| Influence of substrate materials on nucleation and properties of iridium thin films grown by ALD P Schmitt, V Beladiya, N Felde, P Paul, F Otto, T Fritz, A Tünnermann, ... Coatings 11 (2), 173, 2021 | 32 | 2021 |
| Influence of temperature and plasma parameters on the properties of PEALD HfO2 M Lapteva, V Beladiya, S Riese, P Hanke, F Otto, T Fritz, P Schmitt, ... Optical Materials Express 11 (7), 1918-1942, 2021 | 28 | 2021 |
| Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study V Beladiya, M Becker, T Faraz, WMME Kessels, P Schenk, F Otto, T Fritz, ... Nanoscale 12 (3), 2089-2102, 2020 | 25 | 2020 |
| Structural, optical, and mechanical properties of TiO2 nanolaminates L Ghazaryan, S Handa, P Schmitt, V Beladiya, V Roddatis, A Tünnermann, ... Nanotechnology 32 (9), 095709, 2020 | 23 | 2020 |
| Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen R Müller, L Ghazaryan, P Schenk, S Wolleb, V Beladiya, F Otto, N Kaiser, ... Coatings 8 (11), 413, 2018 | 17 | 2018 |
| Influence of seed layers on the reflectance of sputtered aluminum thin films P Schmitt, S Stempfhuber, N Felde, AV Szeghalmi, N Kaiser, ... Optics Express 29 (13), 19472-19485, 2021 | 16 | 2021 |
| Optical bandgap control in Al2O3/TiO2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides P Paul, MG Hafiz, P Schmitt, C Patzig, F Otto, T Fritz, A Tünnermann, ... Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy 252, 119508, 2021 | 16 | 2021 |
| Influence of seed layers on optical properties of aluminum in the UV range S Stempfhuber, N Felde, S Schwinde, M Trost, P Schenk, S Schröder, ... Optics Express 28 (14), 20324-20333, 2020 | 16 | 2020 |
| Optical, structural, and functional properties of highly reflective and stable iridium mirror coatings for infrared applications P Schmitt, N Felde, T Döhring, M Stollenwerk, I Uschmann, K Hanemann, ... Optical Materials Express 12 (2), 545-559, 2022 | 15 | 2022 |
| Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substrate Biasing: Thin Films for High-Reflective Mirrors V Beladiya, T Faraz, P Schmitt, AS Munser, S Schröder, S Riese, ... ACS Applied Materials & Interfaces 14 (12), 14677-14692, 2022 | 12 | 2022 |
| Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir M Franz, R Junghans, P Schmitt, A Szeghalmi, SE Schulz Beilstein Journal of Nanotechnology 11 (1), 1439-1449, 2020 | 12 | 2020 |
| Atomic Layer Deposition L Ghazaryan, K Pfeiffer, P Schmitt, V Beladiya, S Kund, A Szeghalmi digital Encyclopedia of Applied Physics, 1-44, 2020 | 4* | 2020 |
| Linear and nonlinear optical properties of iridium nanoparticles grown via atomic layer deposition P Schmitt, P Paul, W Li, Z Wang, C David, N Daryakar, K Hanemann, ... Coatings 13 (4), 787, 2023 | 3 | 2023 |
| Heterostructure Films of SiO2 and HfO2 for High-Power Laser Optics Prepared by Plasma-Enhanced Atomic Layer Deposition S Alam, P Paul, V Beladiya, P Schmitt, O Stenzel, M Trost, S Wilbrandt, ... Coatings 13 (2), 278, 2023 | 3 | 2023 |
| Atomically thin metal–dielectric heterostructures by atomic layer deposition P Paul, P Schmitt, VV Sigurjónsdóttir, K Hanemann, N Felde, S Schröder, ... ACS Applied Materials & Interfaces 15 (18), 22626-22636, 2023 | 2 | 2023 |
| Environmentally stable iridium mirror coatings for the infrared spectral range T Döhring, M Stollenwerk, P Schmitt, A Szeghalmi Ninth European Seminar on Precision Optics Manufacturing 12298, 39-46, 2022 | 2 | 2022 |
| Optical element having metallic seed layer and aluminum layer, and method for producing same S Stempfhuber, D Gäbler, P Schmitt, P Munzert, S Schwinde US Patent 11,466,356, 2022 | | 2022 |
| Structural and optical properties of atomically engineered Ir/Al2O3 nanocomposites P Paul, P Schmitt, Z Wang, W Li, MF Kling, A Tünnermann, A Szeghalmi Nonlinear Optics and its Applications 2022, PC121430Y, 2022 | | 2022 |
| Umweltbeständige Spiegelbeschichtungen aus Iridium für den infraroten Spektralbereich T Döhring, M Stollenwerk, P Schmitt, A Szeghalmi DGaO Proceedings 2022 (123), 1-2, 2022 | | 2022 |
| Iridium-Alumina Nanolaminates for Epsilon Near-Zero Coatings in the DUV Spectral Range P Schenk, A Szeghalmi | | |
Adriana SzeghalmiInstitute of Applied Physics, Friedrich Schiller University Jena在 uni-jena.de 的电子邮件经过验证
