High power pulsed magnetron sputtering: A review on scientific and engineering state of the art K Sarakinos, J Alami, S Konstantinidis Surface and coatings technology 204 (11), 1661-1684, 2010 | 1212 | 2010 |
An introduction to thin film processing using high-power impulse magnetron sputtering D Lundin, K Sarakinos Journal of Materials Research 27 (5), 780-792, 2012 | 344 | 2012 |
On the deposition rate in a high power pulsed magnetron sputtering discharge J Alami, K Sarakinos, G Mark, M Wuttig Applied physics letters 89 (15), 2006 | 211 | 2006 |
On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering J Alami, K Sarakinos, F Uslu, M Wuttig Journal of Physics D: Applied Physics 42 (1), 015304, 2008 | 186 | 2008 |
Process characteristics and film properties upon growth of TiOx films by high power pulsed magnetron sputtering K Sarakinos, J Alami, M Wuttig Journal of Physics D: Applied Physics 40 (7), 2108, 2007 | 173 | 2007 |
High power pulsed magnetron sputtering: Fundamentals and applications J Alami, S Bolz, K Sarakinos Journal of Alloys and Compounds 483 (1-2), 530-534, 2009 | 160 | 2009 |
A strategy for increased carbon ionization in magnetron sputtering discharges A Aijaz, K Sarakinos, D Lundin, N Brenning, U Helmersson Diamond and related materials 23, 1-4, 2012 | 129 | 2012 |
Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films K Sarakinos, A Braun, C Zilkens, S Mráz, JM Schneider, H Zoubos, ... Surface and Coatings Technology 206 (10), 2706-2710, 2012 | 122 | 2012 |
High power impulse magnetron sputtering: fundamentals, technologies, challenges and applications D Lundin, T Minea, JT Gudmundsson Elsevier, 2019 | 117 | 2019 |
Process stabilization and enhancement of deposition rate during reactive high power pulsed magnetron sputtering of zirconium oxide K Sarakinos, J Alami, C Klever, M Wuttig Surface and Coatings Technology 202 (20), 5033-5035, 2008 | 108 | 2008 |
Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides M Aiempanakit, T Kubart, P Larsson, K Sarakinos, J Jensen, ... Thin Solid Films 519 (22), 7779-7784, 2011 | 104 | 2011 |
A kinetic model for stress generation in thin films grown from energetic vapor fluxes E Chason, M Karlson, JJ Colin, D Magnfält, K Sarakinos, G Abadias Journal of Applied Physics 119 (14), 2016 | 90 | 2016 |
Atom insertion into grain boundaries and stress generation in physically vapor deposited films D Magnfält, G Abadias, K Sarakinos Applied Physics Letters 103 (5), 2013 | 82 | 2013 |
Growth of Ti-C nanocomposite films by reactive high power impulse magnetron sputtering under industrial conditions M Samuelsson, K Sarakinos, H Högberg, E Lewin, U Jansson, ... Surface and Coatings Technology 206 (8-9), 2396-2402, 2012 | 75 | 2012 |
On the phase formation of titanium oxide films grown by reactive high power pulsed magnetron sputtering J Alami, K Sarakinos, F Uslu, C Klever, J Dukwen, M Wuttig Journal of Physics D: Applied Physics 42 (11), 115204, 2009 | 71 | 2009 |
Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films D Magnfält, A Fillon, RD Boyd, U Helmersson, K Sarakinos, G Abadias Journal of Applied Physics 119 (5), 2016 | 60 | 2016 |
On the phase formation of sputtered hafnium oxide and oxynitride films K Sarakinos, D Music, S Mráz, K Jiang, F Nahif, A Braun, C Zilkens, ... Journal of Applied Physics 108 (1), 2010 | 52 | 2010 |
Formation and morphological evolution of self-similar 3D nanostructures on weakly interacting substrates B Lü, GA Almyras, V Gervilla, JE Greene, K Sarakinos Physical Review Materials 2 (6), 063401, 2018 | 46 | 2018 |
Ab initio study of effects of substitutional additives on the phase stability of γ-alumina K Jiang, D Music, K Sarakinos, JM Schneider Journal of physics: Condensed matter 22 (50), 505502, 2010 | 46 | 2010 |
Ionized physical vapor deposited Al2O3 films: Does subplantation favor formation of α‐Al2O3? K Sarakinos, D Music, F Nahif, K Jiang, A Braun, C Zilkens, JM Schneider physica status solidi (RRL)–Rapid Research Letters 4 (7), 154-156, 2010 | 46 | 2010 |