| Giant magnetoelectric coefficients in (Fe90Co10) 78Si12B10-AlN thin film composites H Greve, E Woltermann, HJ Quenzer, B Wagner, E Quandt Applied Physics Letters 96 (18), 2010 | 287 | 2010 |
| Microvalve T Lisec, HJ Quenzer, B Wagner US Patent 5,681,024, 1997 | 181 | 1997 |
| High-Q MEMS resonators for laser beam scanning displays U Hofmann, J Janes, HJ Quenzer Micromachines 3 (2), 509-528, 2012 | 160 | 2012 |
| Bistable microvalve with pneumatically coupled membranes B Wagner, HJ Quenzer, S Hoerschelmann, T Lisec, M Juerss Proceedings of Ninth International Workshop on Micro Electromechanical …, 1996 | 148 | 1996 |
| Bistable microactuator with coupled membranes HJ Quenzer, B Wagner US Patent 6,168,395, 2001 | 122 | 2001 |
| Microfabrication of complex surface topographies using grey-tone lithography B Wagner, HJ Quenzer, W Henke, W Hoppe, W Pilz Sensors and Actuators A: Physical 46 (1-3), 89-94, 1995 | 107 | 1995 |
| Micro-optic fabrication using one-level gray-tone lithography K Reimer, HJ Quenzer, M Jürss, B Wagner Miniaturized Systems with Micro-Optics and Micromechanics II 3008, 279-288, 1997 | 88 | 1997 |
| A novel micromachining technology for structuring borosilicate glass substrates P Merz, HJ Quenzer, H Bernt, B Wanger, M Zoberbier TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 87 | 2003 |
| Ultraviolet depth lithography and galvanoforming for micromachining B Löchel, A Maciossek, HJ Quenzer, B Wagner Journal of the Electrochemical Society 143 (1), 237, 1996 | 74 | 1996 |
| Thermally driven microvalve with buckling behaviour for pneumatic applications T Lisec, S Hoerschelmann, HJ Quenzer, B Wagner, W Benecke Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro …, 1994 | 74 | 1994 |
| Low-temperature silicon wafer bonding HJ Quenzer, W Benecke Sensors and Actuators A: Physical 32 (1-3), 340-344, 1992 | 70 | 1992 |
| Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning U Hofmann, M Aikio, J Janes, F Senger, V Stenchly, J Hagge, HJ Quenzer, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 13 (1), 011103-011103, 2014 | 66 | 2014 |
| Galvanoplating and sacrificial layers for surface micromachining A Maciossek, B Lo, HJ Quenzer, B Wagner, S Schulze, J Noetzel Microelectronic Engineering 27 (1-4), 503-508, 1995 | 65 | 1995 |
| Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces W Henke, W Hoppe, HJ Quenzer, P Staudt-Fischbach, B Wagner Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro …, 1994 | 62 | 1994 |
| Microsensor for measuring the position of liquids in capillaries T Lisec, B Wagner, HJ Quenzer US Patent 6,748,804, 2004 | 61 | 2004 |
| Galvanoplated 3D structures for micro systems B Löchel, A Maciossek, M König, HJ Quenzer, HL Huber Microelectronic engineering 23 (1-4), 455-459, 1994 | 57 | 1994 |
| Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays U Hofmann, M Oldsen, HJ Quenzer, J Janes, M Heller, M Weiss, G Fakas, ... Moems And Miniaturized Systems VII 6887, 60-74, 2008 | 55 | 2008 |
| Direct substrate bonding HJ Quenzer, W Benecke US Patent 5,407,856, 1995 | 53 | 1995 |
| Sputtered thin film piezoelectric aluminum nitride as a functional MEMS material S Marauska, V Hrkac, T Dankwort, R Jahns, HJ Quenzer, R Knöchel, ... Microsystem technologies 18, 787-795, 2012 | 48 | 2012 |
| Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR F Schwarz, F Senger, J Albers, P Malaurie, C Janicke, L Pohl, F Heinrich, ... MOEMS and Miniaturized Systems XIX 11293, 46-62, 2020 | 42 | 2020 |
