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Jonathan Hanson Ma
Jonathan Hanson Ma
Applied Materials
在 berkeley.edu 的电子邮件经过验证
标题
引用次数
引用次数
年份
Shapes and vorticities of superfluid helium nanodroplets
LF Gomez, KR Ferguson, JP Cryan, C Bacellar, RMP Tanyag, C Jones, ...
science 345 (6199), 906-909, 2014
2762014
Mechanistic Advantages of Organotin Molecular EUV Photoresists
JH Ma, C Needham, H Wang, A Neureuther, D Prendergast, P Naulleau
ACS applied materials & interfaces 14 (4), 5514-5524, 2022
222022
Additive Lithography–Organic Monolayer Patterning Coupled with an Area-Selective Deposition
R Wojtecki, J Ma, I Cordova, N Arellano, K Lionti, T Magbitang, ...
ACS applied materials & interfaces 13 (7), 9081-9090, 2021
202021
Experimental characterization of model resist materials
O Kostko, TR McAfee, J Ma, JM Blackwell, P Naulleau
International Conference on Extreme Ultraviolet Lithography 2021 11854, 24-34, 2021
132021
Crystalline symmetry-protected non-trivial topology in prototype compound BaAl4
K Wang, R Mori, Z Wang, L Wang, JHS Ma, DW Latzke, DE Graf, ...
npj Quantum Materials 6 (1), 28, 2021
132021
Interplay of superconductivity and bosonic coupling in the peak-dip-hump structure of
TL Miller, W Zhang, J Ma, H Eisaki, JE Moore, A Lanzara
Physical Review B 97 (13), 134517, 2018
132018
Determination of effective attenuation length of slow electrons in polymer films
JH Ma, P Naulleau, M Ahmed, O Kostko
Journal of Applied Physics 127 (24), 245301, 2020
122020
Excitation selectivity in model tin-oxo resist: a computational chemistry perspective
JH Ma, H Wang, D Prendergast, A Neureuther, P Naulleau
Extreme Ultraviolet (EUV) Lithography XI 11323, 349-355, 2020
102020
Investigating EUV radiochemistry with condensed phase photoemission
J Ma, AR Neureuther, PP Naulleau
Extreme Ultraviolet (EUV) Lithography X 10957, 392-400, 2019
82019
Sizes of pure and doped helium droplets from single shot x-ray imaging
RMP Tanyag, C Bacellar, W Pang, C Bernando, LF Gomez, CF Jones, ...
The Journal of chemical physics 156 (4), 041102, 2022
62022
Investigating extreme ultraviolet radiation chemistry with first-principles quantum chemistry calculations
JH Ma, H Wang, D Prendergast, A Neureuther, P Naulleau
Journal of Micro/Nanolithography, MEMS, and MOEMS 19 (3), 034601-034601, 2020
62020
Investigating EUV radiation chemistry with first principle quantum chemistry calculations
JH Ma, H Wang, D Prendergast, A Neureuther, P Naulleau
International Conference on Extreme Ultraviolet Lithography 2019 11147, 103-113, 2019
62019
Chemical and structural characterization of EUV photoresists as a function of depth by standing-wave x-ray photoelectron spectroscopy
G Conti, HP Martins, IA Cordova, J Ma, RJ Wojtecki, P Naulleau, ...
Journal of Micro/Nanopatterning, Materials, and Metrology 20 (3), 034603-034603, 2021
32021
Spatial nematic fluctuation in revealed by spatially and angle-resolved photoemission spectroscopy
J Ma, M Yi, G Affeldt, I Hayes, C Jozwiak, A Bostwick, E Rotenberg, ...
Physical Review B 101 (9), 094515, 2020
32020
Engineering resist-substrate interface: a quantum chemistry study of self-assembled monolayers
JH Ma, IA Cordova, R Wojtecki, A Neureuther, PP Naulleau
Extreme Ultraviolet Lithography 2020 11517, 115170H, 2020
22020
Experimental characterization of model extreme ultraviolet resist materials
O Kostko, TR McAfee, J Ma, JM Blackwell, P Naulleau
Journal of Micro/Nanopatterning, Materials, and Metrology 23 (1), 014602-014602, 2024
12024
Characterization of secondary electron blur via determination of electron attenuation length
O Kostko, T McAfee, J Ma, P Naulleau
Extreme Ultraviolet (EUV) Lithography XII 11609, 116091V, 2021
12021
Sub-nm depth characterization of EUV nanoscale photoresist films by standing-wave photoemission spectroscopy
G Conti, HPP Martins, IA Cordova, J Ma, RJ Wojtecki, P Naulleau, ...
Extreme Ultraviolet Lithography 2020 11517, 29-35, 2020
12020
Elucidating the radiation chemistry of prototypical tin-oxo resist with first-principles computations
JH Ma, PP Naulleau, D Prendergast, A Neureuther
Extreme Ultraviolet (EUV) Lithography XII 11609, 116091B, 2021
2021
Understanding secondary electron driven EUV chemistry (Conference Presentation)
JH Ma, P Naulleau, A Neureuther
Extreme Ultraviolet (EUV) Lithography XI 11323, 113231F, 2020
2020
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