resonator L Du, J Liu, Y Zhu, Z Zhao, Z Fang 2019 IEEE 14th International Conference on Nano/Micro Engineered and …, 2019 | 1 | 2019 |
Compensation of Thermal Effects in PZT and Sc0.2Al0.8N PMUTs Through DC Bias Tuning DJ Goh, J Liu, DSW Choong, S Ghosh, DSH Chen, R Shankar, CL Prelini, ... 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium …, 2024 | | 2024 |