Nanodevice motion at microwave frequencies XM Henry Huang, CA Zorman, M Mehregany, ML Roukes Nature 421 (6922), 496-496, 2003 | 803 | 2003 |
Silicon carbide MEMS for harsh environments M Mehregany, CA Zorman, N Rajan, CH Wu Proceedings of the IEEE 86 (8), 1594-1609, 1998 | 579 | 1998 |
Evaluation of MEMS materials of construction for implantable medical devices G Kotzar, M Freas, P Abel, A Fleischman, S Roy, C Zorman, JM Moran, ... Biomaterials 23 (13), 2737-2750, 2002 | 542 | 2002 |
Polytype control of spin qubits in silicon carbide AL Falk, BB Buckley, G Calusine, WF Koehl, VV Dobrovitski, A Politi, ... Nature communications 4 (1), 1819, 2013 | 412 | 2013 |
Wearable sensors for monitoring the physiological and biochemical profile of the athlete DR Seshadri, RT Li, JE Voos, JR Rowbottom, CM Alfes, CA Zorman, ... NPJ digital medicine 2 (1), 72, 2019 | 403 | 2019 |
Monocrystalline silicon carbide nanoelectromechanical systems YT Yang, KL Ekinci, XMH Huang, LM Schiavone, ML Roukes, CA Zorman, ... Applied Physics Letters 78 (2), 162-164, 2001 | 403 | 2001 |
SiC MEMS: opportunities and challenges for applications in harsh environments M Mehregany, CA Zorman Thin solid films 355, 518-524, 1999 | 381 | 1999 |
Epitaxial growth of 3C–SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition CA Zorman, AJ Fleischman, AS Dewa, M Mehregany, C Jacob, S Nishino, ... Journal of Applied Physics 78 (8), 5136-5138, 1995 | 298 | 1995 |
High-temperature single-crystal 3C-SiC capacitive pressure sensor DJ Young, J Du, CA Zorman, WH Ko IEEE sensors Journal 4 (4), 464-470, 2004 | 272 | 2004 |
Wearable sensors for monitoring the internal and external workload of the athlete DR Seshadri, RT Li, JE Voos, JR Rowbottom, CM Alfes, CA Zorman, ... NPJ digital medicine 2 (1), 71, 2019 | 241 | 2019 |
Low voltage nanoelectromechanical switches based on silicon carbide nanowires XL Feng, MH Matheny, CA Zorman, M Mehregany, ML Roukes Nano letters 10 (8), 2891-2896, 2010 | 200 | 2010 |
In vivo deployment of mechanically adaptive nanocomposites for intracortical microelectrodes JP Harris, AE Hess, SJ Rowan, C Weder, CA Zorman, DJ Tyler, ... Journal of neural engineering 8 (4), 046010, 2011 | 182 | 2011 |
Silicon carbide for microelectromechanical systems M Mehregany, CA Zorman, S Roy, AJ Fleischman, Wu C.-H., N Rajan International materials reviews 45 (3), 85-108, 2000 | 182 | 2000 |
Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications CH Wu, CA Zorman, M Mehregany IEEE Sensors Journal 6 (2), 316-324, 2006 | 181 | 2006 |
VHF, UHF and microwave frequency nanomechanical resonators XMH Huang, XL Feng, CA Zorman, M Mehregany, ML Roukes New Journal of Physics 7 (1), 247, 2005 | 177 | 2005 |
Micro‐and nanomechanical structures for silicon carbide MEMS and NEMS CA Zorman, RJ Parro physica status solidi (b) 245 (7), 1404-1424, 2008 | 132 | 2008 |
Electrothermal tuning of Al–SiC nanomechanical resonators SC Jun, XMH Huang, M Manolidis, CA Zorman, M Mehregany, J Hone Nanotechnology 17 (5), 1506, 2006 | 128 | 2006 |
Development of a stimuli-responsive polymer nanocomposite toward biologically optimized, MEMS-based neural probes AE Hess, JR Capadona, K Shanmuganathan, L Hsu, SJ Rowan, C Weder, ... Journal of Micromechanics and Microengineering 21 (5), 054009, 2011 | 118 | 2011 |
Examination of bulge test for determining residual stress, Young’s modulus, and Poisson’s ratio of 3C-SiC thin films JS Mitchell, CA Zorman, T Kicher, S Roy, M Mehregany Journal of Aerospace Engineering 16 (2), 46-54, 2003 | 117 | 2003 |
Tuning Optical Signatures of Single- and Few-Layer MoS2 by Blown-Bubble Bulge Straining up to Fracture R Yang, J Lee, S Ghosh, H Tang, RM Sankaran, CA Zorman, PXL Feng Nano letters 17 (8), 4568-4575, 2017 | 113 | 2017 |