Advanced LSI-based amperometric sensor array with light-shielding structure for effective removal of photocurrent and mode selectable function for individual operation of 400 … KY Inoue, M Matsudaira, M Nakano, K Ino, C Sakamoto, Y Kanno, R Kubo, ... Lab on a Chip 15 (3), 848-856, 2015 | 41 | 2015 |
Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection M Makihata, S Tanaka, M Muroyama, S Matsuzaki, H Yamada, ... Sensors and Actuators A: Physical 188, 103-110, 2012 | 36 | 2012 |
3-axis fully-integrated capacitive tactile sensor with flip-bonded CMOS on LTCC interposer S Asano, M Muroyama, T Nakayama, Y Hata, Y Nonomura, S Tanaka Sensors 17 (11), 2451, 2017 | 33 | 2017 |
Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias Y Hata, Y Suzuki, M Muroyama, T Nakayama, Y Nonomura, R Chand, ... Sensors and Actuators A: Physical 273, 30-41, 2018 | 29 | 2018 |
A simulation-based soft error estimation methodology for computer systems M Sugihara, T Ishihara, K Hashimoto, M Muroyama 7th International Symposium on Quality Electronic Design (ISQED'06), 8 pp.-203, 2006 | 29 | 2006 |
Dynamic quantity sensor and dynamic quantity sensor system Y Hata, Y Nonomura, M Fujiyoshi, H Funabashi, T Akashi, Y Omura, ... US Patent 9,134,189, 2015 | 28 | 2015 |
AMPLE: An adaptive multi-performance processor for low-energy embedded applications T Ishihara, S Yamaguchi, Y Ishitobi, T Matsumura, Y Kunitake, Y Oyama, ... 2008 Symposium on Application Specific Processors, 83-88, 2008 | 28 | 2008 |
Design and fabrication technology of low profile tactile sensor with digital interface for whole body robot skin M Makihata, M Muroyama, S Tanaka, T Nakayama, Y Nonomura, ... Sensors 18 (7), 2374, 2018 | 25 | 2018 |
An energy characterization framework for software-based embedded systems D Lee, T Ishihara, M Muroyama, H Yasuura, F Fallah 2006 IEEE/ACM/IFIP Workshop on Embedded Systems for Real Time Multimedia, 59-64, 2006 | 24 | 2006 |
Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line S Asano, M Muroyama, T Bartley, T Kojima, T Nakayama, U Yamaguchi, ... Sensors and Actuators A: Physical 240, 167-176, 2016 | 22 | 2016 |
A 1.7mm3MEMS-on-CMOS tactile sensor using human-inspired autonomous common bus communication M Makihata, M Muroyama, Y Nakano, S Tanaka, T Nakayama, ... 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 21 | 2013 |
Adhesive wafer bonding using a molded thick benzocyclobutene layer for wafer-level integration of MEMS and LSI M Makihata, S Tanaka, M Muroyama, S Matsuzaki, H Yamada, ... Journal of Micromechanics and Microengineering 21 (8), 085002, 2011 | 21 | 2011 |
Delay window blind oversampling clock and data recovery algorithm with wide tracking range T Bartley, S Tanaka, Y Nonomura, T Nakayama, M Muroyama 2015 IEEE International Symposium on Circuits and Systems (ISCAS), 1598-1601, 2015 | 20 | 2015 |
Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities Y Hata, Y Nonomura, Y Omura, T Nakayama, M Fujiyoshi, H Funabashi, ... Sensors and Actuators A: Physical 266, 24-35, 2017 | 18 | 2017 |
A tactile sensor network system using a multiple sensor platform with a dedicated CMOS-LSI for robot applications C Shao, S Tanaka, T Nakayama, Y Hata, T Bartley, Y Nonomura, ... Sensors 17 (9), 1974, 2017 | 18 | 2017 |
Sensor device having electrode draw-out portions through side of substrate S Tanaka, M Esashi, M Muroyama, S Matsuzaki, M Makihata, ... US Patent 8,823,114, 2014 | 18 | 2014 |
CMOS-on-LTCC integrated fingertip sensor with 3-axis tactile and thermal sensation for robots S Asano, M Muroyama, T Nakayama, Y Hata, S Tanaka 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 15 | 2017 |
300 μm Deep through silicon via in laser-ablated CMOS multi-project wafer for cost-effective development of integrated MEMS Y Suzuki, H Fukushi, M Muroyama, Y Hata, T Nakayama, R Chand, ... 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 15 | 2017 |
A CMOS-LSI for a sensor network platform of social robot applications M Muroyama, T Nakayama, Y Hata, Y Nonomura, T Bartley, S Tanaka Smart Systems Integration 2016-10th International Conference and Exhibition …, 2016 | 14 | 2016 |
Multi-sensor platform LSI enabling different sensors to be event-driven and connected to common differental bus line M Muroyama, T Nakayama, Y Hata, S Tanaka 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 13 | 2017 |