| Direct growth of freestanding ZnO tetrapod networks for multifunctional applications in photocatalysis, UV photodetection, and gas sensing YK Mishra, G Modi, V Cretu, V Postica, O Lupan, T Reimer, I Paulowicz, ... ACS applied materials & interfaces 7 (26), 14303-14316, 2015 | 478 | 2015 |
| Thermally excited silicon microactuators W Riethmuller, W Benecke IEEE Transactions on Electron Devices 35 (6), 758-763, 1988 | 431 | 1988 |
| Process for manipulating microscopic, dielectric particles and a device therefor W Benecke, B Wagner, G Fuhr, R Hagedorn, T Muller US Patent 6,149,789, 2000 | 212 | 2000 |
| Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity G Fuhr, R Hagedorn, T Muller, W Benecke, B Wagner Journal of microelectromechanical systems 1 (3), 141-146, 1992 | 195 | 1992 |
| Method of continuously separating mixtures of microscopic dielectric particles and apparatus for carrying through this method W Benecke, B Wagner, R Hagedorn, G Fuhr, T Muller US Patent 5,454,472, 1995 | 193 | 1995 |
| A novel surface-micromachined capacitive porous silicon humidity sensor ZM Rittersma, A Splinter, A Bödecker, W Benecke Sensors and Actuators B: Chemical 68 (1-3), 210-217, 2000 | 192 | 2000 |
| TMAHW etchants for silicon micromachining U Schnakenberg, W Benecke, P Lange TRANSDUCERS'91: 1991 International Conference on Solid-State Sensors and …, 1991 | 189 | 1991 |
| Levitation, holding, and rotation of cells within traps made by high-frequency fields G Fuhr, WM Arnold, R Hagedorn, T Müller, W Benecke, B Wagner, ... Biochimica et Biophysica Acta (BBA)-Biomembranes 1108 (2), 215-223, 1992 | 177 | 1992 |
| Microfabricated actuator with moving permanent magnet B Wagner, W Benecke [1991] Proceedings. IEEE Micro Electro Mechanical Systems, 27-32, 1991 | 177 | 1991 |
| Single step integration of ZnO nano-and microneedles in Si trenches by novel flame transport approach: whispering gallery modes and photocatalytic properties T Reimer, I Paulowicz, R Roder, S Kaps, O Lupan, S Chemnitz, ... ACS applied materials & interfaces 6 (10), 7806-7815, 2014 | 163 | 2014 |
| NH4OH-based etchants for silicon micromachining U Schnakenberg, W Benecke, D Löchel Sensors and Actuators A: Physical 23 (1-3), 1031-1035, 1990 | 144 | 1990 |
| A high-temperature thermopile fabrication process for thermal flow sensors R Buchner, C Sosna, M Maiwald, W Benecke, W Lang Sensors and Actuators A: Physical 130, 262-266, 2006 | 129 | 2006 |
| Permanent magnet micromotors on silicon substrates B Wagner, M Kreutzer, W Benecke Journal of Microelectromechanical Systems 2 (1), 23-29, 1993 | 119 | 1993 |
| Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS YX Zhuang, O Hansen, T Knieling, C Wang, P Rombach, W Lang, ... Journal of Microelectromechanical Systems 16 (6), 1451-1460, 2007 | 102 | 2007 |
| Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction YX Zhuang, O Hansen, T Knieling, C Wang, P Rombach, W Lang, ... Journal of Micromechanics and Microengineering 16 (11), 2259, 2006 | 97 | 2006 |
| Linear motion of dielectric particles and living cells in microfabricated structures induced by traveling electric fields G Fuhr, R Hagedorn, T Muller, B Wagner, W Benecke [1991] Proceedings. IEEE Micro Electro Mechanical Systems, 259-264, 1991 | 97 | 1991 |
| Pumping of water solutions in microfabricated electrohydrodynamic systems G Fuhr, R Hagedorn, T Muller, W Benecke, B Wagner [1992] Proceedings IEEE Micro Electro Mechanical Systems, 25-30, 1992 | 90 | 1992 |
| Applications of silicon microactuators based on bimorph structures W Benecke, W Riethmuller IEEE Micro Electro Mechanical Systems,, Proceedings,'An Investigation of …, 1989 | 88 | 1989 |
| A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process W Riethmüller, W Benecke, U Schnakenberg, B Wagner Sensors and Actuators A: Physical 31 (1-3), 121-124, 1992 | 86 | 1992 |
| NH4OH-based etchants for silicon micromachining: influence of additives and stability of passivation layers U Schnakenberg, W Benecke, B Löchel, S Ullerich, P Lange Sensors and Actuators A: Physical 25 (1-3), 1-7, 1990 | 82 | 1990 |
