| Characterization of a time multiplexed inductively coupled plasma etcher AA Ayón, R Braff, CC Lin, HH Sawin, MA Schmidt Journal of the electrochemical Society 146 (1), 339, 1999 | 566 | 1999 |
| Molding of deep polydimethylsiloxane microstructures for microfluidics and biological applications A Folch, A Ayon, O Hurtado, MA Schmidt, M Toner | 378 | 1999 |
| A six-wafer combustion system for a silicon micro gas turbine engine A Mehra, X Zhang, AA Ayón, IA Waitz, MA Schmidt, CM Spadaccini Journal of Microelectromechanical systems 9 (4), 517-527, 2000 | 354 | 2000 |
| Power MEMS and microengines AH Epstein, SD Senturia, G Anathasuresh, A Ayon, K Breuer, KS Chen, ... Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 312 | 1997 |
| Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) KS Chen, AA Ayón, X Zhang, SM Spearing Journal of Microelectromechanical Systems 11 (3), 264-275, 2002 | 305 | 2002 |
| Micro-heat engines, gas turbines, and rocket engines-The MIT microengine project A Epstein, S Senturia, O Al-Midani, G Anathasuresh, A Epstein, S Senturia, ... 28th Fluid dynamics conference, 1773, 1997 | 274 | 1997 |
| Microfabrication of a high pressure bipropellant rocket engine AP London, AA Ayon, AH Epstein, SM Spearing, T Harrison, Y Peles, ... Sensors and Actuators A: Physical 92 (1-3), 351-357, 2001 | 200 | 2001 |
| Stability of self-assembled monolayers on titanium and gold G Mani, DM Johnson, D Marton, VL Dougherty, MD Feldman, D Patel, ... Langmuir 24 (13), 6774-6784, 2008 | 179 | 2008 |
| Controlling and testing the fracture strength of silicon on the mesoscale KS Chen, A Ayon, SM Spearing Journal of the American Ceramic Society 83 (6), 1476-1484, 2000 | 148 | 2000 |
| Deep reactive ion etching: a promising technology for micro-and nanosatellites AA Ayon, RL Bayt, KS Breuer Smart materials and structures 10 (6), 1135, 2001 | 122 | 2001 |
| Drug delivery from gold and titanium surfaces using self-assembled monolayers G Mani, DM Johnson, D Marton, MD Feldman, D Patel, AA Ayon, ... Biomaterials 29 (34), 4561-4573, 2008 | 121 | 2008 |
| Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching A Mehra, AA Ayón, IA Waitz, MA Schmidt Journal of Microelectromechanical Systems 8 (2), 152-160, 1999 | 120 | 1999 |
| High efficiency hybrid silicon nanopillar–polymer solar cells PR Pudasaini, F Ruiz-Zepeda, M Sharma, D Elam, A Ponce, AA Ayon ACS applied materials & interfaces 5 (19), 9620-9627, 2013 | 115 | 2013 |
| Ultrathin, flexible organic–inorganic hybrid solar cells based on silicon nanowires and PEDOT: PSS M Sharma, PR Pudasaini, F Ruiz-Zepeda, D Elam, AA Ayon ACS applied materials & interfaces 6 (6), 4356-4363, 2014 | 114 | 2014 |
| Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing N Miki, X Zhang, R Khanna, AA Ayón, D Ward, SM Spearing Sensors and Actuators A: Physical 103 (1-2), 194-201, 2003 | 112 | 2003 |
| Inertial sensor technology using DRIE and wafer bonding with connecting capability K Ishihara, CF Yung, AA Ayón, MA Schmidt Journal of Microelectromechanical Systems 8 (4), 403-408, 1999 | 105 | 1999 |
| Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films X Zhang, KS Chen, R Ghodssi, AA Ayon, SM Spearing Sensors and Actuators A: Physical 91 (3), 373-380, 2001 | 96 | 2001 |
| A high-power MEMS electric induction motor C Livermore, AR Forte, T Lyszczarz, SD Umans, AA Ayon, JH Lang Journal of microelectromechanical systems 13 (3), 465-471, 2004 | 94 | 2004 |
| Surface modification of functional self-assembled monolayers on 316L stainless steel via lipase catalysis A Mahapatro, DM Johnson, DN Patel, MD Feldman, AA Ayon, ... Langmuir 22 (3), 901-905, 2006 | 92 | 2006 |
| Influence of coil power on the etching characteristics in a high density plasma etcher AA Ayon, RA Braff, R Bayt, HH Sawin, MA Schmidt Journal of the electrochemical Society 146 (7), 2730, 1999 | 92 | 1999 |
Xin ZhangDistinguished Professor of Engineering在 bu.edu 的电子邮件经过验证
