Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor Y Shi, X Li, L Tong, R Toukabri, B Eustergerling Physical Chemistry Chemical Physics 10 (18), 2543-2551, 2008 | 31 | 2008 |
Effect of Si–H bond on the gas-phase chemistry of trimethylsilane in the hot wire chemical vapor deposition process YJ Shi, XM Li, R Toukabri, L Tong The Journal of Physical Chemistry A 115 (37), 10290-10298, 2011 | 24 | 2011 |
Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor deposition R Toukabri, Y Shi Physical Chemistry Chemical Physics 16 (17), 7896-7906, 2014 | 21 | 2014 |
Formation of methyl radicals from decomposition of methyl-substituted silanes over tungsten and tantalum filament surfaces R Toukabri, N Alkadhi, YJ Shi The Journal of Physical Chemistry A 117 (33), 7697-7704, 2013 | 21 | 2013 |
Dominance of silylene chemistry in the decomposition of monomethylsilane in the presence of a heated metal filament R Toukabri, YJ Shi The Journal of Physical Chemistry A 118 (22), 3866-3874, 2014 | 14 | 2014 |
Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry R Toukabri, Y Shi Journal of Vacuum Science & Technology A 31 (6), 2013 | 9 | 2013 |
Effect of pressure on the gas-phase chemistry when using monomethylsilane and dimethylsilane in hot-wire chemical vapor deposition R Toukabri, Y Shi Canadian Journal of Chemistry 93 (1), 82-90, 2015 | 5 | 2015 |
Hydrogen elimination from the dissociation of methyl-substituted silanes on tungsten and tantalum surfaces R Toukabri, YJ Shi Canadian Journal of Chemistry 94 (4), 265-272, 2015 | 3 | 2015 |
Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process R Toukabri Gas 2013, 08-27, 2013 | 2 | 2013 |
Unraveling the complex chemical vapor deposition chemistry using laser ionization mass spectrometry Y Shi, R Toukabri ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 248, 2014 | | 2014 |
In-situ identification of reactive species using dimethylsilane in a hot-wire chemical vapour deposition process R Toukabri, Y Shi ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 245, 2013 | | 2013 |