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Yijie Liu
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A large range compliant XY nano-manipulator with active parasitic rotation rejection
Y Liu, Z Zhang
Precision Engineering 72, 640-652, 2021
232021
A large range compliant nano-manipulator supporting electron beam lithography
Y Liu, Z Zhang
Journal of mechanical design 144 (4), 043303, 2022
162022
A constraint-flow based method of synthesizing XYθ compliant parallel mechanisms with decoupled motion and actuation characteristics
H Li, Y Liu, Z Wang, C Leng, Z Zhang, G Hao
Mechanism and Machine Theory 178, 105085, 2022
112022
Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning
Y Liu, X Li, B Pei, L Ge, Z Xiong, Z Zhang
Microsystems & Nanoengineering 9 (1), 128, 2023
12023
Ultra‐Large Scale Stitchless AFM: Advancing Nanoscale Characterization and Manipulation with Zero Stitching Error and High Throughput
Y Liu, X Li, Y Zhang, L Ge, Y Guan, Z Zhang
Small 20 (1), 2303838, 2024
2024
Ultralarge-Area Stitchless Scanning Probe Lithography and In Situ Characterization System Using a Compliant Nanomanipulator
Y Liu, X Li, L Ge, Z Zhang
IEEE/ASME Transactions on Mechatronics, 2023
2023
Design and Tracking Control of a Large-Range Reluctance-Actuated Compliant Nano-Manipulator
X Li, Y Liu, Z Zhang
International Design Engineering Technical Conferences and Computers and …, 2023
2023
Towards smart scanning probe lithography: A framework accelerating nano-fabrication process with in-situ characterization via machine learning
Z Zhang, Y Liu, X Li, B Pei, L Ge, Z Xiong
2023
A Compliant Nano-manipulator-based Scanning Probe Lithography System
Y Liu, Z Zhang
2022 IEEE International Conference on Manipulation, Manufacturing and …, 2022
2022
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