Sources for beyond extreme ultraviolet lithography and water window imaging G O’Sullivan, B Li, P Dunne, P Hayden, D Kilbane, R Lokasani, E Long, ... Physica Scripta 90 (5), 054002, 2015 | 36 | 2015 |
Soft X-ray emission from molybdenum plasmas generated by dual laser pulses R Lokasani, G Arai, Y Kondo, H Hara, TH Dinh, T Ejima, T Hatano, ... Applied Physics Letters 109 (19), 2016 | 27 | 2016 |
XUV spectra of 2nd transition row elements: identification of 3d–4p and 3d–4f transition arrays R Lokasani, E Long, O Maguire, P Sheridan, P Hayden, F O’Reilly, ... Journal of Physics B: Atomic, Molecular and Optical Physics 48 (24), 245009, 2015 | 14 | 2015 |
Relationship between resist related outgassing and witness sample contamination in the NXE outgas qualification using electrons and EUV I Pollentier, R Lokasani, R Gronheid, S Hill, C Tarrio, T Lucatorto Extreme Ultraviolet (EUV) Lithography IV 8679, 114-125, 2013 | 9 | 2013 |
Assessment of challenges in EUV resist outgassing and contamination characterization I Pollentier, R Lokasani, R Gronheid Journal of Photopolymer Science and Technology 25 (5), 609-616, 2012 | 7 | 2012 |
Soft x-ray spectral analysis of samarium plasmas produced by solid-state laser pulses R Lokasani, J Sheil, EF Barte, H Hara, T Tamura, T Gisuji, T Higashiguchi, ... Journal of Physics B: Atomic, Molecular and Optical Physics 51 (21), 215001, 2018 | 6 | 2018 |
EUV outgassing and contamination in multilayer material schemes I Pollentier, V Truffert, R Lokasani, R Gronheid | 6 | 2011 |
Spectra of plasmas of Ru, Rh, Pd and Mo produced with nanosecond and picosecond laser pulses R Lokasani, E Long, P Sheridan, P Hayden, F O'Reilly, P Dunne, A Endo, ... Laser Acceleration of Electrons, Protons, and Ions III; and Medical …, 2015 | 5 | 2015 |
Soft X-ray spectral analysis of laser produced molybdenum plasmas using the fundamental and second harmonics of a Nd: YAG laser R Lokasani, H Kawasaki, Y Shimada, M Shoji, K Anraku, T Ejima, ... Optics Express 27 (23), 33351-33358, 2019 | 4 | 2019 |
Spectroscopy for identification of plasma sources for lithography and water window imaging G O'Sullivan, P Dunne, T Higashiguchi, B Li, L Liu, R Lokasani, E Long, ... Journal of Physics: Conference Series 635 (1), 012026, 2015 | 4 | 2015 |
Progress in understanding EUV resist related outgassing and contamination I Pollentier, R Lokasani, R Gronheid | 4 | 2012 |
Source development for extreme ultraviolet lithography and water window imaging G O’Sullivan, P Dunne, D Kilbane, L Liu, R Lokasani, E Long, BW Li, ... AIP Conference Proceedings 1811 (1), 2017 | 3 | 2017 |
Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures EF Barte, R Lokasani, J Proska, L Maresova, D Kos, O Maguire, G Joseph, ... Laser and Particle Beams 35 (4), 574-578, 2017 | 2 | 2017 |
High ionization states observed in soft x-ray spectra from plasmas of second row transition elements produced by femtosecond laser pulses R Lokasani, EF Barte, P Gavrilov, P Hribek, A Jancarek, D Kos, M Nevrkla, ... Journal of Physics B: Atomic, Molecular and Optical Physics 50 (14), 145001, 2017 | 2 | 2017 |
Laser-produced plasma spectroscopy of medium to high-Z elements in the 2 to 9 nm spectral region E Long, C Suzuki, J Sheil, E White, R Lokasani, B Li, P Sheridan, ... Journal of Physics: Conference Series 635 (9), 092090, 2015 | 2 | 2015 |
Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions EF Barte, H Hara, T Tamura, T Gisuji, WB Chen, R Lokasani, T Hatano, ... Journal of Applied Physics 123 (18), 2018 | 1 | 2018 |
XUV generation from the interaction of pico-and nanosecond laser pulses with nanostructured targets EF Barte, R Lokasani, J Proska, L Stolcova, O Maguire, D Kos, P Sheridan, ... X-ray Lasers and Coherent X-ray Sources: Development and Applications 10243 …, 2017 | | 2017 |
XUV Spectra from Plasmas of Second Transition Row Elements Generated by ns, ps and fs Laser Pulses RR Lokasani https://www.fjfi.cvut.cz/cz/studium/doktorske-studium/archiv-doktorskych …, 2017 | | 2017 |
XUV spectra of 2nd transition row elements irradiated by nano-, pico- and femtosecond laser pulses R. Lokasani, J. Limpouch, E.Barte1, P.Gavrilov, M.Holec, P.Hribek, A ... 34-th European Conference on Laser Interaction with Matter (ECLIM2016), 2016 | | 2016 |
XUV emission from highly ionized plasmas of 2nd transition row elements irradiated by Q‐switched Nd doped YAG lasers Ragava Lokasani,Elaine Long, Oisin Maguire, Domagoj Kos, Patrick Hayden ... PTB-Seminar VUV and EUV metrology, Berlin., 2015 | | 2015 |