| Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation R Duffy, A Ricchio, R Murphy, G Maxwell, R Murphy, G Piaszenski, ... Journal of Applied Physics 123 (12), 2018 | 23 | 2018 |
| Exploring conductivity in ex-situ doped Si thin films as thickness approaches 5 nm J MacHale, F Meaney, N Kennedy, L Eaton, G Mirabelli, M White, ... Journal of Applied Physics 125 (22), 2019 | 13 | 2019 |
| Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates N Kennedy, R Duffy, L Eaton, D O’Connell, S Monaghan, S Garvey, ... Beilstein Journal of Nanotechnology 9 (1), 2106-2113, 2018 | 12 | 2018 |
| Monolayer doping of germanium with arsenic: A new chemical route to achieve optimal dopant activation N Kennedy, S Garvey, B Maccioni, L Eaton, M Nolan, R Duffy, F Meaney, ... Langmuir 36 (34), 9993-10002, 2020 | 10 | 2020 |
| Monolayer doping of silicon-germanium alloys: A balancing act between phosphorus incorporation and strain relaxation N Kennedy, R Duffy, G Mirabelli, L Eaton, N Petkov, JD Holmes, C Hatem, ... Journal of Applied Physics 126 (2), 2019 | 9 | 2019 |
| AsH3 gas-phase ex situ doping 3D silicon structures R Duffy, K Thomas, E Galluccio, G Mirabelli, M Sultan, N Kennedy, ... Journal of Applied Physics 124 (4), 2018 | 4 | 2018 |
| Tertiarybutylarsine damage-free thin-film doping and conformal surface coverage of substrate-released horizontal Si nanowires F Meaney, K Thomas, J MacHale, G Mirabelli, N Kennedy, J Connolly, ... Applied Surface Science 508, 145147, 2020 | 1 | 2020 |
| Monolayer doping and other strategies in high surface-to-volume ratio silicon devices R Duffy, N Kennedy, G Mirabelli, E Galluccio, PK Hurley, JD Holmes, ... 2018 18th International Workshop on Junction Technology (IWJT), 1-6, 2018 | 1 | 2018 |
| Monolayer doping of silicon: development of phosphorus doping on planar, silicon-on-insulator and nanowire substrates N Kennedy Monolayer doping of bulk and thin body group IV semiconductors, 79, 2020 | | 2020 |
| MLD on silicon-germanium alloys: A balancing act between phosphorus incorporation and strain relaxation N Kennedy Monolayer doping of bulk and thin body group IV semiconductors, 198, 2020 | | 2020 |
| Monolayer doping of bulk and thin body group IV semiconductors N Kennedy University College Cork, 2020 | | 2020 |
| RF Plasma Monolayer Doping of Si Nanowires AN Nazarov, YV Gomeniuk, N Kennedy, VI Glotov, PN Okholin, B Long, ... 2019 IEEE 9th International Conference Nanomaterials: Applications …, 2019 | | 2019 |
| Electrical Evaluation of Ion Implant, Liquid, and Gas Sources for Doping of Ultra-Thin Body SOI and Si Nanowire Structures J MacHale, F Meaney, B Sheehan, R Duffy, N Kennedy, B Long 2018 22nd International Conference on Ion Implantation Technology (IIT), 82-85, 2018 | | 2018 |
| Diagnosis of phosphorus monolayer doping in silicon based on nanowire R Duffy, A Ricchio, R Murphy, G Maxwell, R Murphy, G Piaszenski, ... | | 2018 |
