MEMS resonators for frequency reference and timing applications G Wu, J Xu, EJ Ng, W Chen Journal of Microelectromechanical Systems 29 (5), 1137-1166, 2020 | 98 | 2020 |
Low-cost, tiny-sized MEMS hydrophone sensor for water pipeline leak detection J Xu, KTC Chai, G Wu, B Han, ELC Wai, W Li, J Yeo, E Nijhof, Y Gu IEEE Transactions on Industrial Electronics 66 (8), 6374-6382, 2018 | 86 | 2018 |
Wafer-level vacuum packaging for MEMS resonators using glass frit bonding G Wu, D Xu, B Xiong, Y Wang, Y Wang, Y Ma Journal of microelectromechanical systems 21 (6), 1484-1491, 2012 | 63 | 2012 |
GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers G Wu, Y Zhu, S Merugu, N Wang, C Sun, Y Gu Applied Physics Letters 109 (1), 2016 | 49 | 2016 |
Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators D Feng, D Xu, G Wu, B Xiong, Y Wang Journal of Applied Physics 115 (2), 2014 | 44 | 2014 |
Wafer-level vacuum-packaged high-performance AlN-on-SOI piezoelectric resonator for sub-100-MHz oscillator applications G Wu, J Xu, X Zhang, N Wang, D Yan, JLK Lim, Y Zhu, W Li, Y Gu IEEE Transactions on Industrial Electronics 65 (4), 3576-3584, 2017 | 40 | 2017 |
Isotropic Silicon Etching With Gas for Wafer-Level Micromachining Applications D Xu, B Xiong, G Wu, Y Wang, X Sun, Y Wang Journal of microelectromechanical systems 21 (6), 1436-1444, 2012 | 38 | 2012 |
Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture L Jia, L Shi, C Liu, Y Yao, C Sun, G Wu IEEE Transactions on Electron Devices 68 (9), 4656-4663, 2021 | 35 | 2021 |
A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer G Wu, D Xu, B Xiong, Y Wang Journal of Micromechanics and Microengineering 22 (2), 025020, 2012 | 34 | 2012 |
Resonant magnetic field sensor with capacitive driving and electromagnetic induction sensing G Wu, D Xu, B Xiong, D Feng, Y Wang IEEE electron device letters 34 (3), 459-461, 2013 | 32 | 2013 |
A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity GQ Wu, GL Chua, YD Gu Sensors and Actuators A: Physical 259, 50-56, 2017 | 31 | 2017 |
A wide measurement pressure range CMOS-MEMS based integrated thermopile vacuum gauge with an XeF2 dry-etching process X Sun, D Xu, B Xiong, G Wu, Y Wang Sensors and Actuators A: Physical 201, 428-433, 2013 | 30 | 2013 |
Design and performance of ScAlN/AlN trapezoidal cantilever-based MEMS piezoelectric energy harvesters Y Liu, B Hu, Y Cai, J Zhou, W Liu, A Tovstopyat, G Wu, C Sun IEEE Transactions on Electron Devices 68 (6), 2971-2976, 2021 | 26 | 2021 |
A temperature-stable and low impedance piezoelectric MEMS resonator for drop-in replacement of quartz crystals W Chen, W Jia, Y Xiao, Z Feng, G Wu IEEE Electron Device Letters 42 (9), 1382-1385, 2021 | 24 | 2021 |
Development of six-degree-of-freedom inertial sensors with an 8-in advanced MEMS fabrication platform G Wu, B Han, DD Cheam, LC Wai, PHK Chang, N Singh, Y Gu IEEE Transactions on Industrial Electronics 66 (5), 3835-3842, 2018 | 23 | 2018 |
Enhancement of transmitting sensitivity of piezoelectric micromachined ultrasonic transducers by electrode design L Jia, L Shi, C Liu, C Sun, G Wu IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 68 …, 2021 | 22 | 2021 |
Considerations for an 8-inch wafer-level CMOS compatible AlN pyroelectric 5–14 μm wavelength IR detector towards miniature integrated photonics gas sensors DKT Ng, G Wu, TT Zhang, L Xu, J Sun, WW Chung, H Cai, Q Zhang, ... Journal of Microelectromechanical systems 29 (5), 1199-1207, 2020 | 22 | 2020 |
Uncooled thermoelectric infrared sensor with advanced micromachining D Xu, B Xiong, G Wu, Y Ma, Y Wang IEEE Sensors Journal 12 (6), 2014-2023, 2012 | 22 | 2012 |
A novel trapezoidal ScAlN/AlN-based MEMS piezoelectric accelerometer B Hu, Y Liu, B Lin, G Wu, W Liu, C Sun IEEE Sensors Journal 21 (19), 21277-21284, 2021 | 20 | 2021 |
AlN based piezoelectric micromachined ultrasonic transducers for continuous monitoring of the mechano-acoustic cardiopulmonary signals L Jia, L Shi, C Sun, S Liu, G Wu 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 19 | 2021 |