A large range compliant XY nano-manipulator with active parasitic rotation rejection Y Liu, Z Zhang Precision Engineering 72, 640-652, 2021 | 23 | 2021 |
A large range compliant nano-manipulator supporting electron beam lithography Y Liu, Z Zhang Journal of mechanical design 144 (4), 043303, 2022 | 16 | 2022 |
A constraint-flow based method of synthesizing XYθ compliant parallel mechanisms with decoupled motion and actuation characteristics H Li, Y Liu, Z Wang, C Leng, Z Zhang, G Hao Mechanism and Machine Theory 178, 105085, 2022 | 11 | 2022 |
Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning Y Liu, X Li, B Pei, L Ge, Z Xiong, Z Zhang Microsystems & Nanoengineering 9 (1), 128, 2023 | 1 | 2023 |
Ultra‐Large Scale Stitchless AFM: Advancing Nanoscale Characterization and Manipulation with Zero Stitching Error and High Throughput Y Liu, X Li, Y Zhang, L Ge, Y Guan, Z Zhang Small 20 (1), 2303838, 2024 | | 2024 |
Ultralarge-Area Stitchless Scanning Probe Lithography and In Situ Characterization System Using a Compliant Nanomanipulator Y Liu, X Li, L Ge, Z Zhang IEEE/ASME Transactions on Mechatronics, 2023 | | 2023 |
Design and Tracking Control of a Large-Range Reluctance-Actuated Compliant Nano-Manipulator X Li, Y Liu, Z Zhang International Design Engineering Technical Conferences and Computers and …, 2023 | | 2023 |
Towards smart scanning probe lithography: A framework accelerating nano-fabrication process with in-situ characterization via machine learning Z Zhang, Y Liu, X Li, B Pei, L Ge, Z Xiong | | 2023 |
A Compliant Nano-manipulator-based Scanning Probe Lithography System Y Liu, Z Zhang 2022 IEEE International Conference on Manipulation, Manufacturing and …, 2022 | | 2022 |