Mechanical abrasion by bi-layered pad micro-asperity in chemical mechanical polishing HJ Ryu, DG Kim, S Kang, J Jeong, S Kim Cirp Annals 70 (1), 273-276, 2021 | 9 | 2021 |
Additive manufacturing of flexible 3D surface electrodes for electrostatic adhesion control and smart robotic gripping DG Kim, H Je, AJ Hart, S Kim Friction 11 (11), 1974-1986, 2023 | 8 | 2023 |
Manipulating Pore Sizes in PVA Brush 신소민, 김산하, 김동근 76th Korea CMPUGM Technical Meeting, 2022 | 1 | 2022 |
Field-Assisted Efficient Capturing and Analysis of Airborne Nanoparticulate Matter Using a Multifunctional Nanoporous Membrane SJ Kim, G Ryu, J Chang, DG Kim, YH Park, YJ Kim, S Kim ACS Applied Materials & Interfaces 16 (33), 44261-44269, 2024 | | 2024 |
광경화 적층제조된 CMP 패드의 연마 특성 김동근, 김산하 대한기계학회 춘추학술대회, 35-35, 2024 | | 2024 |
정밀 제어된 표면 구조를 갖는 CMP 패드의 광경화 적층 제조 및 연마 특성 분석 김동근, 김산하 한국정밀공학회 학술발표대회 논문집, 31-31, 2024 | | 2024 |
화학적 기계적 연마 (CMP) 에서 패드 표면 특성에 따른 불순물 스크래치 발생률 제형민, 김동근, 김산하 한국정밀공학회 학술발표대회 논문집, 29-29, 2024 | | 2024 |
Three-dimensional electromechanical adhesive surface structure capable of adhesive force manipulation and tactile sensing, design and manufacturing method thereof using 3D printing HJE Sanha Kim, Donggeun KIM US Patent US11926041B2, 2024 | | 2024 |
A Pressure‐Sensitive, Repositionable Bioadhesive for Instant, Atraumatic Surgical Application on Internal Organs KS Nam, Y Kim, G Park, K Hwang, M Kim, J Chong, J Jeon, C Yang, ... Advanced Materials, 2407116, 2024 | | 2024 |
점진적 경도를 갖는 화학적 기계적 연마 패드의 광중합 적층 제조 및 연마 특성 분석 김동근 한국과학기술원, 2023 | | 2023 |
A predictive model for scratch defect numbers according to CMP Pads H Je, DG Kim, S Kim International Conference on Planarization/CMP Technology, ICPT 2023, 2023 | | 2023 |
Characterization of Vat Photopolymerization Additively Manufactured CMP Pads DG Kim, S Kim International Conference on Planarization/CMP Technology, ICPT 2023, 2023 | | 2023 |
Shear-Adhesive Soft Robotic Gripper Integrated with Deformable Interdigitated Circuit DG Kim, H Je, S Kim The 9th International Conference on Manufacturing, Machine Design and …, 2023 | | 2023 |
Micro-Structured Pads for Chemical-Mechanical Polishing Fabricated by Photopolymerization Additive Manufacturing DG Kim, S Kim 3rd Korea-Tribology International Symposium, K-TRIB2023, 2023 | | 2023 |
Post-CMP 에서 PVA 브러쉬의 구조적 특성과 세정효율의 상관관계 신소민, 김동근, 김산하 한국트라이볼로지학회 학술대회, 115-115, 2022 | | 2022 |
Structural Characterization and Manipulation of Porous PVA Brush for High-Efficient Wafer Surface Cleaning S Shin, S Kim, DG Kim International Conference on Planarization Technology, ICPT 2022, 2022 | | 2022 |
Evaluation of Polishing Performance by CMP Pad with Bi-layered Asperities HJ Ryu, S Kim, J Jeong, DG Kim International Conference on Planarization Technology, ICPT 2022, 2022 | | 2022 |
The Effect of Structural Properties for Cleaning Performance of PVA brush during Post-CMP S Shin, S Kim, DG Kim International Conference on Precision Engineering and Sustainable …, 2022 | | 2022 |
Automated Material Extrusion 3D printing using Electroadhesive Heating Bed DG Kim, S Kim, DM Filippo International Conference on Precision Engineering and Sustainable …, 2022 | | 2022 |
금속관 내부의 음압유량 향상을 위한 기하학적 디자인 및 SLIPS 윤활 김동근, 장창환, 김성재, 김대겸, 김산하 Tribology and Lubricants 37 (6), 253-260, 2021 | | 2021 |