| Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography F Torretti, J Sheil, R Schupp, MM Basko, M Bayraktar, RA Meijer, S Witte, ... Nature communications 11 (1), 2334, 2020 | 96 | 2020 |
| Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser L Behnke, R Schupp, Z Bouza, M Bayraktar, Z Mazzotta, R Meijer, J Sheil, ... Optics express 29 (3), 4475-4487, 2021 | 44 | 2021 |
| Sources for beyond extreme ultraviolet lithography and water window imaging G O’Sullivan, B Li, P Dunne, P Hayden, D Kilbane, R Lokasani, E Long, ... Physica Scripta 90 (5), 054002, 2015 | 36 | 2015 |
| EUV spectroscopy of highly charged ions in an electron-beam ion trap J Scheers, C Shah, A Ryabtsev, H Bekker, F Torretti, J Sheil, DA Czapski, ... Physical Review A 101 (6), 062511, 2020 | 31 | 2020 |
| Radiation transport and scaling of optical depth in Nd: YAG laser-produced microdroplet-tin plasma R Schupp, F Torretti, RA Meijer, M Bayraktar, J Sheil, J Scheers, ... Applied Physics Letters 115 (12), 2019 | 30 | 2019 |
| High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model DJ Hemminga, L Poirier, MM Basko, R Hoekstra, W Ubachs, ... Plasma Sources Science and Technology 30 (10), 105006, 2021 | 29 | 2021 |
| Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review) OO Versolato, J Sheil, S Witte, W Ubachs, R Hoekstra Journal of Optics 24 (5), 054014, 2022 | 28 | 2022 |
| Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, ... Journal of Physics D: Applied Physics 54 (36), 365103, 2021 | 24 | 2021 |
| Characterization of 1- and -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light R Schupp, L Behnke, J Sheil, Z Bouza, M Bayraktar, W Ubachs, ... Physical Review Research 3 (1), 013294, 2021 | 24 | 2021 |
| Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma J Hernandez-Rueda, B Liu, DJ Hemminga, Y Mostafa, RA Meijer, ... Physical Review Research 4 (1), 013142, 2022 | 21 | 2022 |
| Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions J Sheil, OO Versolato, AJ Neukirch, J Colgan Journal of Physics B: Atomic, Molecular and Optical Physics 54 (3), 035002, 2021 | 14 | 2021 |
| EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, ... Journal of physics B: atomic, molecular and optical physics 53 (19), 195001, 2020 | 13 | 2020 |
| Analysis of soft x-ray emission spectra of laser-produced dysprosium, erbium and thulium plasmas J Sheil, P Dunne, T Higashiguchi, D Kos, E Long, T Miyazaki, F O’Reilly, ... Journal of Physics B: Atomic, Molecular and Optical Physics 50 (6), 065006, 2017 | 13 | 2017 |
| Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma L Poirier, DJ Hemminga, A Lassise, L Assink, R Hoekstra, J Sheil, ... Physics of Plasmas 29 (12), 2022 | 11 | 2022 |
| The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range Z Bouza, J Byers, J Scheers, R Schupp, Y Mostafa, L Behnke, Z Mazzotta, ... AIP advances 11 (12), 2021 | 10 | 2021 |
| Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources DJ Hemminga, OO Versolato, J Sheil Physics of Plasmas 30 (3), 2023 | 7 | 2023 |
| Soft x-ray spectral analysis of samarium plasmas produced by solid-state laser pulses R Lokasani, J Sheil, EF Barte, H Hara, T Tamura, T Gisuji, T Higashiguchi, ... Journal of Physics B: Atomic, Molecular and Optical Physics 51 (21), 215001, 2018 | 6 | 2018 |
| Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma Y Mostafa, L Behnke, DJ Engels, Z Bouza, J Sheil, W Ubachs, ... Applied Physics Letters 123 (23), 2023 | 5 | 2023 |
| Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source S Rai, KI Bijlsma, L Poirier, E De Wit, L Assink, A Lassise, I Rabadán, ... Plasma Sources Science and Technology 32 (3), 035006, 2023 | 5 | 2023 |
| Review of the 1st EUV Light Sources Code Comparison Workshop J Sheil, O Versolato, V Bakshi, H Scott Atoms 11 (10), 130, 2023 | 4 | 2023 |
