| Soft modular robotic cubes: toward replicating morphogenetic movements of the embryo A Vergara, Y Lau, RF Mendoza-Garcia, JC Zagal PloS one 12 (1), e0169179, 2017 | 62 | 2017 |
| Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors A Vergara, T Tsukamoto, W Fang, S Tanaka Sensors and Actuators A: Physical 332, 113131, 2021 | 11 | 2021 |
| Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator A Vergara, T Tsukamoto, W Fang, S Tanaka Journal of Micromechanics and Microengineering 30 (11), 115020, 2020 | 11 | 2020 |
| Feedback controlled PZT micromirror with integrated buried piezoresistors A Vergara, T Tsukamoto, W Fang, S Tanaka 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 6 | 2022 |
| Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control A Vergara, T Tsukamoto, W Fang, S Tanaka Journal of Micromechanics and Microengineering 33 (1), 014001, 2022 | 3 | 2022 |
| PZT MEMS Actuator with Integrated Buried Piezoresistors for Position Control A Vergara, T Tsukamoto, W Fang, S Tanaka 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 3 | 2021 |
| Non-linear Behavior of pMUT for High Sound Pressure Generation W Fang, A Vergara, S Tanaka IEEJ Transactions on Sensors and Micromachines 144 (6), 149-155, 2024 | | 2024 |
| PZT Mems Tunable Liquid Lens with Integrated Piezoresistive Position Sensor Z Tang, L Soda, T Okatani, A Vergara, Y Suzuki, S Tanaka 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | | 2023 |
| PZT MEMS Varifocal Lens using Gel or Liquid as Optical Media Z Tang, L Soda, A Vergara, Y Suzuki, S Tanaka 「センサ・マイクロマシンと応用システム」 シンポジウム論文集 電気学会センサ・マイクロマシン部 …, 2022 | | 2022 |
| Piezoelectric MEMS actuator monolithically integrated with buried piezoresistors for position sensing A Vergara, T Tsukamoto, T Shuji, W Fang 「センサ・マイクロマシンと応用システム」 シンポジウム論文集 電気学会センサ・マイクロマシン部 …, 2020 | | 2020 |
| PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL A Vergara, T Tsukamoto, W Fang, S Tanaka The Proceedings of Conference of Tohoku Branch 2020.55, 181_paper, 2020 | | 2020 |
| Development of Piezoelectric/Piezoresistive Composite Actuator for Precise Position Control AVP Andrea Tohoku University, 0 | | |
| Investigation on Liquid Medium Integration for Piezoelectric Mems Tunable Liquid Lenses Z Tang, A Vergara, T Okatani, Y Suzuki, S Tanaka Available at SSRN 4821037, 0 | | |
Takashiro TsukamotoTohoku University在 mems.mech.tohoku.ac.jp 的电子邮件经过验证
