| Directed self-assembly and pattern transfer of five nanometer block copolymer lamellae AP Lane, XM Yang, MJ Maher, G Blachut, Y Asano, Y Someya, ... ACS nano 11 (8), 7656-7665, 2017 | 128 | 2017 |
| Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures SV Sreenivasan, A Cherala, M Chopra, R Bonnecaze, O Abed, B Yin, ... US Patent 10,026,609, 2018 | 54 | 2018 |
| Ruthenium-assisted chemical etching of silicon: Enabling CMOS-compatible 3D semiconductor device nanofabrication A Mallavarapu, P Ajay, C Barrera, SV Sreenivasan ACS Applied Materials & Interfaces 13 (1), 1169-1177, 2020 | 32 | 2020 |
| Enabling ultrahigh-aspect-ratio silicon nanowires using precise experiments for detecting the onset of collapse A Mallavarapu, P Ajay, SV Sreenivasan Nano Letters 20 (11), 7896-7905, 2020 | 27 | 2020 |
| Fabricating large area multi-tier nanostructures SV Sreenivasan, P Joseph, O Abed, M Grigas, A Mallavarapu, P Ajay US Patent 9,941,389, 2018 | 25 | 2018 |
| Nanoshape imprint lithography for fabrication of nanowire ultracapacitors A Cherala, M Chopra, B Yin, A Mallavarapu, S Singhal, O Abed, ... IEEE Transactions on Nanotechnology 15 (3), 448-456, 2016 | 19 | 2016 |
| Scalable fabrication and metrology of silicon nanowire arrays made by metal assisted chemical etch A Mallavarapu, B Gawlik, M Grigas, M Castañeda, O Abed, MPC Watts, ... IEEE Transactions on Nanotechnology 20, 83-91, 2020 | 16 | 2020 |
| Catalyst influenced chemical etching for fabricating three-dimensional SRAM architectures SV Sreenivasan, A Mallavarapu, J Kulkarni, M Watts, S Banerjee US Patent 11,355,397, 2022 | 10 | 2022 |
| Spectral imaging and computer vision for high-throughput defect detection and root-cause analysis of silicon nanopillar arrays B Gawlik, AR Barr, A Mallavarapu, ET Yu, SV Sreenivasan Journal of Micro-and Nano-Manufacturing 9 (1), 010904, 2021 | 6 | 2021 |
| Metal Assisted Chemical Etch of Polycrystalline Silicon C Barrera, P Ajay, A Mallavarapu, M Hrdy, SV Sreenivasan Journal of Micro-and Nano-Manufacturing 10 (2), 021002, 2022 | 4 | 2022 |
| Large area metrology and process control for anisotropic chemical etching SV Sreenivasan, A Mallavarapu, JG Ekerdt, MA Grigas, Z Ghaznavi, ... US Patent App. 17/433,777, 2022 | 4 | 2022 |
| Processes and applications for catalyst influenced chemical etching SV Sreenivasan, P Ajay, A Mallavarapu, C Barrera US Patent App. 18/010,456, 2023 | 2 | 2023 |
| Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques M Hrdy, A Mallavarapu, M Castañeda, P Ajay, SV Sreenivasan Journal of Micro and Nano-Manufacturing 11 (1), 2023 | 2 | 2023 |
| TiO2 Metasurfaces with Visible Quasi-Guided Mode Resonances via Direct Imprinting of Aqueous Nanocrystal Dispersions A Mallavarapu, CFK Lawrence, B Huang, BOT Maldonado, P Arratia, ... ACS Applied Nano Materials 6 (18), 17294-17300, 2023 | 1 | 2023 |
| Effect of initial conditions on uniformity of metal assisted chemical etch for ultra-high aspect ratio, taper-free silicon nanostructures A Mallavarapu, M Hrdy, M Castaneda, P Ajay, SV Sreenivasan Advanced Etch Technology and Process Integration for Nanopatterning XI …, 2022 | 1 | 2022 |
| Ruthenium catalyst processing and oxidation for scalable complementary metal-oxide-semiconductor-compatible metal-assisted chemical etch M Hrdy, A Mallavarapu, RL Galindo, SV Sreenivasan Journal of Micro/Nanopatterning, Materials, and Metrology 23 (4), 043601-043601, 2024 | | 2024 |
| Nanoparticle Ink Based Patterning Of Inorganic Materials A Mallavarapu, CFK Lawrence, CR Kagan US Patent App. 18/483,862, 2024 | | 2024 |
| Equipment and process technologies for catalyst influenced chemical etching SV Sreenivasan, A Mallavarapu, P Ajay US Patent App. 18/034,611, 2023 | | 2023 |
| Nanofabrication of deterministic diagnostic devices SV Sreenivasan, A Mehboudi, A Mallavarapu, P Ajay, RML Galindo, ... US Patent App. 18/018,546, 2023 | | 2023 |
| Nanofabrication of collapse-free high aspect ratio nanostructures SV Sreenivasan, A Mallavarapu, P Ajay, M Castaneda, C Barrera US Patent App. 17/923,473, 2023 | | 2023 |
S.V. SreenivasanUniversity of Texas at Austin在 mail.utexas.edu 的电子邮件经过验证
