| Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources M Ritala, K Kukli, A Rahtu, PI Raisanen, M Leskela, T Sajavaara, ... Science 288 (5464), 319-321, 2000 | 658 | 2000 |
| Atomic layer deposition of platinum thin films T Aaltonen, M Ritala, T Sajavaara, J Keinonen, M Leskelä Chemistry of materials 15 (9), 1924-1928, 2003 | 526 | 2003 |
| Effect of water dose on the atomic layer deposition rate of oxide thin films R Matero, A Rahtu, M Ritala, M Leskelä, T Sajavaara Thin Solid Films 368 (1), 1-7, 2000 | 350 | 2000 |
| Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water V Pore, A Rahtu, M Leskelä, M Ritala, T Sajavaara, J Keinonen Chemical Vapor Deposition 10 (3), 143-148, 2004 | 286 | 2004 |
| Atomic layer deposition of hafnium dioxide films from hafnium tetrakis (ethylmethylamide) and water K Kukli, M Ritala, T Sajavaara, J Keinonen, M Leskelä Chemical Vapor Deposition 8 (5), 199-204, 2002 | 275 | 2002 |
| Comparison of hafnium oxide films grown by atomic layer deposition from iodide and chloride precursors K Kukli, M Ritala, T Sajavaara, J Keinonen, M Leskelä Thin Solid Films 416 (1-2), 72-79, 2002 | 230 | 2002 |
| Potku–New analysis software for heavy ion elastic recoil detection analysis K Arstila, J Julin, MI Laitinen, J Aalto, T Konu, S Kärkkäinen, S Rahkonen, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2014 | 206 | 2014 |
| Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion OME Ylivaara, X Liu, L Kilpi, J Lyytinen, D Schneider, M Laitinen, J Julin, ... Thin Solid Films 552, 124-135, 2014 | 203 | 2014 |
| Atomic Layer Deposition of Titanium Oxide from TiI4 and H2O2 K Kukli, M Ritala, M Schuisky, M Leskelä, T Sajavaara, J Keinonen, ... Chemical Vapor Deposition 6 (6), 303-310, 2000 | 198 | 2000 |
| Detection efficiency of time-of-flight energy elastic recoil detection analysis systems Y Zhang, HJ Whitlow, T Winzell, IF Bubb, T Sajavaara, K Arstila, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1999 | 197 | 1999 |
| Low‐Temperature ALE Deposition of Y2O3 Thin Films from β‐Diketonate Precursors M Putkonen, T Sajavaara, LS Johansson, L Niinistö Chemical Vapor Deposition 7 (1), 44-50, 2001 | 174 | 2001 |
| Atomic layer deposition of polyimide thin films M Putkonen, J Harjuoja, T Sajavaara, L Niinistö Journal of Materials Chemistry 17 (7), 664-669, 2007 | 169 | 2007 |
| Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor–Strontium‐bis(tri‐isopropyl cyclopentadienyl) M Vehkamäki, T Hänninen, M Ritala, M Leskelä, T Sajavaara, E Rauhala, ... Chemical Vapor Deposition 7 (2), 75-80, 2001 | 167 | 2001 |
| Properties of AlN grown by plasma enhanced atomic layer deposition M Bosund, T Sajavaara, M Laitinen, T Huhtio, M Putkonen, VM Airaksinen, ... Applied Surface Science 257 (17), 7827-7830, 2011 | 153 | 2011 |
| Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen K Kukli, M Ritala, J Sundqvist, J Aarik, J Lu, T Sajavaara, M Leskelä, ... Journal of Applied Physics 92 (10), 5698-5703, 2002 | 151 | 2002 |
| Plasma-enhanced atomic layer deposition of silver thin films M Kariniemi, J Niinisto, T Hatanpaa, M Kemell, T Sajavaara, M Ritala, ... Chemistry of Materials 23 (11), 2901-2907, 2011 | 150 | 2011 |
| Atomic layer deposition of Ta (Al) N (C) thin films using trimethylaluminum as a reducing agent P Alen, M Juppo, M Ritala, T Sajavaara, J Keinonen, M Leskelä Journal of the Electrochemical Society 148 (10), G566, 2001 | 150 | 2001 |
| Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation F Iacopi, Y Travaly, B Eyckens, C Waldfried, T Abell, EP Guyer, DM Gage, ... Journal of Applied Physics 99 (5), 2006 | 146 | 2006 |
| Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors J Päiväsaari, M Putkonen, T Sajavaara, L Niinistö Journal of alloys and compounds 374 (1), 124-128, 2004 | 146* | 2004 |
| Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation J Malm, E Sahramo, J Perälä, T Sajavaara, M Karppinen Thin Solid Films 519 (16), 5319-5322, 2011 | 136 | 2011 |
