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Matthias Petzold
Matthias Petzold
Fraunhofer Institut for Microstructure of Materials and Systems
在 imws.fraunhofer.de 的电子邮件经过验证
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引用次数
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年份
Handbook of silicon based MEMS materials and technologies
M Tilli, M Paulasto-Kröckel, M Petzold, H Theuss, T Motooka, V Lindroos
Elsevier, 2020
6792020
The influence of different fluoride compounds and treatment conditions on dental enamel: a descriptive in vitro study of the CaF2 precipitation and microstructure
M Petzold
Caries research 35 (Suppl. 1), 45-51, 2001
1792001
On the intermetallic corrosion of Cu-Al wire bonds
T Boettcher, M Rother, S Liedtke, M Ullrich, M Bollmann, A Pinkernelle, ...
2010 12th Electronics Packaging Technology Conference, 585-590, 2010
1072010
Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology
B Boettge, J Braeuer, M Wiemer, M Petzold, J Bagdahn, T Gessner
Journal of Micromechanics and Microengineering 20 (6), 064018, 2010
852010
Claudin‐16 deficiency impairs tight junction function in ameloblasts, leading to abnormal enamel formation
C Bardet, F Courson, Y Wu, M Khaddam, B Salmon, S Ribes, J Thumfart, ...
Journal of Bone and Mineral Research 31 (3), 498-513, 2016
642016
Automated inspection and classification of flip-chip-contacts using scanning acoustic microscopy
S Brand, P Czurratis, P Hoffrogge, M Petzold
Microelectronics Reliability 50 (9-11), 1469-1473, 2010
582010
3D sensor application with open through silicon via technology
J Kraft, F Schrank, J Teva, J Siegert, G Koppitsch, C Cassidy, ...
2011 IEEE 61st Electronic Components and Technology Conference (ECTC), 560-566, 2011
532011
Extending acoustic microscopy for comprehensive failure analysis applications
S Brand, P Czurratis, P Hoffrogge, D Temple, D Malta, J Reed, M Petzold
Journal of Materials Science: Materials in Electronics 22, 1580-1593, 2011
452011
Characterization of thermo-mechanical stress and reliability issues for Cu-filled TSVs
D Malta, C Gregory, M Lueck, D Temple, M Krause, F Altmann, M Petzold, ...
2011 IEEE 61st Electronic Components and Technology Conference (ECTC), 1815-1821, 2011
422011
Strain relaxation in nanopatterned strained silicon round pillars
C Himcinschi, R Singh, I Radu, AP Milenin, W Erfurth, M Reiche, U Gösele, ...
Applied physics letters 90 (2), 2007
422007
Mechanical fatigue properties of heavy aluminium wire bonds for power applications
L Merkle, T Kaden, M Sonner, A Gademann, J Turki, C Dresbach, ...
2008 2nd Electronics System-Integration Technology Conference, 1363-1368, 2008
412008
Application of atomic force microscopy for microindentation testing
M Petzold, J Landgraf, M Füting, JM Olaf
Thin Solid Films 264 (2), 153-158, 1995
411995
Surface oxide films on Aluminum bondpads: Influence on thermosonic wire bonding behavior and hardness
M Petzold, L Berthold, D Katzer, H Knoll, D Memhard, P Meier, KD Lang
Microelectronics Reliability 40 (8-10), 1515-1520, 2000
402000
Fracture toughness and fatigue investigations of polycrystalline silicon
J Bagdahn, J Schischka, M Petzold, WN Sharpe Jr
Reliability, testing, and characterization of MEMS/MOEMS 4558, 159-168, 2001
342001
Innovative failure analysis techniques for 3-D packaging developments
F Altmann, M Petzold
IEEE Design & Test 33 (3), 46-55, 2016
332016
Scanning acoustic gigahertz microscopy for metrology applications in three-dimensional integration technologies
S Brand, A Lapadatu, T Djuric, P Czurratis, J Schischka, M Petzold
Journal of Micro/Nanolithography, MEMS, and MOEMS 13 (1), 011207-011207, 2014
332014
Characterization and failure analysis of TSV interconnects: From non-destructive defect localization to material analysis with nanometer resolution
M Krause, F Altmann, C Schmidt, M Petzold, D Malta, D Temple
2011 IEEE 61st Electronic Components and Technology Conference (ECTC), 1452-1458, 2011
272011
Micro structure analysis for system in package components―Novel tools for fault isolation, target preparation, and high-resolution material diagnostics
M Petzold, F Altmann, M Krause, R Salzer, C Schmidt, S Martens, W Mack, ...
2010 Proceedings 60th Electronic Components and Technology Conference (ECTC …, 2010
272010
Strength assessment of wafer-bonded micromechanical components using the micro-chevron test
M Petzold, H Knoll, J Bagdahn
Reliability, Testing, and Characterization of MEMS/MOEMS 4558, 133-142, 2001
262001
Characterization of directly bonded silicon wafers by means of the double cantilever crack opening method
J Bagdahn, M Petzold, M Reiche, K Gutjahr
Proceedings of the Fourth International Symposium on Semiconductor Wafer …, 1998
251998
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