Investigation of 20% scandium-doped aluminum nitride films for MEMS laterally vibrating resonators L Colombo, A Kochhar, C Xu, G Piazza, S Mishin, Y Oshmyansky 2017 IEEE International Ultrasonics Symposium (IUS), 1-4, 2017 | 88 | 2017 |
X-cut lithium niobate laterally vibrating MEMS resonator with figure of merit of 1560 L Colombo, A Kochhar, G Vidal-Alvarez, G Piazza Journal of Microelectromechanical Systems 27 (4), 602-604, 2018 | 60 | 2018 |
Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient FV Pop, AS Kochhar, G Vidal-Alvarez, G Piazza 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 52 | 2017 |
High-figure-of-merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications L Colombo, A Kochhar, G Vidal-Alvarez, G Piazza IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 67 …, 2020 | 50 | 2020 |
X-cut lithium niobate-based shear horizontal resonators for radio frequency applications A Kochhar, A Mahmoud, Y Shen, N Turumella, G Piazza Journal of Microelectromechanical Systems 29 (6), 1464-1472, 2020 | 38 | 2020 |
Resonant microelectromechanical receiver A Kochhar, ME Galanko, M Soliman, H Abdelsalam, L Colombo, YC Lin, ... Journal of Microelectromechanical Systems 28 (3), 327-343, 2019 | 37 | 2019 |
Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz FV Pop, AS Kochhar, G Vidal-Álvarez, G Piazza Journal of Microelectromechanical Systems 27 (3), 407-413, 2018 | 32 | 2018 |
Wave Propagation Direction and c-Axis Tilt Angle Influence on the Performance of ScAlN/Sapphire-Based SAW Devices A Kochhar, Y Yamamoto, A Teshigahara, K Hashimoto, S Tanaka, ... IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 63 …, 2016 | 32 | 2016 |
Delay lines based on a suspended thin film of X-cut lithium niobate G Vidal-Álvarez, A Kochhar, G Piazza 2017 IEEE International Ultrasonics Symposium (IUS), 1-4, 2017 | 30 | 2017 |
Controlling residual stress and suppression of anomalous grains in aluminum scandium nitride films grown directly on silicon R Beaucejour, V Roebisch, A Kochhar, CG Moe, MD Hodge, RH Olsson Journal of Microelectromechanical Systems 31 (4), 604-611, 2022 | 27 | 2022 |
A manufacturable AlScN periodically polarized piezoelectric film bulk acoustic wave resonator (AlScN P3F BAW) operating in overtone mode at X and Ku Band R Vetury, A Kochhar, J Leathersich, C Moe, M Winters, J Shealy, ... 2023 IEEE/MTT-S International Microwave Symposium-IMS 2023, 891-894, 2023 | 22 | 2023 |
Monolithic fabrication of film bulk acoustic resonators above integrated circuit by adhesive-bonding-based film transfer A Kochhar, T Matsumura, G Zhang, R Pokharel, K Hashimoto, M Esashi, ... 2012 IEEE International Ultrasonics Symposium, 1047-1050, 2012 | 22 | 2012 |
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators L Colombo, A Kochhar, G Vidal-Álvarez, P Simeoni, U Soysal, G Piazza Journal of Microelectromechanical Systems 31 (6), 888-900, 2022 | 20 | 2022 |
An 18 nW− 47/− 40 dBm sensitivity 3/100 kbps MEMS-assisted CMOS wake-up receiver M Soliman, A Kochhar, H Abdelsalam, FV Pop, G Vidal-Álvarez, J Weldon, ... IEEE Transactions on Circuits and Systems I: Regular Papers 66 (11), 4439-4447, 2019 | 19 | 2019 |
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators ZA Schaffer, L Colombo, AS Kochhar, G Piazza, S Mishin, Y Oshmyansky 2018 IEEE Micro Electro Mechanical Systems (MEMS), 787-790, 2018 | 15 | 2018 |
Ultra-low-power and high sensitivity resonant micromechanical receiver L Colombo, MB Galanko, H Abdelsalam, A Kochhar, G Vidal-Alvarez, ... 2017 IEEE SENSORS, 1-3, 2017 | 15 | 2017 |
Dynamic Q-enhancement in aluminum nitride contour-mode resonators C Xu, A Kochhar, G Piazza Applied Physics Letters 115 (17), 2019 | 13 | 2019 |
Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators A Kochhar, L Colombo, G Vidal-Alvarez, G Piazza 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 12 | 2017 |
Comparison between different MEMS laterally vibrating resonator technologies for passive voltage amplification in an RF front-end system L Colombo, A Kochhar, G Vidal-Álvarez, Z Schaffer, P Simeoni, G Piazza 2018 IEEE MTT-S International Microwave Workshop Series on Advanced …, 2018 | 11 | 2018 |
CMOS-MEMS resonant demodulator for near-zero-power RF wake-up receiver ME Galanko, A Kochhar, G Piazza, T Mukherjee, GK Fedder 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 11 | 2017 |