Three-octave-spanning supercontinuum generation and sub-two-cycle self-compression of mid-infrared filaments in dielectrics H Liang, P Krogen, R Grynko, O Novak, CL Chang, GJ Stein, ... Optics letters 40 (6), 1069-1072, 2015 | 116 | 2015 |
Mid-infrared laser filaments in air at a kilohertz repetition rate H Liang, DL Weerawarne, P Krogen, RI Grynko, CJ Lai, B Shim, ... Optica 3 (7), 678-681, 2016 | 50 | 2016 |
Wavelength-scaled laser filamentation in solids and plasma-assisted subcycle light-bullet generation in the long-wavelength infrared RI Grynko, GC Nagar, B Shim Physical Review A 98 (2), 023844, 2018 | 23 | 2018 |
Ellipsometric critical dimension metrology employing mid-infrared wavelengths for high-aspect-ratio channel hole module etch processes GA Antonelli, N Keller, T Ribaudo, FJ Wong, W Ming, H Ding, Z Chen, ... Metrology, Inspection, and Process Control for Semiconductor Manufacturing …, 2021 | 11 | 2021 |
Effects of higher-order nonlinear processes on harmonic-generation phase matching RI Grynko, DL Weerawarne, B Shim Physical Review A 96 (1), 013816, 2017 | 11 | 2017 |
Inhibition of multi-filamentation of high-power laser beams RI Grynko, DL Weerawarne, X Gao, H Liang, HJ Meyer, KH Hong, ... Optics Letters 41 (17), 4064-4067, 2016 | 10 | 2016 |
Single-shot ultrafast visualization and measurement of laser–matter interactions in flexible glass using frequency domain holography D Dempsey, GC Nagar, CK Renskers, RI Grynko, JS Sutherland, B Shim Optics letters 45 (5), 1252-1255, 2020 | 8 | 2020 |
3-octave supercontinuum generation and sub-2-cycle self-compression of mid-IR filaments in dielectrics H Liang, P Krogen, R Grynko, O Novak, CL Chang, GJ Stein, ... Advanced Solid State Lasers, ATu5A. 4, 2014 | 4 | 2014 |
Multi-shot and single-shot time-resolved visualization of material modification during laser micromachining with flexible glass D Dempsey, GC Nagar, JS Sutherland, RI Grynko, B Shim CLEO: Applications and Technology, JTu2A. 58, 2019 | 3 | 2019 |
Laser direct writing of waveguides in flexible glass and ultrafast visualization of its dynamics via time-resolved interferometry GC Nagar, D Dempsey, JS Sutherland, RI Grynko, B Shim CLEO: Science and Innovations, JTu2A. 3, 2018 | 3 | 2018 |
3D NAND Oxide/Nitride Tier Stack Thickness Measurements with Infrared Metrology Y Wang, Z Chen, C Wang, N Keller, GA Antonelli, Z Liu, T Ribaudo, ... 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2023 | 2 | 2023 |
Mid-IR laser filamentation in air at a kHz repetition rate H Liang, P Krogen, D Weerawarne, CJ Lai, R Grynko, B Shim, FX Kärtner, ... Mid-Infrared Coherent Sources, MT2C. 5, 2016 | 1 | 2016 |
Mid-IR filamentation in dielectrics: 3-Octave-spanning supercontinuum generation and sub-2-cycle self-compression HK Liang, PR Krogen, R Grynko, O Novak, CLL Chang, GJ Stein, ... CLEO: QELS_Fundamental Science, FTu4D. 2, 2015 | 1 | 2015 |
3D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology Y Wang, Z Chen, C Wang, N Keller, GA Antonelli, Z Liu, T Ribaudo, ... IEEE Transactions on Semiconductor Manufacturing, 2024 | | 2024 |
Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology N Keller, M Poulingue, R Grynko, T Ribaudo, GA Antonelli, V Li, ... Metrology, Inspection, and Process Control XXXVIII 12955, 253-265, 2024 | | 2024 |
Measurement of W-recess profile in advanced node 3D NAND device with IRCD technology utilizing a specialized design-rule compliant target N Keller, Z Chen, P Wang, R Grynko, T Ribaudo, GA Antonelli, Y Wang, ... Metrology, Inspection, and Process Control XXXVII 12496, 530-542, 2023 | | 2023 |
Ultrafast observation of intense light-matter interactions in flexible glass via single-shot frequency domain holography D Dempsey, GC Nagar, CK Renskers, RI Grynko, JS Sutherland, B Shim Frontiers in Optics, FM1C. 4, 2020 | | 2020 |
Single-shot ultrafast visualization of plasma dynamics and nonlinear index of refraction in flexible glass using frequency domain holography D Dempsey, G Nagar, C Renskers, R Grynko, J Sutherland, B Shim APS Division of Plasma Physics Meeting 2019, 2019 | | 2019 |
Plasma-assisted light bullets and wavelength scaling of laser filamentation in the long-wavelength infrared R Grynko, G Nagar, B Shim APS Division of Plasma Physics Meeting 2018, 2018 | | 2018 |
Sub-cycle light bullets in the long-wavelength infrared RI Grynko, GC Nagar, B Shim CLEO: Science and Innovations, JTu2A. 132, 2018 | | 2018 |