High performance and highly uniform gate-all-around silicon nanowire MOSFETs with wire size dependent scaling S Bangsaruntip, GM Cohen, A Majumdar, Y Zhang, SU Engelmann, ... 2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009 | 606 | 2009 |
Gate-all-around silicon nanowire 25-stage CMOS ring oscillators with diameter down to 3 nm S Bangsaruntip, A Majumdar, GM Cohen, SU Engelmann, Y Zhang, ... 2010 symposium on VLSI technology, 21-22, 2010 | 305 | 2010 |
Electrical integrity of state-of-the-art 0.13/spl mu/m SOI CMOS devices and circuits transferred for three-dimensional (3D) integrated circuit (IC) fabrication KW Guarini, AW Topol, M Ieong, R Yu, L Shi, MR Newport, DJ Frank, ... Digest. International Electron Devices Meeting,, 943-945, 2002 | 206 | 2002 |
Nanowire field-effect transistors S Bangsaruntip, GM Cohen, KL Saenger US Patent 7,795,677, 2010 | 190 | 2010 |
Universality of short-channel effects in undoped-body silicon nanowire MOSFETs S Bangsaruntip, GM Cohen, A Majumdar, JW Sleight IEEE Electron Device Letters 31 (9), 903-905, 2010 | 188 | 2010 |
Strained-channel Fin field effect transistor (FET) with a uniform channel thickness and separate gates GM Cohen US Patent 7,355,253, 2008 | 173 | 2008 |
Method of forming vertical FET with nanowire channels and a silicided bottom contact GM Cohen, PM Solomon US Patent 7,446,025, 2008 | 143 | 2008 |
Vertical FET with nanowire channels and a silicided bottom contact GM Cohen, PM Solomon US Patent 7,230,286, 2007 | 126 | 2007 |
Process for forming a surrounding gate for a nanowire using a sacrificial patternable dielectric S Bangsaruntip, G Cohen, MA Guillorn US Patent 9,029,834, 2015 | 124 | 2015 |
Strained-channel Fin field effect transistor (FET) with a uniform channel thickness and separate gates GM Cohen US Patent 7,384,830, 2008 | 119 | 2008 |
Density scaling with gate-all-around silicon nanowire MOSFETs for the 10 nm node and beyond S Bangsaruntip, K Balakrishnan, SL Cheng, J Chang, M Brink, I Lauer, ... 2013 IEEE international electron devices meeting, 20.2. 1-20.2. 4, 2013 | 118 | 2013 |
Maskless process for suspending and thinning nanowires S Bangsaruntip, G Cohen, JW Sleight US Patent 7,884,004, 2011 | 115 | 2011 |
Mixed orientation and mixed material semiconductor-on-insulator wafer GM Cohen, A Reznicek, KL Saenger, M Yang US Patent 7,125,785, 2006 | 115 | 2006 |
Two gates are better than one [double-gate MOSFET process] PM Solomon, KW Guarini, Y Zhang, K Chan, EC Jones, GM Cohen, ... IEEE circuits and devices magazine 19 (1), 48-62, 2003 | 113 | 2003 |
Self-aligned double-gate MOSFET by selective epitaxy and silicon wafer bonding techniques KK Chan, GM Cohen, Y Taur, HSP Wong US Patent 6,365,465, 2002 | 104 | 2002 |
Triple-self-aligned, planar double-gate MOSFETs: devices and circuits KW Guarini, PM Solomon, Y Zhang, KK Chan, EC Jones, GM Cohen, ... International Electron Devices Meeting. Technical Digest (Cat. No. 01CH37224 …, 2001 | 104 | 2001 |
Self-aligned silicide (salicide) process for low resistivity contacts to thin film silicon-on-insulator and bulk mosfets and for shallow junctions C Cabral, K Chan, G Cohen, C Lavoie, R Roy, P Solomon US Patent App. 10/989,639, 2006 | 100 | 2006 |
Semiconductor-on-insulator lateral pin photodetector with a reflecting mirror and backside contact and method for forming the same GM Cohen, K Rim, DL Rogers, JD Schaub, M Yang US Patent 6,667,528, 2003 | 99 | 2003 |
Enabling technologies for wafer-level bonding of 3D MEMS and integrated circuit structures AW Topol, BK Furman, KW Guarini, L Shi, GM Cohen, GF Walker 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE …, 2004 | 96 | 2004 |
Nanowire metal-oxide-semiconductor field effect transistor with doped epitaxial contacts for source and drain GM Cohen, MJ Rooks, JO Chu, SE Laux, PM Solomon, JA Ott, RJ Miller, ... Applied Physics Letters 90 (23), 2007 | 86 | 2007 |