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Riikka Puurunen
Riikka Puurunen
在 aalto.fi 的电子邮件经过验证 - 首页
标题
引用次数
引用次数
年份
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
RL Puurunen
Journal of applied physics 97 (12), 9, 2005
34172005
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
V Miikkulainen, M Leskelä, M Ritala, RL Puurunen
Journal of Applied Physics 113 (2), 2, 2013
16612013
Conformality in atomic layer deposition: Current status overview of analysis and modelling
V Cremers, RL Puurunen, J Dendooven
Applied Physics Reviews 6 (2), 021302, 2019
3992019
Island growth as a growth mode in atomic layer deposition: A phenomenological model
RL Puurunen, W Vandervorst
Journal of Applied Physics 96 (12), 7686-7695, 2004
3862004
Island growth as a growth mode in atomic layer deposition: A phenomenological model
RL Puurunen, W Vandervorst
Journal of Applied Physics 96 (12), 7686-7695, 2004
3862004
A short history of atomic layer deposition: Tuomo Suntola's atomic layer epitaxy
RL Puurunen
Chemical Vapor Deposition 20 (10-11-12), 332-344, 2014
3342014
Growth per cycle in atomic layer deposition: a theoretical model
RL Puurunen
Chemical Vapor Deposition 9 (5), 249-257, 2003
2512003
Spectroscopic study on the irreversible deactivation of chromia/alumina dehydrogenation catalysts
RL Puurunen, BM Weckhuysen
Journal of Catalysis 210 (2), 418-430, 2002
2042002
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
OME Ylivaara, X Liu, L Kilpi, J Lyytinen, D Schneider, M Laitinen, J Julin, ...
Thin Solid Films 552, 124-135, 2014
2032014
Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy
RL Puurunen, W Vandervorst, WFA Besling, O Richard, H Bender, ...
Journal of applied physics 96 (9), 4878-4889, 2004
2002004
Growth Per Cycle in Atomic Layer Deposition: Real Application Examplesof a Theoretical Model
RL Puurunen
Chemical Vapor Deposition 9 (6), 327-332, 2003
1372003
Atomic layer deposition of hafnium oxide on germanium substrates
A Delabie, RL Puurunen, B Brijs, M Caymax, T Conard, B Onsia, ...
Journal of applied physics 97 (6), 064104, 2005
1352005
Successive reactions of gaseous trimethylaluminium and ammonia on porous alumina
RL Puurunen, M Lindblad, A Root, AOI Krause
Physical Chemistry Chemical Physics 3 (6), 1093-1102, 2001
1232001
Correlation between the growth-per-cycle and the surface hydroxyl group concentration in the atomic layer deposition of aluminum oxide from trimethylaluminum and water
RL Puurunen
Applied surface science 245 (1-4), 6-10, 2005
1162005
Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
E Ahvenniemi, AR Akbashev, S Ali, M Bechelany, M Berdova, S Boyadjiev, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (1 …, 2017
1152017
Analysis of hydroxyl group controlled atomic layer deposition of hafnium dioxide from hafnium tetrachloride and water
RL Puurunen
Journal of applied physics 95 (9), 4777-4786, 2004
1032004
Implementing ALD layers in MEMS processing
RL Puurunen, J Saarilahti, H Kattelus
ECS Transactions 11 (7), 3, 2007
1012007
IR and NMR study of the chemisorption of ammonia on trimethylaluminum-modified silica
RL Puurunen, A Root, S Haukka, EI Iiskola, M Lindblad, AOI Krause
The Journal of Physical Chemistry B 104 (28), 6599-6609, 2000
1012000
Formation of metal oxide particles in atomic layer deposition during the chemisorption of metal chlorides: a review
RL Puurunen
Chemical Vapor Deposition 11 (2), 79-90, 2005
922005
Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
M Putkonen, M Bosund, OME Ylivaara, RL Puurunen, L Kilpi, ...
Thin Solid Films 558, 93-98, 2014
912014
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