Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators N Kurz, A Ding, DF Urban, Y Lu, L Kirste, NM Feil, A Žukauskaitė, ... Journal of Applied Physics 126 (7), 2019 | 91 | 2019 |
Wurtzite ScAlN, InAlN, and GaAlN crystals, a comparison of structural, elastic, dielectric, and piezoelectric properties O Ambacher, B Christian, N Feil, DF Urban, C Elsässer, M Prescher, ... Journal of Applied Physics 130 (4), 2021 | 81 | 2021 |
Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0. 77Sc0. 23N 112¯ thin films A Ding, L Kirste, Y Lu, R Driad, N Kurz, V Lebedev, T Christoph, NM Feil, ... Applied Physics Letters 116 (10), 2020 | 46 | 2020 |
Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures NM Feil, E Mayer, A Nair, B Christian, A Ding, C Sun, S Mihalic, M Kessel, ... Journal of Applied Physics 130 (16), 164501, 2021 | 11 | 2021 |
Finite element analysis of SAW propagation characteristics in c-plane (0001) and a-plane (11-20) ALScN thin films NM Feil, N Kurz, DF Urban, A Altayara, B Christian, A Ding, A Žukauskaitė, ... 2019 IEEE International Ultrasonics Symposium (IUS), 2588-2591, 2019 | 11 | 2019 |
Non-Polar a-plane AlScN() Thin Film Based SAW Resonators with Significantly Improved Electromechanical Coupling A Ding, R Driad, Y Lu, NM Feil, L Kirste, T Christoph, O Ambacher, ... 2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020 | 7 | 2020 |
Growth Optimization of Nonpolar Al0.7Sc0.3N()/Al2O3() Thin Films Using Reactive Magnetron Sputter Epitaxy A Nair, M Kessel, L Kirste, NM Feil, M Prescher, A Žukauskaitė physica status solidi (a) 219 (24), 2200380, 2022 | 5 | 2022 |
Rayleigh waves in nonpolar Al0. 7Sc0. 3N (112¯ 0) films with enhanced electromechanical coupling and quality factor NM Feil, A Nair, V Pashchenko, L Kirste, O Ambacher Applied Physics Letters 121 (19), 2022 | 4 | 2022 |
Influence of alloying and structural transition on the directional elastic and isotropic thermodynamic properties of wurtzite and layered hexagonal ScxAl1− xN crystals O Ambacher, S Mihalic, E Wade, M Yassine, A Yassine, N Feil, ... Journal of Applied Physics 132 (17), 2022 | 4 | 2022 |
Novel method for extracting material constants of epitaxial wurtzite AlScN films on sapphire using higher order surface acoustic wave modes NM Feil, E Mayer, B Christian, A Ding, A Žukauskaitė, O Ambacher 2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020 | 4 | 2020 |
Determining elastic constants of AlScN films on silicon substrates by laser ultrasonics O Rogall, NM Feil, A Ding, E Mayer, PD Pupyrev, AM Lomonosov, ... 2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020 | 2 | 2020 |
In-plane ferroelectric switching of non-polar wurtzite AlScN films using SAW resonators M Yassine, N Feil, A Nair, A Graff, R Driad, F Benkhelifa, E Wade, ... Elsevier, 2023 | | 2023 |
Chapter Four-In-plane ferroelectric switching of non-polar wurtzite AlScN films using SAW resonators M Yassine, N Feil, A Nair, A Greiff, R Driad, E Wade, F Benkhelifa, ... | | 2023 |
Growth Optimization of Nonpolar Al0.7Sc0.3N(112¯0)/Al2O3(11¯02) Thin Films Using Reactive Magnetron Sputter Epitaxy. A Nair, M Kessel, L Kirste, NM Feil, M Prescher, A Žukauskaitė Physica Status Solidi. A: Applications & Materials Science 219 (24), 2022 | | 2022 |
SAW-Bauelement und Verfahren zu dessen Betrieb und Verwendung A Ding, NM Feil | | 2022 |
Aluminium-Scandium-Nitrid für breitbandige Oberflächenwellenfilter N Feil | | 2022 |
Aluminium-Scandium-Nitrid für breitbandige Oberflächenwellenfilter NM Feil Dissertation, Universität Freiburg, 2022 | | 2022 |