Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers Y Kusano, Q Wang, GL Luo, Y Lu, RQ Rudy, RG Polcawich, DA Horsley journal of microelectromechanical systems 27 (2), 296-304, 2018 | 63 | 2018 |
Airborne piezoelectric micromachined ultrasonic transducers for long-range detection GL Luo, Y Kusano, DA Horsley journal of microelectromechanical systems 30 (1), 81-89, 2020 | 57 | 2020 |
High-SPL air-coupled piezoelectric micromachined ultrasonic transducers based on 36% ScAlN thin-film Y Kusano, I Ishii, T Kamiya, A Teshigahara, GL Luo, DA Horsley IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66 …, 2019 | 50 | 2019 |
36% scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers Y Kusano, GL Luo, D Horsley, I Taru Ishii, A Teshigahara 2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018 | 26 | 2018 |
High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates GL Luo, S Fung, Q Wang, Y Kusano, J Lasiter, D Kidwell, DA Horsley 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 21 | 2017 |
High-pressure output 40 kHz air-coupled piezoelectric micromachined ultrasonic transducers GL Luo, Y Kusano, MN Roberto, DA Horsley 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019 | 19 | 2019 |
Immersion PMUTs fabricated with a low thermal-budget surface micromachining process GL Luo, Y Kusano, D Horsley 2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018 | 15 | 2018 |
Piezoelectric Micromachined Ultrasonic Transducers with Corrugated Diaphragms Using Surface Micromachining GL Luo, DA Horsley 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 14 | 2019 |
Increased Output-Pressure PMUTs with a Sloped Profile Fabricated via Surface Micromachining GL Luo, Q Wang, Y Kusano, D Horsley 2018 IEEE International Frequency Control Symposium (IFCS), 1-4, 2018 | 13 | 2018 |
Low thermal budget surface micromachining process for piezoelectric micromachined ultrasonic transducer arrays with in-situ vacuum sealed cavities Q Wang, G Luo, Y Kusano, DA Horsley Proceedings of the Hilton Head Workshop, 2018 | 12 | 2018 |
Improving pmut transmit performance via sub-micron thickness scaling X Jiang, GL Luo, Q Wang, DA Horsley 2018 IEEE International Ultrasonics Symposium (IUS), 1-9, 2018 | 9 | 2018 |
CMOS-MEMS Fabry-Perot optical interference device with tunable resonant cavity GL Luo, CC Lee, CL Cheng, MH Tsai, W Fang 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 6 | 2013 |
IEEE International Ultrasonics Symposium (IUS) Y Kusano, G Luo, D Horsley, IT Ishii, A Teshigahara IEEE 2018, 1-4, 2018 | 5 | 2018 |
Nanoporous anodic aluminum oxide as a promising material for the electrostatically-controlled thin film interference filter PH Lo, GL Luo, CC Lee, W Fang Journal of Micromechanics and Microengineering 25 (2), 025001, 2015 | 5 | 2015 |
Spurious mode free hexagonal PMUT array Y Kusano, GL Luo, DA Horsley 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 2 | 2019 |
Process platform for high aspect-ratio self-aligned vertical comb actuators HT Su, GL Luo, J Hsieh, YC Fu, W Fang 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 2 | 2015 |
Implementation of nanoporous anodic aluminum oxide layer with different porosities for interferometric RGB color pixels as handheld display application PH Lo, GL Luo, W Fang 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 2 | 2015 |
High-Performance Micromachined Ultrasonic Transducers GL Luo University of California, Davis, 2019 | | 2019 |