| Tunable infrared detector with integrated micromachined Fabry-Perot filter N Neumann, M Ebermann, S Kurth, K Hiller Journal of Micro/Nanolithography, MEMS and MOEMS 7 (2), 021004-021004-9, 2008 | 186 | 2008 |
| Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review M Ebermann, N Neumann, K Hiller, M Seifert, M Meinig, S Kurth MOEMS and miniaturized systems XV 9760, 64-83, 2016 | 108 | 2016 |
| Silicon mirrors and micromirror arrays for spatial laser beam modulation S Kurth, R Hahn, C Kaufmann, K Kehr, J Mehner, U Wollmann, W Dötzel, ... Sensors and Actuators A: Physical 66 (1-3), 76-82, 1998 | 71 | 1998 |
| Simulation of gas damping in microstructures with nontrivial geometries J Mehner, S Kurth, D Billep, C Kaufmann, K Kehr, W Dotzel Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro …, 1998 | 68 | 1998 |
| BEOL embedded RF-MEMS switch for mm-wave applications M Kaynak, KE Ehwald, J Drews, R Scholz, F Korndörfer, D Knoll, B Tillack, ... 2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009 | 64 | 2009 |
| Tunable infrared detector with integrated micromachined Fabry-Perot filter N Neumann, M Ebermann, K Hiller, S Kurth MOEMS and Miniaturized Systems VI 6466, 50-61, 2007 | 41 | 2007 |
| Silicon mirrors and micromirror arrays for spatial laser beam modulation W Dotzel, T Gessner, R Hahn, C Kaufmann, K Kehr, S Kurth, J Mehner Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 38 | 1997 |
| Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid-and long-wave infrared microspectrometers M Meinig, M Ebermann, N Neumann, S Kurth, K Hiller, T Geßner 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 37 | 2011 |
| Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers M Ebermann, N Neumann, K Hiller, E Gittler, M Meinig, S Kurth Next-Generation Spectroscopic Technologies V 8374, 258-266, 2012 | 33 | 2012 |
| Recent advances in expanding the spectral range of MEMS Fabry-Perot filters M Ebermann, N Neumann, K Hiller, E Gittler, M Meinig, S Kurth MOEMS and Miniaturized Systems IX 7594, 274-283, 2010 | 32 | 2010 |
| A novel 24-kHz resonant scanner for high-resolution laser display S Kurth, C Kaufmann, R Hahn, J Mehner, W Doetzel, T Gessner MOEMS Display and Imaging Systems III 5721, 23-33, 2005 | 32 | 2005 |
| Silicon mirror arrays fabricated by using bulk and surface micromachining T Gessner, W Doetzel, D Billep, R Hahn, C Kaufmann, K Kehr, S Kurth, ... Miniaturized Systems with Micro-Optics and Micromechanics II 3008, 296-305, 1997 | 32 | 1997 |
| Determination of parameters with uncertainties for quality control in MEMS fabrication M Gennat, M Meinig, A Shaporin, S Kurth, C Rembe, B Tibken Journal of microelectromechanical systems 22 (3), 613-624, 2013 | 25 | 2013 |
| Design, operation and performance of a Fabry-Perot-Based MWIR microspectrometer M Ebermann, K Hiller, S Kurth, N Neumann Sensor+ Test Conference 2009, 2009 | 24 | 2009 |
| Low-temperature approaches for fabrication of high-frequency microscanners K Hiller, R Hahn, C Kaufmann, S Kurth, K Kehr, T Gessner, W Doetzel, ... Miniaturized Systems with Micro-Optics and MEMS 3878, 58-66, 1999 | 23 | 1999 |
| Experimental adaptation of model parameters for microelectromechanical systems (MEMS) S Kurth, W Dötzel Sensors and Actuators A: Physical 62 (1-3), 760-764, 1997 | 23 | 1997 |
| Tunable Fabry-Perot interferometer for 3-to 4.5-um wavelength with bulk micromachined reflector carrier S Kurth, K Hiller, N Neumann, M Heinze, W Doetzel, T Gessner MOEMS and Miniaturized Systems III 4983, 215-226, 2003 | 22 | 2003 |
| Micro arc welding for electrode gap reduction of high aspect ratio microstructures M Nowack, S Leidich, D Reuter, S Kurth, M Küchler, A Bertz, T Geßner Sensors and Actuators A: Physical 188, 495-502, 2012 | 21 | 2012 |
| Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases M Ebermann, N Neumann, K Hiller, M Seifert, M Meinig, S Kurth MOEMS and Miniaturized Systems XIII 8977, 212-220, 2014 | 20 | 2014 |
| Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range N Neumann, M Ebermann, E Gittler, M Meinig, S Kurth, K Hiller SENSORS, 2010 IEEE, 2383-2387, 2010 | 18 | 2010 |
