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Rim Toukabri
Rim Toukabri
PDF at IQST, University of Calgary
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Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor
Y Shi, X Li, L Tong, R Toukabri, B Eustergerling
Physical Chemistry Chemical Physics 10 (18), 2543-2551, 2008
312008
Effect of Si–H bond on the gas-phase chemistry of trimethylsilane in the hot wire chemical vapor deposition process
YJ Shi, XM Li, R Toukabri, L Tong
The Journal of Physical Chemistry A 115 (37), 10290-10298, 2011
242011
Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor deposition
R Toukabri, Y Shi
Physical Chemistry Chemical Physics 16 (17), 7896-7906, 2014
212014
Formation of methyl radicals from decomposition of methyl-substituted silanes over tungsten and tantalum filament surfaces
R Toukabri, N Alkadhi, YJ Shi
The Journal of Physical Chemistry A 117 (33), 7697-7704, 2013
212013
Dominance of silylene chemistry in the decomposition of monomethylsilane in the presence of a heated metal filament
R Toukabri, YJ Shi
The Journal of Physical Chemistry A 118 (22), 3866-3874, 2014
142014
Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry
R Toukabri, Y Shi
Journal of Vacuum Science & Technology A 31 (6), 2013
92013
Effect of pressure on the gas-phase chemistry when using monomethylsilane and dimethylsilane in hot-wire chemical vapor deposition
R Toukabri, Y Shi
Canadian Journal of Chemistry 93 (1), 82-90, 2015
52015
Hydrogen elimination from the dissociation of methyl-substituted silanes on tungsten and tantalum surfaces
R Toukabri, YJ Shi
Canadian Journal of Chemistry 94 (4), 265-272, 2015
32015
Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process
R Toukabri
Gas 2013, 08-27, 2013
22013
Unraveling the complex chemical vapor deposition chemistry using laser ionization mass spectrometry
Y Shi, R Toukabri
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 248, 2014
2014
In-situ identification of reactive species using dimethylsilane in a hot-wire chemical vapour deposition process
R Toukabri, Y Shi
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 245, 2013
2013
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