| Platinum Nanoparticle Loading of Boron Nitride Aerogel and Its Use as a Novel Material for Low‐Power Catalytic Gas Sensing A Harley‐Trochimczyk, T Pham, J Chang, E Chen, MA Worsley, A Zettl, ... Advanced Functional Materials 26 (3), 433-439, 2016 | 99 | 2016 |
| Directional etch of magnetic and noble metals. II. Organic chemical vapor etch JKC Chen, ND Altieri, T Kim, E Chen, T Lill, M Shen, JP Chang Journal of Vacuum Science & Technology A 35 (5), 2017 | 67 | 2017 |
| Ion beam assisted organic chemical vapor etch of magnetic thin films JKC Chen, T Kim, ND Altieri, E Chen, JP Chang Journal of Vacuum Science & Technology A 35 (3), 2017 | 32 | 2017 |
| Review on recent progress in patterning phase change materials M Shen, T Lill, N Altieri, J Hoang, S Chiou, J Sims, A McKerrow, ... Journal of Vacuum Science & Technology A 38 (6), 2020 | 17 | 2020 |
| Patterning nickel for extreme ultraviolet lithography mask application I. Atomic layer etch processing X Sang, E Chen, JP Chang Journal of Vacuum Science & Technology A 38 (4), 2020 | 17 | 2020 |
| Effects of plasma etching on GeSbTe compositional control EL Chen University of California, Los Angeles, 2020 | 4 | 2020 |
| Selective deposition and co-deposition processes for ferromagnetic thin films JOI Aniruddha, E Chen, Y Dordi US Patent 9,476,124, 2016 | 1 | 2016 |
| Patterning nickel for extreme ultraviolet lithography mask application I. Atomic layer etch processing (vol 38, 042603, 2020) X Sang, E Chen, JP Chang JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 39 (1), 2021 | | 2021 |
| Errata:‘‘Patterning nickel for extreme ultraviolet lithography mask application I. Atomic layer etch processing’’[J. Vac. Sci. Technol. A 38, 042603 (2020)] X Sang, E Chen, JP Chang Journal of Vacuum Science & Technology A 39 (1), 2021 | | 2021 |
| Electroless Deposition of Ferromagnetic CoxFe1-x alloys Using Metal Ion Reducing Agent A Joi, E Chen, Y Dordi Electrochemical Society Meeting Abstracts 228, 826-826, 2015 | | 2015 |
