| A miniaturized piezoelectric MEMS accelerometer with polygon topological cantilever structure C Yang, B Hu, L Lu, Z Wang, W Liu, C Sun Micromachines 13 (10), 1608, 2022 | 6 | 2022 |
| Bimorph piezoelectric MEMS microphone with tractive structure C Yang, B Hu, L Lu, Y Wang, Y Cai, Y Liu, W Liu, C Sun 2022 IEEE International Ultrasonics Symposium (IUS), 1-4, 2022 | 4 | 2022 |
| A ScAlN-Based Bimorph Piezoelectric MEMS Microphone Using 3 3 Circular Diaphragms B Hu, W Liu, Y Liu, C Yang, Z Wang, L Lu, Y Cai, S Guo, C Sun IEEE Transactions on Electron Devices, 2024 | 2 | 2024 |
| A ScAlN-based piezoelectric MEMS microphone with sector-connected cantilevers B Hu, W Liu, C Yang, L Lu, Z Wang, Y Liu, Y Cai, J Wang, S Guo, C Sun Journal of Microelectromechanical Systems, 2023 | 2 | 2023 |
| A piezoelectric MEMS microphone with proof mass and its array L Lu, W Liu, B Hu, C Yang, Z Wang, Y Liu, Y Cai, J Wang, S Guo, C Sun Sensors and Actuators A: Physical 377, 115735, 2024 | | 2024 |
| High-Q film bulk acoustic resonator with high quality AlN film based on transfer method Y Wang, C Gao, C Yang, T Yang, Y Liu, Y Ma, X Ren, Y Cai, C Sun Physica Scripta 99 (9), 095926, 2024 | | 2024 |
| Piezoelectric mems microphone chip and piezoelectric mems microphone C Yang, HU Bohao, W Liu, C Sun, S Bowoon US Patent 11,805,371, 2023 | | 2023 |
| Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias Z Wang, W Liu, B Hu, Y Xiao, C Yang, L Lu, Y Cai, Y Liu, C Sun Journal of Microelectromechanical Systems, 2023 | | 2023 |
