Deep vertical etching of silicon wafers using a hydrogenation-assisted reactive ion etching A Sammak, S Azimi, N Izadi, BK Hosseinieh, S Mohajerzadeh Journal of microelectromechanical systems 16 (4), 912-918, 2007 | 71 | 2007 |
Monitoring the spreading stage of lung cells by silicon nanowire electrical cell impedance sensor for cancer detection purposes H Abiri, M Abdolahad, M Gharooni, SA Hosseini, M Janmaleki, S Azimi, ... Biosensors and Bioelectronics 68, 577-585, 2015 | 55 | 2015 |
A high-performance piezoelectric vibration sensor B Yaghootkar, S Azimi, B Bahreyni IEEE Sensors Journal 17 (13), 4005-4012, 2017 | 49 | 2017 |
A nonlinear rate microsensor utilising internal resonance A Sarrafan, S Azimi, F Golnaraghi, B Bahreyni Scientific reports 9 (1), 8648, 2019 | 42 | 2019 |
Three-dimensional etching of silicon substrates using a modified deep reactive ion etching technique S Azimi, A Sandoughsaz, B Amirsolaimani, J Naghsh-Nilchi, ... Journal of Micromechanics and Microengineering 21 (7), 074005, 2011 | 34 | 2011 |
A wideband, low-noise accelerometer for sonar wave detection F Edalafar, S Azimi, AQA Qureshi, B Yaghootkar, A Keast, W Friedrich, ... IEEE Sensors Journal 18 (2), 508-516, 2017 | 29 | 2017 |
Selective deposition of CuO/SnO2 sol–gel on porous SiO2 suitable for the fabrication of MEMS-based H2S sensors A Ebrahimi, A Pirouz, Y Abdi, S Azimi, S Mohajerzadeh Sensors and Actuators B: Chemical 173, 802-810, 2012 | 21 | 2012 |
Formation of three-dimensional and nanowall structures on silicon using a hydrogen-assisted high aspect ratio etching S Azimi, M Mehran, A Amini, A Vali, S Mohajerzadeh, M Fathipour Journal of Vacuum Science & Technology B 28 (6), 1125-1131, 2010 | 21 | 2010 |
Highly featured amorphous silicon nanorod arrays for high-performance lithium-ion batteries S Soleimani-Amiri, SA Safiabadi Tali, S Azimi, Z Sanaee, S Mohajerzadeh Applied Physics Letters 105 (19), 2014 | 20 | 2014 |
Design, fabrication and characterization of a high performance MEMS accelerometer F Edalatfar, B Yaghootkar, AQA Qureshi, S Azimi, B Bahreyni 2016 IEEE SENSORS, 1-3, 2016 | 19 | 2016 |
A single-cell correlative nanoelectromechanosensing approach to detect cancerous transformation: monitoring the function of F-actin microfilaments in the modulation of the ion … M Abdolahad, A Saeidi, M Janmaleki, O Mashinchian, M Taghinejad, ... Nanoscale 7 (5), 1879-1887, 2015 | 14 | 2015 |
Development of a micromachined accelerometer for particle acceleration detection F Edalatfar, B Yaghootkar, AQA Qureshi, S Azimi, A Leung, B Bahreyni Sensors and Actuators A: Physical 280, 359-367, 2018 | 13 | 2018 |
Realization of complex three-dimensional free-standing structures on silicon substrates using controllable underetching in a deep reactive ion etching A Sandoughsaz, S Azimi, H Mazreati, S Mohajerzadeh Journal of Micromechanics and Microengineering 23 (3), 035022, 2013 | 12 | 2013 |
Evolution of high aspect ratio and nano-grass structures using a modified low plasma density reactive ion etching M Mehran, Z Kolahdouz, Z Sanaee, S Azimi, S Mohajerzadeh The European Physical Journal Applied Physics 55 (1), 11302, 2011 | 12 | 2011 |
Wideband, low-noise accelerometer with open loop dynamic range of better than 135DB F Edalatfar, S Azimi, AQA Qureshi, B Yaghootkar, B Bahreyni 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 9 | 2017 |
Realization of Three-Dimensional Si and SiO2 Nanowall Structures Using Reactive Ion Etching S Azimi, A Sandoughsaz, S Mohajerzadeh Journal of Microelectromechanical Systems 20 (2), 353-354, 2011 | 9 | 2011 |
Silicon nanowire fabrication using novel hydrogenation-assisted deep reactive ion etching A Sammak, S Azimi, S Mohajerzadeh, B Khadem-Hosseini, B Fallah-Azad 2007 International Semiconductor Device Research Symposium, 1-2, 2007 | 9 | 2007 |
Wideband piezoelectric mems vibration sensor B Yaghootkar, S Azimi, B Bahreyni 2016 IEEE SENSORS, 1-3, 2016 | 8 | 2016 |
Hydrogenation-assisted lateral micromachining of (111) silicon wafers S Darbari, S Azimi, S Mohajerzadeh, A Sammak, N Izadi, S Famini Journal of microelectromechanical systems 17 (6), 1489-1494, 2008 | 8 | 2008 |
Formation of homogenous nanofibers using silicon microneedle spinnerets SA Hosseini, S Azimi, S Mohajerzadeh Microsystem technologies 18, 2063-2070, 2012 | 5 | 2012 |