Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications Y Zou, C Gao, J Zhou, Y Liu, Q Xu, Y Qu, WJ Liu, JBW Soon, Y Cai, C Sun Microsystems & Nanoengineering 8 (1), 124, 2022 | 50 | 2022 |
Surface acoustic wave-based ultraviolet photodetectors: A review Y Zhang, Y Cai, J Zhou, Y Xie, Q Xu, Y Zou, S Guo, H Xu, C Sun, S Liu Science Bulletin 65 (7), 587-600, 2020 | 39 | 2020 |
Band structure, effective mass, and carrier mobility of few-layer h-AlN under layer and strain engineering Y Cai, Y Liu, Y Xie, Y Zou, C Gao, Y Zhao, S Liu, H Xu, J Shi, S Guo, ... APL Materials 8 (2), 2020 | 38 | 2020 |
A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing B Lin, Y Liu, Y Cai, J Zhou, Y Zou, Y Zhang, W Liu, C Sun IEEE Transactions on Electron Devices 68 (10), 5192-5197, 2021 | 21 | 2021 |
Design, fabrication, and characterization of aluminum scandium nitride-based thin film bulk acoustic wave filter Y Zou, Y Cai, C Gao, T Luo, Y Liu, Q Xu, Y Wang, L Nian, W Liu, ... Journal of Microelectromechanical Systems 32 (3), 263-270, 2023 | 18 | 2023 |
Dual-mode thin film bulk acoustic wave resonator and filter Y Zou, L Nian, Y Cai, Y Liu, A Tovstopyat, W Liu, C Sun Journal of Applied Physics 128 (19), 2020 | 18 | 2020 |
Dual-mode hybrid quasi-SAW/BAW resonators with high effective coupling coefficient Y Zhang, J Zhou, Y Xie, C Tang, Y Zou, A Tovstopyat, H Yu, C Sun IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 67 …, 2020 | 13 | 2020 |
Lithium niobate thin film based A3 mode resonators with high effective coupling coefficient of 6.72% Y Zhang, L Wang, Y Zou, Q Xu, J Liu, Q Wang, A Tovstopyat, W Liu, C Sun, ... 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 11 | 2021 |
Design and optimization of the dual-mode lamb wave resonator and dual-passband filter T Luo, Y Liu, Y Zou, J Zhou, W Liu, G Wu, Y Cai, C Sun Micromachines 13 (1), 87, 2022 | 9 | 2022 |
Investigation of film bulk acoustic resonators for sensing applications in liquid environment Y Zhou, Y Zou, C Gao, Q Xu, X Tong, B Lin, Y Liu, BW Soon, Y Cai, C Sun Applied Physics Letters 121 (21), 2022 | 8 | 2022 |
Investigation of modified Lamé mode resonator with high coupling coefficient J Zhou, J Liu, Y Zou, Y Cai, Y Zhang, Q Xu, X Tong, A Tovstopyat, S Guo, ... Journal of Applied Physics 127 (7), 2020 | 8 | 2020 |
AlN/Al0. 8Sc0. 2N film S mode lamb wave resonator with spurious mode suppression Q Xu, J Zhou, Y Liu, Y Zou, W Liu, Y Cai, C Sun Journal of Applied Physics 132 (8), 2022 | 7 | 2022 |
Influence of Etching Trench on K eff 2 of Film Bulk Acoustic Resonator C Gao, Y Zou, J Zhou, Y Liu, W Liu, Y Cai, C Sun Micromachines 13 (1), 102, 2022 | 7 | 2022 |
Aluminum nitride-based adjustable effective electromechanical coupling coefficient film bulk acoustic resonator Y Qu, T Luo, Z Wen, M Wei, X Gu, X Chen, Y Zou, Y Cai, Y Liu, C Sun Micromachines 14 (1), 157, 2023 | 6 | 2023 |
AlN Checker-mode Resonators with Routing Structures J Liu, J Zhou, Y Zou, C Gao, Y Xie, C Sun 2019 IEEE International Ultrasonics Symposium (IUS), 1727-1730, 2019 | 6 | 2019 |
Investigation of thermal annealing on the characteristics of ScxAl1− XN thin films C Gao, Y Cai, Y Zou, B Lin, T Yang, Y Wang, Y Liu, S Guo, C Sun Vacuum 219, 112669, 2024 | 5 | 2024 |
Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition B Lin, Y Cai, Y Wang, Y Zou, C Gao, Y Liu, W Liu, S Guo, C Sun Thin Solid Films 783, 140037, 2023 | 5 | 2023 |
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure Y Qu, X Gu, Y Zou, Z Wen, Y Cai, BW Soon, Y Liu, C Sun Journal of Microelectromechanical Systems 32 (2), 157-163, 2023 | 5 | 2023 |
Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible K eff 2 L Nian, Y Zou, C Gao, Y Zhou, Y Fan, J Wang, W Liu, Y Liu, JB Soon, ... Micromachines 13 (12), 2044, 2022 | 4 | 2022 |
Effects of electric bias on different SC-doped AlN-based film bulk acoustic resonators Y Wang, Y Zou, C Gao, X Gu, Y Ma, Y Liu, W Liu, JBW Soon, Y Cai, C Sun Electronics 11 (14), 2167, 2022 | 4 | 2022 |