| Mechanical characterization of polysilicon MEMS: A hybrid TMCMC/POD-kriging approach R Mirzazadeh, S Eftekhar Azam, S Mariani Sensors 18 (4), 1243, 2018 | 37 | 2018 |
| Micromechanical characterization of polysilicon films through on-chip tests R Mirzazadeh, S Eftekhar Azam, S Mariani Sensors 16 (8), 1191, 2016 | 31 | 2016 |
| Uncertainty quantification of microstructure—Governed properties of polysilicon MEMS R Mirzazadeh, S Mariani Micromachines 8 (8), 248, 2017 | 25 | 2017 |
| On-Chip testing: A miniaturized lab to assess sub-micron uncertainties in polysilicon MEMS S Mariani, A Ghisi, R Mirzazadeh, SE Azam Micro and Nanosystems 10 (2), 84-93, 2018 | 14 | 2018 |
| Statistical investigation of the mechanical and geometrical properties of polysilicon films through on-chip tests R Mirzazadeh, A Ghisi, S Mariani Micromachines 9 (2), 53, 2018 | 12 | 2018 |
| Assessment of overetch and polysilicon film properties through on-chip tests R Mirzazadeh, A Ghisi, S Mariani Proceedings of the 2nd International Electronic Conference on Sensors and …, 2015 | 9 | 2015 |
| Fluid damping in compliant, comb-actuated torsional micromirrors R Mirzazadeh, S Mariani, A Ghisi, M De Fazio 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics …, 2014 | 9 | 2014 |
| Modeling of fluid damping in resonant micro-mirrors with out-of-plane comb-drive actuation R Mirzazadeh, S Mariani, M De Fazio Proceedings of the 1st International Electronic Conference on Sensors and …, 2014 | 8 | 2014 |
| Assessment of micromechanically-induced uncertainties in the electromechanical response of MEMS devices R Mirzazadeh, S Mariani Proceedings 1 (2), 39, 2016 | 6 | 2016 |
| Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling R Mirzazadeh, SE Azam, E Jansen, S Mariani 2017 18th International Conference on Thermal, Mechanical and Multi-Physics …, 2017 | 5 | 2017 |
| Estimation of air damping in out-of-plane comb-drive actuators R Mirzazadeh, S Mariani Micromachines 10 (4), 263, 2019 | 4 | 2019 |
| Micromechanical characterization of polysilicon films: on-chip testing, multi-uncertainty quantification and Bayesian inverse modelling R MIRZAZADEH Politecnico di Milano, 2017 | 3 | 2017 |
| PE-ALD ALE S Mariani, A Ghisi, R Mirzazadeh, SE Azam Synthesis 10 (2), 102, 2018 | | 2018 |
| Multiphysics simulation of electrostatically actuated micromirrors in viscous medium R Mirzazadeh Politecnico di Milano, 2012 | | 2012 |
| Micromechanical modeling of brittle polycrystalline films S Mariani, A Ghisi, R Mirzazadeh | | |
