| Investigation of parallel-connected MEMS electrostatic energy harvesters for enhancing output power over a wide frequency range J Li, X Tong, J Oxaal, Z Liu, M Hella, DA Borca-Tasciuc Journal of Micromechanics and Microengineering 29 (9), 094001, 2019 | 18 | 2019 |
| A study of mode-matching and alignment in piezoelectric disk resonator gyros via femtosecond laser ablation Z Liu, A Daruwalla, B Hamelin, F Ayazi 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 17 | 2021 |
| A review of eigenmode and frequency control in piezoelectric MEMS resonators Z Liu, F Ayazi IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 70 …, 2023 | 15 | 2023 |
| 4H-silicon carbide as an acoustic material for MEMS Y Long, Z Liu, F Ayazi IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 70 …, 2023 | 11 | 2023 |
| Monocrystalline 4H silicon carbide-on-insulator substrates for Nav-Grade planar BAW gyroscopes B Hamelin, J Yang, Z Liu, F Ayazi 2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2021 | 10 | 2021 |
| Multi-Coefficient Eigenmode Operation–Breaking Through 10°/hr Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes Z Liu, H Wen, F Ayazi | 8 | 2022 |
| A centrally-anchored high-Q tunable piezoelectric MEMS resonators FOR wide temperature range RTC Y Long, Z Liu, C Wehner, A Farrokh 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2023 | 6 | 2023 |
| A low-voltage wideband AlN-on-Si gyroscope with sub 10-DPH bias instability mode matched using laser trimming Z Liu, H Wen, F Ayazi 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2023 | 5 | 2023 |
| Wafer-level high-aspect-ratio deep reactive ion etching of 4H-silicon carbide on insulator substrates A Lotfi, MP Hardin, Z Liu, A Wood, C Bolton, K Riddell, H Ashraf, ... Proc. Solid-State Sensors, Actuators Microsyst. Hilton Head, 5-8, 2022 | 5 | 2022 |
| A High-Q Solid Disk BAW Gyroscope In Monocrystalline 4H Silicon- Carbide with Sub-PPM As-born Frequency Split Z Liu, A Lotfi, MP Hardin, A Farrokh 2022 Hilton Head Work Shop, 2022 | 5 | 2022 |
| 4H-SiC Beam Resonators with Tailored Local Zero TCF Y Long, Z Liu, X Jiang, F Ayazi 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | 3 | 2024 |
| A high-order membrane resonator array for gravimetric ammonia sensing with sub-ppm limit of detection Z Liu, A Lotfi, MH Shamami, PJ Hesketh, F Ayazi 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 3 | 2022 |
| A sub-micro-G resolution frequency-modulated piezoelectric in-plane accelerometer S Shin, A Daruwalla, Z Liu, F Ayazi 2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2021 | 3 | 2021 |
| 4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation Z Liu, Y Long, C Wehner, H Wen, F Ayazi Communications Engineering 3 (1), 87, 2024 | 2 | 2024 |
| TA 0.34 Deg/Hour Bulk Acoustic Wave Gyroscope in 4H Silicon-Carbide with an Elevated-Temperature Enhanced Q-Factor of 4.6 Million Z Liu, Y Long, CM Wehner, H Wen, F Ayazi 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | 1 | 2024 |
| MEMS Gyroscope Multi-Feature Calibration Using Machine Learning Technique Y Long, Z Liu, C Hao, F Ayazi arXiv preprint arXiv:2410.07519, 2024 | | 2024 |
| Advances in High-Aspect-Ratio Deep Reactive Ion Etching of 4H-Silicon Carbide Wafers N Li, Z Liu, A Lotfi, X Jiang, E Long, SS Sahasrabudhe, C Bolton, H Ashraf, ... Journal of Microelectromechanical Systems, 2024 | | 2024 |
| A Low Phase Jitter MEMS Oscillator with Centrally-Anchored Piezoelectric Resonator for Wide Temperature Range Real Time Clock Applications S Sahasrabudhe, Y Long, Z Liu, F Ayazi IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2024 | | 2024 |
| Stress-Modulated Control of TCF and Frequency Shift in 4H-SiC Beam Resonators for Enhanced Thermal Stability Y Long, Z Liu, X Jiang, N Li, F Ayazi | | 2024 |
| Sensitive Membrane Resonator Sensor for Sub-Micron Diameter Particle Counting A Jaafar, Z Liu, X Jiang, D Struk, PJ Hesketh, F Ayazi, A Ojha, C Hogan 2024 IEEE International Symposium on Olfaction and Electronic Nose (ISOEN), 1-3, 2024 | | 2024 |
