| Handbook of semiconductor manufacturing technology Y Nishi, R Doering CRC press, 2000 | 1052 | 2000 |
| Optical properties of large-area polycrystalline chemical vapor deposited graphene by spectroscopic ellipsometry FJ Nelson, VK Kamineni, T Zhang, ES Comfort, JU Lee, AC Diebold Applied Physics Letters 97 (25), 2010 | 233 | 2010 |
| Handbook of silicon semiconductor metrology AC Diebold CRC press, 2001 | 201 | 2001 |
| Complete band offset characterization of the HfO2/SiO2/Si stack using charge corrected x-ray photoelectron spectroscopy E Bersch, M Di, S Consiglio, RD Clark, GJ Leusink, AC Diebold Journal of Applied Physics 107 (4), 2010 | 131 | 2010 |
| Randomly oriented Angstrom‐scale microroughness at the Si(100)/SiO2 interface probed by optical second harmonic generation JI Dadap, B Doris, Q Deng, MC Downer, JK Lowell, AC Diebold Applied Physics Letters 64 (16), 2139-2141, 1994 | 124 | 1994 |
| Characterization of two‐dimensional dopant profiles: Status and review AC Diebold, MR Kump, JJ Kopanski, DG Seiler Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 120 | 1996 |
| Spectroscopic ellipsometry characterization of HfxSiyOz films using the Cody–Lorentz parameterized model J Price, PY Hung, T Rhoad, B Foran, AC Diebold Applied Physics Letters 85 (10), 1701-1703, 2004 | 116 | 2004 |
| Electronic excitations in graphene in the 1–50 eV range: the π and π+ σ peaks are not plasmons FJ Nelson, JC Idrobo, JD Fite, ZL Miskovic, SJ Pennycook, ST Pantelides, ... Nano Letters 14 (7), 3827-3831, 2014 | 92 | 2014 |
| Optical second-harmonic generation induced by electric current in graphene on Si and SiC substrates YQ An, JE Rowe, DB Dougherty, JU Lee, AC Diebold Physical Review B 89 (11), 115310, 2014 | 81 | 2014 |
| Enhanced Optical Second-Harmonic Generation from the Current-Biased Graphene/SiO2/Si(001) Structure YQ An, F Nelson, JU Lee, AC Diebold Nano letters 13 (5), 2104-2109, 2013 | 81 | 2013 |
| Spatial distributions of trapping centers in HfO2∕ SiO2 gate stacks D Heh, CD Young, GA Brown, PY Hung, A Diebold, G Bersuker, EM Vogel, ... Applied physics letters 88 (15), 2006 | 81 | 2006 |
| Characterization and production metrology of thin transistor gate oxide films AC Diebold, D Venables, Y Chabal, D Muller, M Weldon, E Garfunkel Materials Science in Semiconductor Processing 2 (2), 103-147, 1999 | 79 | 1999 |
| Thin dielectric film thickness determination by advanced transmission electron microscopy AC Diebold, B Foran, C Kisielowski, DA Muller, SJ Pennycook, E Principe, ... Microscopy and Microanalysis 9 (6), 493-508, 2003 | 73 | 2003 |
| Optical band gaps and composition dependence of hafnium–aluminate thin films grown by atomic layer chemical vapor deposition NV Nguyen, S Sayan, I Levin, JR Ehrstein, IJR Baumvol, C Driemeier, ... Journal of Vacuum Science & Technology A 23 (6), 1706-1713, 2005 | 66 | 2005 |
| Applying X-ray microscopy and finite element modeling to identify the mechanism of stress-assisted void growth in through-silicon vias LW Kong, JR Lloyd, KB Yeap, E Zschech, A Rudack, M Liehr, A Diebold Journal of applied physics 110 (5), 2011 | 65 | 2011 |
| Surface oxidation of the topological insulator Bi2Se3 AJ Green, S Dey, YQ An, B O'Brien, S O'Mullane, B Thiel, AC Diebold Journal of Vacuum Science & Technology A 34 (6), 2016 | 61 | 2016 |
| Spatial Distributions of Trapping Centers in Gate Stack D Heh, CD Young, GA Brown, PY Hung, A Diebold, EM Vogel, ... IEEE transactions on electron devices 54 (6), 1338-1345, 2007 | 61 | 2007 |
| Perspective: Optical measurement of feature dimensions and shapes by scatterometry NK A.C. Diebold, A. Antonelli APL Materials 6, 058201, 2018 | 57 | 2018 |
| Comparison of methods to determine bandgaps of ultrathin HfO2 films using spectroscopic ellipsometry M Di, E Bersch, AC Diebold, S Consiglio, RD Clark, GJ Leusink, T Kaack Journal of Vacuum Science & Technology A 29 (4), 2011 | 56 | 2011 |
| Identification of sub-band-gap absorption features at the HfO2∕ Si (100) interface via spectroscopic ellipsometry J Price, PS Lysaght, SC Song, HJ Li, AC Diebold Applied Physics Letters 91 (6), 2007 | 50 | 2007 |
Vimal KamineniGLOBALFOUNDRIES, College of Nanoscale Science and Engineering, Louisiana Tech University在 globalfoundries.com 的电子邮件经过验证
