Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications Y Zou, C Gao, J Zhou, Y Liu, Q Xu, Y Qu, WJ Liu, JBW Soon, Y Cai, C Sun Microsystems & Nanoengineering 8 (1), 124, 2022 | 60 | 2022 |
Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes T Luo, Q Xu, Z Wen, Y Qu, J Zhou, B Lin, Y Cai, Y Liu, C Sun IEEE Electron Device Letters 44 (4), 574-577, 2023 | 14 | 2023 |
Aluminum nitride-based adjustable effective electromechanical coupling coefficient film bulk acoustic resonator Y Qu, T Luo, Z Wen, M Wei, X Gu, X Chen, Y Zou, Y Cai, Y Liu, C Sun Micromachines 14 (1), 157, 2023 | 9 | 2023 |
Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films L Nian, Y Qu, X Gu, T Luo, Y Xie, M Wei, Y Cai, Y Liu, C Sun Micromachines 14 (3), 557, 2023 | 8 | 2023 |
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure Y Qu, X Gu, Y Zou, Z Wen, Y Cai, BW Soon, Y Liu, C Sun Journal of Microelectromechanical Systems 32 (2), 157-163, 2023 | 8 | 2023 |
Development of temperature sensor based on AlN/ScAlN SAW resonators M Wei, Y Liu, Y Qu, X Gu, Y Wang, W Liu, Y Cai, S Guo, C Sun Electronics 12 (18), 3863, 2023 | 7 | 2023 |
Study of High-Q Laterally Excited Bulk Wave Resonator With Smaller Gap-Width Reflectors X Gu, Y Liu, Y Xie, Z Wen, Y Qu, W Liu, Y Cai, S Guo, C Sun IEEE Electron Device Letters 44 (8), 1344-1347, 2023 | 6 | 2023 |
Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films X Gu, Y Liu, Y Qu, L Li, Y Cai, J Ding, T Yu, S Guo, C Sun Composites Communications 38, 101502, 2023 | 6 | 2023 |
Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient Z Wen, Q Xu, J Liu, Y Qu, Y Liu, W Liu, BW Soon, Y Cai, C Sun Japanese Journal of Applied Physics 61 (11), 114001, 2022 | 6 | 2022 |
Advanced technologies of FBAR for tuning effective electromechanical coupling coefficient Y Qu, Y Liu, X Gu, M Wei, X Chen, X Huang, Z Liu, J Ding, Z Wen, Y Cai, ... Applied Physics Letters 124 (1), 2024 | 4 | 2024 |
Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band C Gao, Y Zheng, H Li, Y Ren, X Gu, X Huang, Y Wang, Y Qu, Y Liu, Y Cai, ... Sensors 24 (9), 2939, 2024 | 3 | 2024 |
Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications Z Wen, W Liu, M Zeng, X Tong, Y Qu, Y Liu, Y Cai, C Sun 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics …, 2024 | 2 | 2024 |
High Q-value Solid Mounted Resonator Based on Aluminum Nitride Film Y Qu, X Chen, X Gu, Z Wen, Y Cai, Y Liu, C Sun 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-3, 2023 | 2 | 2023 |
Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators X Gu, Y Liu, Y Qu, M Wei, X Chen, Y Wang, W Liu, B Pi, BW Soon, Y Cai, ... Composite Structures 340, 118203, 2024 | 1 | 2024 |
A Lamb Wave Resonator with Trapezoidal Interdigitated Electrodes X Chen, Y Qu, T Luo, X Gu, X Huang, Y Cai, S Guo, Y Liu, C Sun 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics …, 2024 | 1 | 2024 |
Adjustable effective electromechanical coupling of Lamb wave resonator using AlN/Sc0.096Al0.904N composite films X Chen, Y Liu, Y Qu, T Luo, X Gu, J Ding, X Huang, Y Cai, W Liu, S Guo, ... Japanese Journal of Applied Physics, 2024 | 1 | 2024 |
Design and Fabrication of 3.5 GHz Band-Pass Film Bulk Acoustic Resonator Filter Y Zhou, Y Zheng, Q Xu, Y Qu, Y Ren, X Huang, C Gao, Y Liu, S Guo, ... Micromachines 15 (5), 563, 2024 | 1 | 2024 |
A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes Z Wen, X Gu, Y Cai, T Luo, X Tong, W Liu, Y Qu, Y Liu, C Sun 2023 IEEE 18th International Conference on Nano/Micro Engineered and …, 2023 | 1 | 2023 |
A Way to Increase Q of FBARs Using Supporting Column Y Qu, Y Zou, C Gao, Z Wen, W Liu, Y Cai, C Sun 2021 IEEE International Ultrasonics Symposium (IUS), 1-3, 2021 | 1 | 2021 |
Novel AlN/ScAlN composite film SAW for achieving highly sensitive temperature sensors Y Qu, X Chen, Y Liu, S Wang, X Gu, M Wei, X Huang, Z Liu, J Ding, Z Wen, ... Sensors and Actuators A: Physical 381, 116079, 2025 | | 2025 |