| Power MEMS and microengines AH Epstein, SD Senturia, G Anathasuresh, A Ayon, K Breuer, KS Chen, ... Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 312 | 1997 |
| Micro-heat engines, gas turbines, and rocket engines-The MIT microengine project A Epstein, S Senturia, O Al-Midani, G Anathasuresh, A Epstein, S Senturia, ... 28th Fluid dynamics conference, 1773, 1997 | 274 | 1997 |
| Microturbomachinery AH Epstein, SD Senturia, IA Waitz, JH Lang, SA Jacobson, FF Ehrich, ... US Patent 5,932,940, 1999 | 187 | 1999 |
| Microturbomachinery AH Epstein, SD Senturia, IA Waitz, JH Lang, SA Jacobson, FF Ehrich, ... US Patent 6,392,313, 2002 | 131 | 2002 |
| Fast-scanning SPM and method of operating same C Prater, C Su, N Phan, JM Markakis, C Cusworth, J Shi, JH Kindt, ... US Patent 7,770,231, 2010 | 116 | 2010 |
| Process for fabricating MEMS membrane with integral mirror/lens DC Flanders, SF Nagle, MB Stern US Patent 7,208,333, 2007 | 108 | 2007 |
| An electrostatic induction micromotor supported on gas-lubricated bearings LG Frechette, SF Nagle, R Ghodssi, SD Umans, MA Schmidt, JH Lang Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001 | 108 | 2001 |
| An electric induction micromotor SF Nagle, C Livermore, LG Frechette, R Ghodssi, JH Lang Journal of microelectromechanical systems 14 (5), 1127-1143, 2005 | 70 | 2005 |
| Characterization of silicon wafer bonding for power MEMS applications AA Ayon, X Zhang, KT Turner, D Choi, B Miller, SF Nagle, SM Spearing Sensors and Actuators A: Physical 103 (1-2), 1-8, 2003 | 59 | 2003 |
| Tailoring etch directionality in a deep reactive ion etching tool AA Ayon, S Nagle, L Frechette, A Epstein, MA Schmidt Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 49 | 2000 |
| Thick buried oxide in silicon (TBOS): an integrated fabrication technology for multi-stack wafer-bonded MEMS processes R Ghodssi, LG Frechette, SF Nagle, X Zhang, AA Ayon, SD Senturia, ... Proc. 10th Int. Conf. on Solid-State Sensors and Actuators (Tansducers’ 99 …, 1999 | 37 | 1999 |
| Modal structures for axial wave propagation in a continuously twisted structurally chiral medium SF Nagle, A Lakhtakia, W Thompson Jr The Journal of the Acoustical Society of America 97 (1), 42-50, 1995 | 28 | 1995 |
| A micro-scale electric-induction machine for a micro gas turbine generator SF Nagle, JH Lang 27th Annual Meeting of the Electrostatics Society of America, 1999 | 24 | 1999 |
| Process for integrating dielectric optical coatings into micro-electromechanical devices MF Miller, M Van Le, CC Cook, DC Flanders, SF Nagle US Patent 6,790,698, 2004 | 23 | 2004 |
| Reentrant-walled optical system template and process for optical system fabrication using same X Wang, PS Whitney, SF Nagle, DC Flanders US Patent 6,643,075, 2003 | 22 | 2003 |
| Analysis, design, and fabrication of an electric induction micromotor for a micro gas-turbine generator SF Nagle Massachusetts Institute of Technology, 2000 | 19 | 2000 |
| MEMS membrane with integral mirror/lens DC Flanders, SF Nagle, MB Stern US Patent 6,768,756, 2004 | 18 | 2004 |
| Shear axial modes in a PCTSCM Part I: piezoelectric stiffening and selective attenuation SF Nagle, A Lakhtakia Sensors and Actuators A: Physical 49 (3), 195-201, 1995 | 17 | 1995 |
| Probe device for a metrology instrument and method of fabricating the same W Fan, SF Nagle US Patent 7,823,216, 2010 | 16 | 2010 |
| Attenuation and handedness of axial propagation modes in a cholesteric liquid crystal SF Nagle, A Lakhtakia Microwave and Optical Technology Letters 7 (16), 749-752, 1994 | 13 | 1994 |
