受强制性开放获取政策约束的文章 - Yuan Li了解详情
无法在其他位置公开访问的文章：5 篇
Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz
H Zhang, Y Xing, Y Li, MA Gosálvez, X Qiu
Sensors and Actuators A: Physical 256, 24-34, 2017
强制性开放获取政策： 国家自然科学基金委员会, Government of Spain
Transient and stable profiles during anisotropic wet etching of quartz
Y Xing, MA Gosalvez, H Zhang, Y Li, X Qiu
Journal of Microelectromechanical Systems 26 (5), 1063-1072, 2017
强制性开放获取政策： 国家自然科学基金委员会, Government of Spain
Fluctuations During Anisotropic Etching: Local Recalibration and Application to Si {110}
MA Gosálvez, Y Li, N Ferrando, P Pal, K Sato, Y Xing
Journal of Microelectromechanical Systems, 2016
强制性开放获取政策： 国家自然科学基金委员会, Department of Science & Technology, India …
An experiment-based method for focused ion beam milling profile calculation and process design
Y Li, Y Xing, C Fang, Q Chen, X Qiu
Sensors and Actuators A: Physical 286, 78-90, 2019
强制性开放获取政策： 国家自然科学基金委员会
Evolutionary kinetic monte carlo method for the simulation of anisotropic etching of z-cut, at-cut and bt-cut quartz
H Zhang, Y Xing, J Zhang, MA Gosálvez, Y Li, Y Zhang
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
强制性开放获取政策： 国家自然科学基金委员会
可在其他位置公开访问的文章：4 篇
Simulation of microloading and ARDE in DRIE
MA Gosalvez, Y Zhou, Y Zhang, G Zhang, Y Li, Y Xing
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
强制性开放获取政策： 国家自然科学基金委员会, Government of Spain
Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching
Y Li, MA Gosálvez, P Pal, K Sato, Y Xing
Journal of Micromechanics and Microengineering 25 (5), 055023, 2015
强制性开放获取政策： 国家自然科学基金委员会, Government of Spain
The study of self-limited state profile and level set simulation of anisotropic wet etching on quartz
Y Xing, H Zhang, PP Cai, Y Li
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
强制性开放获取政策： 国家自然科学基金委员会
An experiment-based model for focused ion beam simulation and the process design optimization
Y Li, Y Xing, H Zhang, X Qiu
2018 IEEE Micro Electro Mechanical Systems (MEMS), 487-490, 2018
强制性开放获取政策： 国家自然科学基金委员会
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