| Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications E Iborra, J Olivares, M Clement, L Vergara, A Sanz-Hervás, J Sangrador Sensors and Actuators A: Physical 115 (2-3), 501-507, 2004 | 158 | 2004 |
| SAW characteristics of AlN films sputtered on silicon substrates M Clement, L Vergara, J Sangrador, E Iborra, A Sanz-Hervás Ultrasonics 42 (1-9), 403-407, 2004 | 133 | 2004 |
| Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films M Clement, E Iborra, J Sangrador, A Sanz-Hervás, L Vergara, M Aguilar Journal of Applied Physics 94 (3), 1495-1500, 2003 | 133 | 2003 |
| Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) x-ray diffraction peaks A Sanz-Hervás, M Clement, E Iborra, L Vergara, J Olivares, J Sangrador Applied Physics Letters 88 (16), 2006 | 106 | 2006 |
| IR uncooled bolometers based on amorphous Ge/sub x/Si/sub 1-x/O/sub y/on silicon micromachined structures E Iborra, M Clement, LV Herrero, J Sangrador Journal of microelectromechanical systems 11 (4), 322-329, 2002 | 91 | 2002 |
| Influence of crystal properties on the absorption IR spectra of polycrystalline AlN thin films A Sanz-Hervás, E Iborra, M Clement, J Sangrador, M Aguilar Diamond and related materials 12 (3-7), 1186-1189, 2003 | 79 | 2003 |
| Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films L Vergara, M Clement, E Iborra, A Sanz-Hervás, JG López, Y Morilla, ... Diamond and related materials 13 (4-8), 839-842, 2004 | 73 | 2004 |
| Piezoelectric actuation of microbridges using AlN J Olivares, E Iborra, M Clement, L Vergara, J Sangrador, A Sanz-Hervás Sensors and Actuators A: Physical 123, 590-595, 2005 | 70 | 2005 |
| AlN-based BAW resonators with CNT electrodes for gravimetric biosensing L García-Gancedo, Z Zhu, E Iborra, M Clement, J Olivares, AJ Flewitt, ... Sensors and Actuators B: Chemical 160 (1), 1386-1393, 2011 | 69 | 2011 |
| Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films L Vergara, J Olivares, E Iborra, M Clement, A Sanz-Hervás, J Sangrador Thin Solid Films 515 (4), 1814-1818, 2006 | 63 | 2006 |
| Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy J Olivares, S González-Castilla, M Clement, A Sanz-Hervás, L Vergara, ... Diamond and related materials 16 (4-7), 1421-1424, 2007 | 62 | 2007 |
| Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator M DeMiguel-Ramos, B Díaz-Durán, JM Escolano, M Barba, T Mirea, ... Sensors and Actuators B: Chemical 239, 1282-1288, 2017 | 59 | 2017 |
| Discrete microfluidics based on aluminum nitride surface acoustic wave devices J Zhou, HF Pang, L Garcia-Gancedo, E Iborra, M Clement, ... Microfluidics and Nanofluidics 18, 537-548, 2015 | 58 | 2015 |
| Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices E Iborra, M Clement, J Sangrador, A Sanz-Hervás, L Vergara, M Aguilar IEEE transactions on ultrasonics, ferroelectrics, and frequency control 51 …, 2004 | 58 | 2004 |
| Anisotropic magnetotransport in SrTiO surface electron gases generated by Ar irradiation FY Bruno, J Tornos, M Gutierrez del Olmo, G Sánchez Santolino, ... Physical Review B—Condensed Matter and Materials Physics 83 (24), 245120, 2011 | 50 | 2011 |
| Sputtered SiO2 as Low Acoustic Impedance Material for Bragg Mirror Fabication in BAW Resonators LVRA J. Olivares, E. Wegmann, J. Capilla, E. Iborra, M. Clement IEEE Transactions of Ultrasonics, Ferroelectrics and Frequency Control 57 (1 …, 2010 | 49* | 2010 |
| AlN films sputtered on iridium electrodes for bulk acoustic wave resonators M Clement, J Olivares, E Iborra, S González-Castilla, N Rimmer, ... Thin Solid Films 517 (16), 4673-4678, 2009 | 44 | 2009 |
| Comparative study of c-axis AlN films sputtered on metallic surfaces A Sanz-Hervas, L Vergara, J Olivares, E Iborra, Y Morilla, J Garcia-Lopez, ... Diamond and related materials 14 (3-7), 1198-1202, 2005 | 42 | 2005 |
| Aluminum nitride for heatspreading in RF IC’s L La Spina, E Iborra, H Schellevis, M Clement, J Olivares, LK Nanver Solid-state electronics 52 (9), 1359-1363, 2008 | 40 | 2008 |
| High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors J Capilla, J Olivares, M Clement, J Sangrador, E Iborra, A Devos IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59 …, 2012 | 34 | 2012 |
