A feedback controlled MEMS nanopositioner for on-chip high-speed AFM A Mohammadi, AG Fowler, YK Yong, SOR Moheimani Journal of Microelectromechanical Systems 23 (3), 610-619, 2014 | 67 | 2014 |
A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM AG Fowler, AN Laskovski, AC Hammond, SOR Moheimani Journal of Microelectromechanical Systems 21 (4), 771-773, 2012 | 55 | 2012 |
Force-controlled MEMS rotary microgripper B Piriyanont, AG Fowler, SOR Moheimani Journal of Microelectromechanical Systems 24 (4), 1164-1172, 2015 | 50 | 2015 |
On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach MG Ruppert, AG Fowler, M Maroufi, SOR Moheimani Journal of Microelectromechanical Systems 26 (1), 215-225, 2017 | 47 | 2017 |
MEMS for Nanopositioning: Design and Applications M Maroufi, AG Fowler, SOR Moheimani Journal of Microelectromechanical Systems 26 (3), 469-500, 2017 | 45 | 2017 |
High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy M Maroufi, AG Fowler, A Bazaei, SOR Moheimani Review of Scientific Instruments 86 (2), 023705, 2015 | 39 | 2015 |
Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners A Bazaei, M Maroufi, AG Fowler, SOR Moheimani IEEE Transactions on Control Systems Technology 24 (5), 1717-1728, 2016 | 37 | 2016 |
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing M Rakotondrabe, AG Fowler, SOR Moheimani IEEE Transactions on Control Systems Technology 22 (4), 1486-1497, 2014 | 35 | 2014 |
On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers With Integrated Piezoelectric Transducers MB Coskun, AG Fowler, M Maroufi, SOR Moheimani Journal of Microelectromechanical Systems 26 (6), 1287-1297, 2017 | 33 | 2017 |
Control of an Active AFM Cantilever With Differential Sensing Configuration MB Coskun, H Alemansour, AG Fowler, M Maroufi, SOR Moheimani IEEE Transactions on Control Systems Technology 27 (5), 2271-2278, 2018 | 32 | 2018 |
An omnidirectional MEMS ultrasonic energy harvester for implanted devices AG Fowler, SOR Moheimani, S Behrens Journal of Microelectromechanical Systems 23 (6), 1454-1462, 2014 | 30 | 2014 |
Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing AG Fowler, A Bazaei, SOR Moheimani Journal of Microelectromechanical Systems 22 (3), 687 - 694, 2013 | 30 | 2013 |
A 3-DoF MEMS ultrasonic energy harvester AG Fowler, SO Moheimani, S Behrens Sensors, 2012 IEEE, 1-4, 2012 | 18 | 2012 |
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design M Maroufi, AG Fowler, SOR Moheimani Journal of Microelectromechanical Systems 24 (6), 1730-1740, 2015 | 10 | 2015 |
Q control of a microfabricated piezoelectric cantilever with on-chip feedthrough cancellation AG Fowler, MB Coskun, SOR Moheimani 2017 IEEE Conference on Control Technology and Applications (CCTA), 123-128, 2017 | 9 | 2017 |
Frequency-domain closed-loop system identification of a scanning tunneling microscope F Tajaddodianfar, A Fowler, E Fuchs, JN Randall, SOR Moheimani ASPE 2016 Spring Topical Meeting Precision Mechatronic System Design and …, 2016 | 8 | 2016 |
Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy AG Fowler, M Maroufi, SOR Moheimani Review of Scientific Instruments 86 (4), 046107, 2015 | 7 | 2015 |
Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes AG Fowler, SOR Moheimani, S Behrens IEEE Electron Device Letters 34 (11), 1421-1423, 2013 | 6 | 2013 |
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing M Rakotondrabe, AG Fowler, SOR Moheimani SENSORS, 2012 IEEE, 1-4, 2012 | 6 | 2012 |
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing M Rakotondrabe, AG Fowler, SO Moheimani Sensors, 2012 IEEE, 1-4, 2012 | 6 | 2012 |