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Eungnak Han
Eungnak Han
在 intel.com 的电子邮件经过验证
标题
引用次数
引用次数
年份
Effect of composition of substrate-modifying random copolymers on the orientation of symmetric and asymmetric diblock copolymer domains
E Han, KO Stuen, YH La, PF Nealey, P Gopalan
Macromolecules 41 (23), 9090-9097, 2008
3132008
Chemical patterns for directed self-assembly of lamellae-forming block copolymers with density multiplication of features
CC Liu, A Ramírez-Hernández, E Han, GSW Craig, Y Tada, H Yoshida, ...
Macromolecules 46 (4), 1415-1424, 2013
2542013
Perpendicular orientation of domains in cylinder-forming block copolymer thick films by controlled interfacial interactions
E Han, KO Stuen, M Leolukman, CC Liu, PF Nealey, P Gopalan
Macromolecules 42 (13), 4896-4901, 2009
2532009
Fabrication of lithographically defined chemically patterned polymer brushes and mats
CC Liu, E Han, MS Onses, CJ Thode, S Ji, P Gopalan, PF Nealey
Macromolecules 44 (7), 1876-1885, 2011
2412011
One-Step Direct-Patterning Template Utilizing Self-Assembly of POSS-Containing Block Copolymers.
T Hirai, M Leolukman, CC Liu, E Han, YJ Kim, Y Ishida, T Hayakawa, ...
Advanced Materials (Deerfield Beach, Fla.) 21 (43), 4334-4338, 2009
2192009
Photopatternable imaging layers for controlling block copolymer microdomain orientation
E Han, I In, SM Park, YH La, Y Wang, PF Nealey, P Gopalan
Advanced Materials 19 (24), 4448-4452, 2007
1332007
Graphoepitaxial assembly of symmetric block copolymers on weakly preferential substrates
E Han, H Kang, CC Liu, PF Nealey, P Gopalan
Advanced Materials 38 (22), 4325-4329, 2010
1152010
Integration of block copolymer directed assembly with 193 immersion lithography
CC Liu, PF Nealey, AK Raub, PJ Hakeem, SRJ Brueck, E Han, P Gopalan
Journal of Vacuum Science & Technology B 28 (6), C6B30-C6B34, 2010
1052010
Cross-linked random copolymer mats as ultrathin nonpreferential layers for block copolymer self-assembly
E Han, P Gopalan
Langmuir 26 (2), 1311-1315, 2010
702010
Electronic transport and Raman scattering in size-controlled nanoperforated graphene
M Kim, NS Safron, E Han, MS Arnold, P Gopalan
Acs Nano 6 (11), 9846-9854, 2012
642012
Bulk and Thin Film Morphological Behavior of Broad Dispersity Poly(styrene-b-methyl methacrylate) Diblock Copolymers
JM Widin, M Kim, AK Schmitt, E Han, P Gopalan, MK Mahanthappa
Macromolecules 46 (11), 4472-4480, 2013
542013
Resist free patterning of nonpreferential buffer layers for block copolymer lithography
E Han, M Leolukman, M Kim, P Gopalan
ACS nano 4 (11), 6527-6534, 2010
412010
Interplay of surface chemical composition and film thickness on graphoepitaxial assembly of asymmetric block copolymers
M Kim, E Han, DP Sweat, P Gopalan
Soft Matter 9 (26), 6135-6141, 2013
312013
Degree of perfection and pattern uniformity in the directed assembly of cylinder-forming block copolymer on chemically patterned surfaces
H Kang, GSW Craig, E Han, P Gopalan, PF Nealey
Macromolecules 45 (1), 159-164, 2012
312012
Imaging layers for the directed assembly of block copolymer films: Dependence of the physical and chemical properties of patterned polymer brushes on brush molecular weight
KO Stuen, I In, E Han, JA Streifer, RJ Hamers, PF Nealey, P Gopalan
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
312007
A dual functional layer for block copolymer self-assembly and the growth of nanopatterned polymer brushes
DP Sweat, M Kim, X Yu, SK Schmitt, E Han, JW Choi, P Gopalan
Langmuir 29 (41), 12858-12865, 2013
292013
Photopatternable imaging layers for controlling block copolymer microdomain orientation
P Gopalan, E Han
US Patent 8,362,179, 2013
282013
Patternable polymer block brush layers
P Gopalan, E Han
US Patent 9,388,268, 2016
252016
Chemical patterns from surface grafted resists for directed assembly of block copolymers
E Han, M Kim, P Gopalan
ACS nano 6 (2), 1823-1829, 2012
252012
Method for creating alternate hardmask cap interconnect structure with increased overlay margin
RL Bristol, M Chandhok, JS Chawla, F Gstrein, E Han, R Hourani, K Lin, ...
US Patent 10,109,583, 2018
132018
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