受强制性开放获取政策约束的文章 - Takeshi HIGASHIGUCHI了解详情
无法在其他位置公开访问的文章：30 篇
Rare-earth plasma extreme ultraviolet sources at 6.5–6.7 nm
T Otsuka, D Kilbane, J White, T Higashiguchi, N Yugami, T Yatagai, ...
Applied Physics Letters 97 (11), 2010
强制性开放获取政策： Science Foundation Ireland
Extreme ultraviolet source at 6.7 nm based on a low-density plasma
T Higashiguchi, T Otsuka, N Yugami, W Jiang, A Endo, B Li, D Kilbane, ...
Applied Physics Letters 99 (19), 2011
强制性开放获取政策： Science Foundation Ireland
Quasi-Moseley's law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions
H Ohashi, T Higashiguchi, Y Suzuki, G Arai, Y Otani, T Yatagai, B Li, ...
Applied Physics Letters 104 (23), 2014
强制性开放获取政策： Science Foundation Ireland
Sources for beyond extreme ultraviolet lithography and water window imaging
G O’Sullivan, B Li, P Dunne, P Hayden, D Kilbane, R Lokasani, E Long, ...
Physica Scripta 90 (5), 054002, 2015
强制性开放获取政策： Science Foundation Ireland
Investigation of Gd and Tb plasmas for beyond extreme ultraviolet lithography based on multilayer mirror performance
B Li, T Otsuka, T Higashiguchi, N Yugami, W Jiang, A Endo, P Dunne, ...
Applied Physics Letters 101 (1), 2012
强制性开放获取政策： Science Foundation Ireland
Tuning extreme ultraviolet emission for optimum coupling with multilayer mirrors for future lithography through control of ionic charge states
H Ohashi, T Higashiguchi, B Li, Y Suzuki, M Kawasaki, T Kanehara, ...
Journal of Applied Physics 115 (3), 2014
强制性开放获取政策： Science Foundation Ireland
“Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth
B Li, T Higashiguchi, T Otsuka, W Jiang, A Endo, P Dunne, G O'Sullivan
Applied Physics Letters 102 (4), 2013
强制性开放获取政策： Science Foundation Ireland
Soft X-ray emission from molybdenum plasmas generated by dual laser pulses
R Lokasani, G Arai, Y Kondo, H Hara, TH Dinh, T Ejima, T Hatano, ...
Applied Physics Letters 109 (19), 2016
强制性开放获取政策： Science Foundation Ireland
A 6.7-nm beyond EUV source as a future lithography source
T Otsuka, B Li, C O'Gorman, T Cummins, D Kilbane, T Higashiguchi, ...
Extreme Ultraviolet (EUV) Lithography III 8322, 342-351, 2012
强制性开放获取政策： Science Foundation Ireland
XUV spectra of laser-produced zirconium plasmas
B Li, T Higashiguchi, T Otsuka, W Jiang, A Endo, P Dunne, G O'Sullivan
Journal of Physics B: Atomic, Molecular and Optical Physics 45 (24), 245004, 2012
强制性开放获取政策： Science Foundation Ireland
XUV spectral analysis of ns-and ps-laser produced platinum plasmas
T Wu, T Higashiguchi, B Li, Y Suzuki, G Arai, TH Dinh, P Dunne, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 48 (24), 245007, 2015
强制性开放获取政策： 国家自然科学基金委员会, Science Foundation Ireland
Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas
R Amano, TH Dinh, A Sasanuma, G Arai, H Hara, Y Fujii, T Hatano, ...
Japanese journal of applied physics 57 (7), 070311, 2018
强制性开放获取政策： Science Foundation Ireland
Analysis of soft x-ray emission spectra of laser-produced dysprosium, erbium and thulium plasmas
J Sheil, P Dunne, T Higashiguchi, D Kos, E Long, T Miyazaki, F O’Reilly, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 50 (6), 065006, 2017
强制性开放获取政策： European Commission, Irish Research Council
Recent progress in source development for lithography at 6. x nm
G O'Sullivan, T Cummins, P Dunne, A Endo, P Hayden, T Higashiguchi, ...
Physica Scripta 2013 (T156), 014105, 2013
强制性开放获取政策： Science Foundation Ireland
Characteristics of x-ray emission from optically thin high-Z plasmas in the soft x-ray region
H Ohashi, T Higashiguchi, Y Suzuki, G Arai, B Li, P Dunne, G O’Sullivan, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 48 (14), 144011, 2015
强制性开放获取政策： 国家自然科学基金委员会, Science Foundation Ireland
Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas
H Hara, G Arai, Y Kondo, TH Dinh, P Dunne, G O’Sullivan, T Ejima, ...
Applied Physics Express 9 (6), 066201, 2016
强制性开放获取政策： Science Foundation Ireland
Soft x-ray spectral analysis of samarium plasmas produced by solid-state laser pulses
R Lokasani, J Sheil, EF Barte, H Hara, T Tamura, T Gisuji, T Higashiguchi, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 51 (21), 215001, 2018
强制性开放获取政策： Science Foundation Ireland, Irish Research Council
Microdischarge extreme ultraviolet source with alkali metal vapor for surface morphology application
T Higashiguchi, H Terauchi, T Otsuka, M Yamaguchi, K Kikuchi, N Yugami, ...
Journal of Applied Physics 109 (1), 2011
强制性开放获取政策： Science Foundation Ireland
Analysis of laser produced plasmas of gold in the 1–7 nm region
B Li, T Higashiguchi, T Otsuka, N Yugami, P Dunne, D Kilbane, E Sokell, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 47 (7), 075001, 2014
强制性开放获取政策： Science Foundation Ireland
Spectroscopy of highly charged ions for extreme ultraviolet lithography
G O'Sullivan, P Dunne, T Higashiguchi, D Kos, O Maguire, T Miyazaki, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2017
强制性开放获取政策： Science Foundation Ireland, European Commission, Irish Research Council
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