Resonant microelectromechanical receiver A Kochhar, ME Galanko, M Soliman, H Abdelsalam, L Colombo, YC Lin, ... Journal of Microelectromechanical Systems 28 (3), 327-343, 2019 | 37 | 2019 |
Sidewall metallization on CMOS MEMS by platinum ALD patterning YC Lin, VPJ Chung, S Santhanam, T Mukherjee, GK Fedder Journal of Microelectromechanical Systems 29 (5), 978-983, 2020 | 10 | 2020 |
Stress-and-temperature-induced drift compensation on a high dynamic range accelerometer array using deep neural networks VPJ Chung, YC Lin, X Li, MG Guney, J Paramesh, T Mukherjee, ... 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 6 | 2021 |
High-g capacitive accelerometer arrays with low bias instability GK Fedder, VPJ Chung, MG Guney, X Li, YC Lin, S Santhanam, ... 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS), 9-15, 2020 | 6 | 2020 |
ALD titania sidewalls on a CMOS-MEMS resonator oscillator and effects on Resonant frequency drift YC Lin, MG Guney, GK Fedder 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019 | 4 | 2019 |
Lateral flexure contact on CMOS MEMS electrothermal metal-metal contact switch by platinum ALD sidewall patterning YC Lin, S Yen, T Mukherjee, GK Fedder 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 2 | 2021 |
A SINGLE-CRYSTAL SILICON RESONATOR FOR AM DEMODULATION WITH ADDED SECONDHARMONIC MODULATION ME Galanko, YC Lin, T Mukherjee, GK Fedder 2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 346-349, 2018 | 2 | 2018 |
Patterned ALD sidewall metallization on CMOS MEMS and applications YC Lin Carnegie Mellon University, 2022 | | 2022 |
Improvement of thin film tensile testing technology using process integrated specimen and considering its out-of-plane deformation YC Lin, CL Cheng, W Fang 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | | 2015 |