| Substrate support having heat transfer system A Nguyen, WL Cheng, H Hanawa, SL Kats, K Ramaswamy, Y Ye, ... US Patent 7,221,553, 2007 | 504 | 2007 |
| Large-area magnetron sputtering chamber with individually controlled sputtering zones Y Ye, J White, A Hosokawa, H Le US Patent App. 11/225,922, 2007 | 402 | 2007 |
| Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones Y Ye, J White, A Hosokawa, H Le US Patent App. 11/225,923, 2007 | 397 | 2007 |
| High mobility amorphous zinc oxynitride semiconductor material for thin film transistors Y Ye, R Lim, JM White Journal of applied physics 106 (7), 2009 | 159 | 2009 |
| Capacitively coupled plasma reactor with magnetic plasma control DJ Hoffman, ML Miller, JG Yang, H Chae, M Barnes, T Ishikawa, Y Ye US Patent 6,853,141, 2005 | 154* | 2005 |
| Localized tail states and electron mobility in amorphous ZnON thin film transistors S Lee, A Nathan, Y Ye, Y Guo, J Robertson Scientific reports 5 (1), 13467, 2015 | 104 | 2015 |
| Gas distribution plate electrode for a plasma reactor D Katz, DA Buchberger Jr, Y Ye, RB Hagen, X Zhao, AH Kumar, ... US Patent 6,586,886, 2003 | 86* | 2003 |
| Method of forming a low-K dual damascene interconnect structure GA Delgadino, Y Ye, N Shin, Y Kim, LQ Xia, TF Huang, L Li, J Chiu, ... US Patent 7,132,369, 2006 | 73 | 2006 |
| Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression DJ Hoffman, Y Ye, D Katz, DA Buchberger Jr, X Zhao, KL Chiang, ... US Patent 6,894,245, 2005 | 73 | 2005 |
| Experimental study of particle deposition on semiconductor wafers DYH Pui, Y Ye, BYH Liu Aerosol Science and Technology 12 (4), 795-804, 1990 | 68 | 1990 |
| Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor K Bera, Y Ye, JD Carducci, DJ Hoffman, SC Shannon, DA Buchberger Jr US Patent 7,972,467, 2011 | 66 | 2011 |
| Externally excited torroidal plasma source with magnetic control of ion distribution KS Collins, H Hanawa, Y Ye, K Ramaswamy, A Nguyen, MS Barnes, ... US Patent 6,939,434, 2005 | 63 | 2005 |
| Thin film transistors using thin film semiconductor materials Y Ye US Patent 7,994,508, 2011 | 56 | 2011 |
| Particle transmission characteristics of an annular denuder ambient sampling system Y Ye, CJ Tsai, DYH Pui, CW Lewis Aerosol science and Technology 14 (1), 102-111, 1991 | 54 | 1991 |
| Inductive antenna for a plasma reactor producing reduced fluorine dissociation SB Wang, DJ Hoffman, C Cui, Y Ye, G Delgadino, D McParland, ML Miller, ... US Patent 6,652,712, 2003 | 53* | 2003 |
| Method of fabricating a dual damascene interconnect structure Y Ye, X Zhao, H Du US Patent 7,115,517, 2006 | 50 | 2006 |
| Process to make metal oxide thin film transistor array with etch stopping layer Y Ye US Patent 8,143,093, 2012 | 49 | 2012 |
| Thin film transistors using multiple active channel layers Y Ye US Patent 8,258,511, 2012 | 48 | 2012 |
| Particle deposition in a tube with an abrupt contraction Y Ye, DYH Pui Journal of aerosol science 21 (1), 29-40, 1990 | 43 | 1990 |
| Substrate support having fluid channel A Nguyen, WL Cheng, H Hanawa, S Kats, K Ramaswamy, Y Ye, ... US Patent 8,279,577, 2012 | 41 | 2012 |
